Abstract
Polymer-based substrate with patterned microstructures has been widely utilized for the development of cell chip in tissue engineering and/or flexible sensors in robotics. The key challenge is to fabricate the polymer-based substrate with the localized patterned microstructures. In this study, we presented a method to fabricate localized microstructures by standing surface acoustic wave (SSAW) and user-defined waveguides. To investigate the working mechanism, we developed a 3D numerical model to analyze the induced acoustic pressure distribution and final generated microstructures. Results demonstrated that the utilized waveguide could localize the acoustic pressure field in a specified region within the prepared photosensitive fluid film based on Rayleigh’s radiation theory and capillary wave motion. By adjusting the SSAW driven modes and using different shaped waveguides, both numerical modeling and experimental tests showed that the localized microstructures can form on the liquid film and then successfully fabricated using ultraviolet (UV) solidification. Therefore, our developed method by using the SSAW and waveguide provides a promising alternative process to fabricate the polymer-based microstructure with localized patterns, and the fabricated polymer-based microstructures could be used for the development of flexible sensors, actuator, and/or soft robotics in future applications.
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References
S. Dai, Y. Zhu, Y. Gu, Z. Du, Appl. Phys. A 125, 138 (2019)
T. Hu, Y. Wu, X. Zhao, L. Wang, L. Bi, P.X. Ma, B. Guo, Chem. Eng. J. 366, 208–222 (2019)
S. Chun, Y. Choi, D.I. Suh, G.Y. Bae, S. Hyun, W. Park, Nanoscale 9, 10248 (2017)
G. Liang, Y. Wang, D. Mei, K. Xi, Z. Chen, J. Micromech. Microeng. 26, 045007 (2016)
H.O.S. Yadav, A. Kuo, S. Urata, W. Shinoda, Langmuir 35, 14316–14323 (2019)
A.E. Kovalev, M. Varenberg, S.N. Gorb, Soft Matter 8, 7560 (2012)
S. Park, J.H. Moon, S. Lee, J. Shim, S. Yang, Langmuir 26, 1468–1472 (2010)
Y. Wan, Z. Qiu, Y. Hong, Y. Wang, J. Zhang, Q. Liu, Z. Wu, C.F. Guo, Adv. Electron. Mater. 4, 1700586 (2018)
K. Obata, S. Slobin, A. Schonewille, A. Hohnholz, C. Unger, J. Koch, O. Suttmann, L. Overmeyer, Appl. Phys. A 123, 495 (2017)
S. Chu, T.E. Winkler, A.D. Brown, J.N. Culve, R. Ghodssi, Langmuir 34, 1725–1732 (2018)
J. Liu, L. Li, H. Suo, M. Yan, J. Yin, J. Fu, Mater. Des. 171, 107708 (2019)
D. Xue, J. Zhang, Y. Wang, D. Mei, A.C.S. Biomater, Sci. Eng. 5, 4825–4833 (2019)
D. Mei, D. Xue, Y. Wang, S. Chen, Appl. Phys. Lett. 108, 241911 (2016)
F. Guo, Z. Mao, Y. Chen, Z. Xie, J.P. Lata, P. Li, L. Ren, J. Liu, J. Yang, M. Dao, S. Suresh, T.J. Huang, Proc. Natl. Acad. Sci. USA 113, 1522–1527 (2016)
A. Qi, L.Y. Yeo, J.R. Friend, Phys. Fluids 20, 74103 (2008)
M.K. Tan, J.R. Friend, O.K. Matar, L.Y. Yeo, Phys. Fluids 22, 112112 (2010)
Y. Wang, D. Xue, D. Mei, ASME J. Micro Nano Manuf. 6, 21002–21009 (2018)
Y. Wang, Z. Yu, D. Mei, D. Xue, Procedia CIRP 65, 279–283 (2017)
B.R. Ware, M.J. Durham, C.P. Monckton, S.R. Khetani, Cells Cell. Mol. Gastroenterol. Hepatol. 5, 187–207 (2018)
S.R. Khetani, S.N. Bhatia, Nat. Biotechnol. 26, 120–126 (2008)
G. Liang, D. Mei, Y. Wang, Z. Chen, IEEE Sens. J. 14, 4095–4103 (2014)
Y. Bian, F. Guo, S. Yang, Z. Mao, H. Bachman, S. Tang, L. Ren, B. Zhang, J. Gong, X. Guo, T.J. Huang, Microfluid Nanofluid 21, 132 (2016)
D.J. Collins, R. O’Rorke, C. Devendran, Z. Ma, J. Han, A. Neild, Y. Ai, Phys. Rev. Lett. 120, 074502 (2018)
H. Bruus, Lab Chip 12, 20–28 (2012)
C. Han, Y. Wang, D. Mei, Proceedings of the ASME 2019 international manufacturing science and engineering conference, Erie, Pennsylvania, USA (2019).
Y. Wang, C. Han, D. Mei, Langmuir 35, 11225–11231 (2019)
R. Courant, K.O. Friedrichs, H. Lewy, IBM J. 11, 215–234 (1956)
Z. Ma, D.J. Collins, Y. Ai, Anal. Chem. 88, 5316–5323 (2016)
J. Dual, D. Mller, Lab Chip 12, 506–514 (2012)
L. Schmid, D.A. Weitz, T. Franke, Lab Chip 14, 3710–3718 (2014)
H. Bruus, Lab Chip 11, 3742–3751 (2011)
C. Devendran, T. Albrecht, J. Brenker, T. Alan, A. Neild, Lab Chip 16, 3756–3766 (2016)
L.E. Kinsler, J.R. Friend, O.K. Matar, L.Y. Yeo, Fundamentals of acoustics (Hamilton Press, New York, 2010)
C. Ramadas, K. Balasubramaniam, A. Hood, M. Joshi, C.V. Krishnamurthy, Compos. Struct. 93, 2020–2025 (2011)
M. Ohkawa, K. Murata, T. Sato, Proceedings of SPIE, San Francisco, California, United States (2012)
Sigma, PEGDA material properties. https://www.sigmaaldrich.com/catalog/product/aldrich/475629?lang=en®ion=US. Accessed 30 May 2020
N. Bertin, H. Chraibi, R. Wunenburger, J.P. Delville, E. Brasselet, Phys. Rev. Lett. 109, 244304 (2012)
Acknowledgements
This work was supported by the National Natural Science Foundation of China (U1809220), Zhejiang Provincial Funds for Distinguished Young Scientists of China (LR19E050001), Open Fund Project of Zhijiang Laboratory (2019MC0AB02), and the Fund for Creative Research Groups of National Natural Science Foundation of China (51821093).
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Han, C., Wang, Y. & Mei, D. Acoustofluidic waveguides for fabrication of localized polymeric microstructure arrays. Appl. Phys. A 126, 651 (2020). https://doi.org/10.1007/s00339-020-03860-4
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DOI: https://doi.org/10.1007/s00339-020-03860-4