Skip to main content
SpringerLink
Log in

Fast deposition of thick diamond-like carbon films by ion-beam technique

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

A diamond-like carbon film doped with TiC nanocrystallites (TiC–DLC) with a thickness of 35.8 μm was successfully prepared on a stainless steel substrate by employing a combination of metal vapor vacuum arc and filtered cathode vacuum arc techniques. A maximum deposition rate of 0.25 μm/min was achieved for TiC–DLC films. The structure and properties of the TiC–DLC films were systematically analyzed using different methods such as transmission electron microscopy, X-ray photoelectron spectroscopy, Raman spectroscopy, scanning electron microscopy, X-ray diffraction, and friction and wear tests. The results indicated that typical a-C:H films containing nano-sized TiC grains were deposited which exhibit improved mechanical properties such as high cohesive strength, Vickers hardness, and capacity against high temperature. Parameter windows for C2H2 flow rate and solenoid current were also provided for the deposition of TiC–DLC films to meet the requirements for using the material for specific commercial applications.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

References

  1. H.X. Liu, Q. Xu, C.Q. Wang, X.W. Zhang, Surf. Coat. Technol. 228, S159–S163 (2013)

    Article  Google Scholar 

  2. W.M. Silva, L.M. Jesus, J.R. Carneiro, P.S. Souza, P.S. Martins, V.J. Trava-Airoldi, 284, 404–409 (2015)

  3. R. Hatada, S. Flege, A. Bobrich, W. Ensinger, K. Baba, Surf. Coat. Technol. 256, 23–29 (2014)

    Article  Google Scholar 

  4. C.P. Chen, A.H. Tan, Surf. Eng. 7(3), 151–157 (2011)

    Article  Google Scholar 

  5. S. Wang, F. Wang, Z. Liao, Q. Wang, R. Tyagi, W. Liu, Surf. Eng. 31(12), 934–941 (2015)

    Article  Google Scholar 

  6. E.R. Petry, C.D. Boeira, F. Cemin, L.M. Leidens, L.T. Bim, D.G. Larrude, M.E.H. Maia da Costa, C.A. Figueroa, Surf. Eng. 32(10), 779–785 (2016)

    Article  Google Scholar 

  7. G.J. Ma, S.L. Gong, G.Q. Lin, Appl. Surf. Sci. 258, 3045–3050 (2012)

    Article  ADS  Google Scholar 

  8. N.M. Jennett, A.S. Maxwell, K. Lawrence, L.N. McCartney, R. Hunt, J. Koskinen, NPL Report MATC (A) 24 (2001)

  9. S. Flege, R. Hatada, M. Hoefling, A. Hanauer, A. Abel, K. Baba, W. Ensinger, Nucl. Instrum. Methods Phys. Res. B 365, 357–361 (2015)

    Article  ADS  Google Scholar 

  10. D. Bociąga, W. Jakubowski, P. Komorowski, A.S. Guzenda, A. Jędrzejczak, Mater. Sci. Eng. C 63, 462–474 (2016)

    Article  Google Scholar 

  11. S.M. Mominuzzanma, T. Soga, T. Jimbo, Diam. Relat. Mater. 10, 1839–1842 (2001)

    Article  ADS  Google Scholar 

  12. G.M. Fuge, P.W. May, K.N. Rosser, Diam. Relat. Mater. 13, 1442–1448 (2004)

    Article  ADS  Google Scholar 

  13. W.Q. Bai, L.L. Li, X.L. Wang, F.F. He, D.G. Liu, G. Jin, J.P. Tu, Surf. Coat. Technol. 266, 70–78 (2015)

    Article  Google Scholar 

  14. L. Raymond, D.M. Boxman, Handbook of vacuum arc science and technology [M] (Noyes Publications, USA, 1995)

    Google Scholar 

  15. B. Kleinsorge, A. Lie, M. Chhowalla, Diam. Relat. Mater. 7, 472–476 (1998)

    Article  ADS  Google Scholar 

  16. J. Vetter, Surf. Coat. Technol. 257, 213 (2014)

    Article  Google Scholar 

  17. S.V. Hainsworth, N.J. Uhure, Int. Mater. Rev. 52(3), 153 (2007)

    Article  Google Scholar 

  18. M. Yatsuzuka, Y. Oka, M. Nishijima, K. Hirag, Vacuum 83, 190 (2009)

    Article  ADS  Google Scholar 

Download references

Acknowledgements

This work is supported by the National Natural Science Foundation of China under Grant no. 11305009.

Author information

Authors and Affiliations

  1. College of Nuclear Science and Technology, Beijing Normal University, Beijing, 100875, China

    Bin Liao, Jingjing Yu, Yudong Wang, Qili Jiang, Jun Luo, Xu Zhang, Xianying Wu & Minju Ying

  2. Beijing Radiation Center, Beijing, 100088, China

    Bin Liao, Jingjing Yu, Yudong Wang, Qili Jiang, Jun Luo, Xu Zhang, Xianying Wu & Minju Ying

  3. Jiangnan University, Jiangshu, China

    Baoan Bian

Authors
  1. Bin Liao
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jingjing Yu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yudong Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Baoan Bian
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Qili Jiang
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Jun Luo
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Xu Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Xianying Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Minju Ying
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Bin Liao.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Liao, B., Yu, J., Wang, Y. et al. Fast deposition of thick diamond-like carbon films by ion-beam technique. Appl. Phys. A 123, 544 (2017). https://doi.org/10.1007/s00339-017-1161-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s00339-017-1161-5

Search

Navigation