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Specular X-ray reflectivity study of interfacial SiO2 layer in thermally annealed NiO/Si assembly

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Abstract

Present report details an analysis of X-ray reflectivity (XRR) for solution processed NiO thin films on Si (100) substrates. The films were annealed at 700–1,000 °C for 1 h in air. XRR data indicated growth of SiO2 layer from ~8 nm at 700 °C to ~66 nm at 1,000 °C along with significant variation of electron density profile. X-ray photoelectron spectroscopy and X-ray diffraction studies were used as supporting studies for phase purity and oxidation states of the NiO thin films as well as interfacial SiO2 layer.

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References

  1. H.S. Bennett, R. Brederlow, J.C. Costa, P.E. Cottrell, W.M. Huang, A.A. Immorlica, J.-E. Mueller, M. Racanelli, H. Shichijo, C.E. Weitzel, Zhao Bin, Electron. Devices IEEE Trans. 52(7), 1235 (2005)

    Article  ADS  Google Scholar 

  2. K. Kim, J.-Y. Choi, T. Kim, Nature 479, 338 (2011)

    Article  ADS  Google Scholar 

  3. X. Chen, C. Li, H.K. Tsang, NPG Asia Mater. 3, 34 (2011)

    Article  Google Scholar 

  4. K.M. Kim, D.S. Jeong, C.S. Hwang, Nanotechnology 22, 254002 (2011)

    Article  ADS  Google Scholar 

  5. X.G. Zhang, Electrochemistry of silicon and its oxide (Kluwer academic/Plenum publishers, New York, 2001)

    Google Scholar 

  6. J.-H. Choi, S.N. Das, J.-M. Myoung, Appl. Phys. Lett. 95, 062105 (2009)

    Article  ADS  Google Scholar 

  7. K. Koizumi, M. Boero, Y. Shigeta, A. Oshiyama, Phys. Rev. B 85, 205314 (2012)

    Article  ADS  Google Scholar 

  8. T. Cui, G. Liang, J. Shi, J. NanoSci, Nanotechnology 3(6), 526–528 (2003)

    Google Scholar 

  9. D. Wang, Q. Wang, A. Javey, R. Tu, H. Dai, H. Kim, P.C. McIntyre, T. Krishnamohan, K.C. Saraswat, Appl. Phys. Lett. 83(12), 2432–2433 (2003)

    Article  ADS  Google Scholar 

  10. E. Lochner, G. Brown, D. OHara, Microsc. Microanal. 14, 1264 (2008)

    Article  Google Scholar 

  11. E. Arslan, Y. Safak, I. Tasçıoğlu, H. Uslu, E. Özbay, Microelectron. Eng. 87, 1997 (2010)

    Article  Google Scholar 

  12. A. Kaya, Ş. Altındal, Y. Şafak Asar, Z. Sönmez, Chin. Phys. Lett. 30(1), 017301 (2013)

    Article  Google Scholar 

  13. A.M. Soleimanpour, A.H. Jayatissa, Mater. Sci. Eng. C 32, 2230 (2012)

    Article  Google Scholar 

  14. F. Miao, B. Tao, P. Ci, J. Shi, L. Wang, P.K. Chu, Mater. Res. Bull. 44, 1920 (2009)

    Article  Google Scholar 

  15. K. Sun, N. Park, Z. Sun, J. Zhou, J. Wang, X. Pang, S. Shen, S.Y. Noh, Y. Jing, S. Jin, P.K.L. Yu, D. Wang, Energy Environ. Sci. 5, 7872 (2012)

    Article  Google Scholar 

  16. J.Y. Son, Y.-H. Shin, Appl. Phys. Lett. 92, 222106 (2008)

    Article  ADS  Google Scholar 

  17. A. Sawa, Mater. Today 11(6), 28 (2008)

    Article  Google Scholar 

  18. S. Mitra, S. Chakraborty, K.S.R. Menon, Appl. Phys. A 115, 1173 (2014)

  19. S.K. Mahatha, K.S.R. Menon, Curr. Sci. 98, 759 (2010)

    Google Scholar 

  20. S. Dourdain, J.-F. Bardeau, M. Colas, B. Smarsly, A. Mehdi, B.M. Ocko, A. Gibaud, Appl. Phys. Lett. 86, 113108 (2005)

    Article  ADS  Google Scholar 

  21. A. Gibaud, S. Hazra, Curr. Sci. 78(12), 1467 (2000)

    Google Scholar 

  22. L.G. Parratt, Phys. Rev. 95, 359 (1954)

    Article  ADS  Google Scholar 

  23. J.K. Bal, S. Kundu, S. Hazra, Eur. Phys. J. E 35, 79 (2012)

    Article  Google Scholar 

  24. C.F. Majkrzak, N.F. Berk, Rev. B Condens. Matter. 52(15), 10827 (1995)

    Article  ADS  Google Scholar 

  25. E. Politsch, G. Cevc, J. Appl. Cryst. 35, 347 (2002)

    Article  Google Scholar 

  26. B.L. Henke, E.M. Gullikson, J.C. Davis, X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50–30000 eV, Z = 1–92. Atomic Data Nucl. Data Tables 54(2), 181 (1993)

    Article  ADS  Google Scholar 

  27. M.K. Sanyal, S. Hazra, J.K. Basu, A. Datta, Phys. Rev. B 58, R4258 (1998)

    Article  ADS  Google Scholar 

  28. S. Hazra, S. Pal, S. Kundu, M.K. Sanyal, Appl. Surf. Sci. 182, 244 (2001)

    Article  ADS  Google Scholar 

  29. S. Pal, M.K. Sanyal, S. Hazra, S. Kundu, F. Schreiber, J. Pflaum, E. Barrena, H. Dosch, J. Appl. Phys. 95, 1430 (2004)

    Article  ADS  Google Scholar 

  30. S. Banerjee, Y.J. Park, D.R. Lee, Y.H. Jeong, B. Lee, S.B. Yoon, H.M. Choi, J.-C. Park, J.S. Roh, M.K. Sanyal, Appl. Surf. Sci. 136, 41 (1998)

    Article  ADS  Google Scholar 

  31. X.L. Li, W.F. Xiang, H.B. Lu, Z.H. Mai, J. Appl. Phys. 97, 124104 (2005)

    Article  ADS  Google Scholar 

  32. ICSD, Inorganic crystal structure database, Fachinformationzentrum Karlsruhe, (2003) file no. 61324

  33. D. Ielmini, S. Spiga, F. Nardi, C. Cagli, A. Lamperti, E. Cianci, M. Fanciulli, J. Appl. Phys. 109, 034506 (2011)

    Article  ADS  Google Scholar 

  34. S.D. Elliott, G. Scarel, C. Wiemer, M. Fanciulli, G. Pavia, Chem. Mater. 18, 3764 (2006)

    Article  Google Scholar 

  35. S. Mandal, K.S.R. Menon, Eur. Phys. J. B 85(1), 1 (2012)

    Article  ADS  Google Scholar 

  36. T. Inoue, T. Ohsuna, Y. Obara, Y. Yamamoto, M. Sato, Y. Sakurai, Jpn. J. Appl. Phys. 32, 1765 (1993)

    Article  ADS  Google Scholar 

  37. A. Bardal, O. Eibl, Th Matthee, G. Friedl, J. Wecker, J. Mater. Res. 8, 2112 (1993)

    Article  ADS  Google Scholar 

  38. S.C. Choi, M.H. Cho, S.W. Whangbo, C.N. Whang, S.B. Kang, S.I. Lee, M.Y. Lee, Appl. Phys. Lett. 71(7), 903 (1997)

    Article  ADS  Google Scholar 

  39. M.E. Hunter, M.J. Reed, N.A. El-Masry, J.C. Roberts, S.M. Bedair, Appl. Phys. Lett. 76(14), 1935 (2000)

    Article  ADS  Google Scholar 

  40. B.E. Deal, A.S. Grove, J. Appl. Phys. 36(12), 3770 (1965)

    Article  ADS  Google Scholar 

  41. S. Banerjee, S. Ferrarib, D. Chateignerc, A. Gibaud, Thin Solid Films 450, 23 (2004)

    Article  ADS  Google Scholar 

  42. J. Hedman, Y. Baer, A. Berndtsson, M. Klasson, G. Leonhardt, R. Nilsson, C. Nordling, J. Electron Spectrosc. Relat. Phenom. 1, 101 (1972)

    Article  Google Scholar 

  43. T. Gross, M. Ramm, H. Sonntag, W. Unger, H.M. Weijers, E.H. Adem, Surf. Interface Anal. 18, 59 (1992)

    Article  Google Scholar 

  44. A.M. Venezia, R. Bertoncello, G. Deganello, Surf. Interface Anal. 23, 239 (1995)

    Article  Google Scholar 

  45. M.H. Kibel, P.W. Leech, Surf. Interface Anal. 24, 605 (1996)

    Article  Google Scholar 

  46. K. Kishi, S. Ikeda, Bull. Chem. Soc. Jpn 46, 341 (1973)

    Article  Google Scholar 

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Acknowledgments

Authors thank the Department of Science and Technology, India for the financial support and Saha Institute of Nuclear Physics, India for facilitating the experiments at the Indian Beamline, Photon Factory, KEK, Japan.

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Authors and Affiliations

  1. Surface Physics and Material Science Division, Saha Institute of Nuclear Physics, 1/AF Bidhan Nagar, Kolkata, 700064, India

    Subarna Mitra, Suvankar Chakraborty & Krishnakumar S. R. Menon

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  1. Subarna Mitra
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  2. Suvankar Chakraborty
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  3. Krishnakumar S. R. Menon
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Correspondence to Subarna Mitra.

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Mitra, S., Chakraborty, S. & Menon, K.S.R. Specular X-ray reflectivity study of interfacial SiO2 layer in thermally annealed NiO/Si assembly. Appl. Phys. A 117, 1185–1190 (2014). https://doi.org/10.1007/s00339-014-8500-6

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