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Thermodynamic aspects of co-formation of different condensed phases from CH4–WCl6 gas mixtures diluted in H2

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Abstract

Gibbs free energy minimization approach was used to identify the temperature, pressure and composition ranges under which the co-formation of different condensed phases (namely graphite, diamond, WC, etc.) takes places from CH4–WCl6 gas mixtures diluted in H2. Binary and ternary-phase diagrams are constructed to show the formation of different equilibrium solid phases at different initial conditions. The optimum conditions for co-formation of hard phases namely diamond and WC phases at equilibrium are: temperature in the range 973–2073 K, pressure in the range 10–50 Torr, H2/CH4 molar ratio of 10 or less and WCl6/CH4 molar ratio in the range 0.1–0.9. This work paves a way to plan chemical vapor deposition experiments that may result in composite films consisting of hard phases such as diamond and WC.

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References

  1. X. Jiang, C.P. Klages, Appl. Phys. Lett. 61, 1629 (1992)

    Article  ADS  Google Scholar 

  2. V.V.S.S. Srikanth, T. Staedler, X. Jiang, Appl. Phys. A. 91, 149 (2008)

    Article  ADS  Google Scholar 

  3. V.V.S.S. Srikanth, X. Jiang, A. Köpf, Surf. Coat. Technol. 204, 2362 (2010)

    Article  Google Scholar 

  4. V.V.S.S. Srikanth, T. Staedler, X. Jiang, Diamond Relat. Mater. 18, 1326 (2009)

    Article  ADS  Google Scholar 

  5. H.A. Samra, R. Hong, X. Jiang, Chem. Vap. Depos. 13, 17 (2007)

    Article  Google Scholar 

  6. V.V.S.S. Srikanth, V.B. Trindade, T. Staedler, X. Jiang, Chem. Vap. Depos. 14, 78 (2008)

    Article  Google Scholar 

  7. F. Ding, Y. Shi, Surf. Coat. Technol. 201, 5050 (2007)

    Article  Google Scholar 

  8. M. Nagano, T. Urasaki, K. Wakiyama, M. Komori, Diamond Relat. Mater. 6, 501 (1997)

    Article  ADS  Google Scholar 

  9. M.L. Terranova, S. Peccadillo, V. Sesser, M. Rossi, G. Cappuccino, Chem. Vap. Depos. 5, 101 (1999)

    Article  Google Scholar 

  10. J. Hojo, T. Oku, A. Kato, J. Less Common Met. 59, 85 (1978)

    Article  Google Scholar 

  11. T. Ryu, H.Y. Sohn, K.S. Hwang, Z.Z. Fang, J. Mater. Sci. 43, 5185 (2008)

    Article  ADS  Google Scholar 

  12. X. Tang, R. Haubner, B. Lux, B. Kieffer, J. Dephysique IV 5, C5–C1013 (1995)

    Google Scholar 

  13. C.W. Won, B.S. Chun, J. Mater. Res. 8, 2702 (1993)

    Article  ADS  Google Scholar 

  14. M. Fitzsimmons, V.K. Sarin, Surf. Coat. Technol. 76, 250 (1995)

    Article  Google Scholar 

  15. E.J. Carat, N.G. Ferreira, N.F. Leite, V.J. Trava-Airoldi, J. Mater. Res. 6, 63 (2002)

    Article  Google Scholar 

  16. R.S. Tsang, P.W. May, M.N.R. Ashfold, Diamond Relat. Mater. 8, 242 (1999)

    Article  ADS  Google Scholar 

  17. L. Dong, B. Ma, G. Dong, Diamond Relat. Mater. 11, 1697 (2002)

    Article  ADS  Google Scholar 

  18. R.B. Corvin, J.G. Harrison, S.A. Catledge, Y.K. Vohra, Appl. Phys. Lett. 80, 2550 (2002)

    Article  ADS  Google Scholar 

  19. J.R. Petherbridge, P.W. May, S.R.J. Pearce, K.N. Rosser, M.N.R. Ashfold, J. Appl. Phys. 89, 1484 (2001)

    Article  ADS  Google Scholar 

  20. K.T. Jacob, N. Gundiah, A.G. Menon, High Temp. Mater. Proc. 15, 223 (1996)

    Article  Google Scholar 

  21. J.R. Petherbridge, P.W. May, M.N.R. Ashfold. J. Appl. Phys. 89, 5219 (2001)

    Article  ADS  Google Scholar 

  22. J.T. Wang, C.B. Cao, P.J. Zheng, J. Electrochem. Soc. 141, 278 (1994)

    Article  Google Scholar 

  23. Y. Gogotsi, S. Weiz, D.A. Ersoy, M.J. McNallan, Nature 411, 283 (2001)

    Article  ADS  Google Scholar 

  24. M. Sommer, K. Mui, F.W. Smith, Solid State Commun. 69, 775 (1989)

    Article  ADS  Google Scholar 

  25. J.C. Angus, C.C. Hayman, Science 241, 913 (1988)

    Article  ADS  Google Scholar 

  26. Z.J. Liu, D.W. Zhang, Y.Z. Wan, J.Y. Zhang, J.T. Wang, Appl. Phys. A 68, 359 (1999)

    Article  ADS  Google Scholar 

  27. Y. Zhu, L. Cheng, S. Gao, J. Li, J. Deng, L. Zhang, Ceram. Int. 40(5), 6427 (2014)

    Article  Google Scholar 

  28. J. Deng, L. Cheng, G. Zhang, K. Su, L. Zhang, Thin Solid. Films 520, 7030 (2012)

    Article  ADS  Google Scholar 

  29. J. Xue, X. Yin, Y. Fang, L. Zhang, L. Cheng, J. Am. Ceram. Soc. 96, 979 (2013)

    Article  Google Scholar 

  30. Q.M. Liu, L.T. Zhang, J. Liu, Y.G. Wang, Inorg. Mater. 46, 1090 (2010)

    Article  Google Scholar 

  31. N. Dong, N. Chai, Y. Liu, X. Liu, H. Qin et al., J. Eur. Ceram. Soc. 36, 3581 (2016)

    Article  Google Scholar 

  32. Y.L. Zhao, R.Q. Zhang, V.V.S.S. Srikanth, X. Jiang, J. Phys. Chem. A 111(18), 3554 (2007)

    Article  Google Scholar 

  33. X. Jiang, V.V.S.S. Srikanth, Y.L. Zhao, R.Q. Zhang, Appl. Phys. Lett. 92, 243107 (2008)

    Article  ADS  Google Scholar 

  34. C.W. Bale, E. Belisle, P. Chartrand, S.A. Decterov, G. Eriksson et al., Calphad 54, 35 (2016)

    Article  Google Scholar 

  35. V.V.S.S. Srikanth, X. Jiang, in Synthesis of diamond films, ed. by C.A. Martínez-Huitle, E. Brillas (Wiley, Hoboken, 2011). https://doi.org/10.1002/9781118062364.ch2

    Chapter  Google Scholar 

  36. S. Matsumoto, Y. Sato, M. Tsutsumi, N. Setaka, J. Mater. Sci. 17, 3106 (1982)

    Article  ADS  Google Scholar 

  37. S.M. Leeds, P.W. May, E. Bartlettt, M.N.R. Ashfold, K.N. Rosser, Diamond Relat. Mater. 8, 1377 (1999)

    Article  ADS  Google Scholar 

  38. J.J. Gracio, Q.H. Fan, J.C. Madaleno, J. Phys. D Appl. Phys. 43, 374017 (2010)

    Article  Google Scholar 

  39. M.A. Kelly, D.S. Olson, S. Kapoor, S.B. Hagstrom, Appl. Phys. Lett. 60, 2502 (1992)

    Article  ADS  Google Scholar 

  40. G. Lombardi, K. Hassouni, G.D. Stancu, L. Mechold, J. Röpcke, A. Gicquel, J. Appl. Phys. 98, 053303 (2005)

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. School of Engineering Sciences and Technology, University of Hyderabad, Gachibowli, Hyderabad, 500046, India

    Regala Aneela & Vadali V. S. S. Srikanth

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  1. Regala Aneela
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  2. Vadali V. S. S. Srikanth
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Correspondence to Vadali V. S. S. Srikanth.

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Aneela, R., Srikanth, V.V.S.S. Thermodynamic aspects of co-formation of different condensed phases from CH4–WCl6 gas mixtures diluted in H2. Appl. Phys. A 124, 638 (2018). https://doi.org/10.1007/s00339-018-2052-0

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