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A rapid synthesis/growth process producing massive ZnO nanowires for humidity and gas sensing

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Abstract

We report a rapid and simple process to massively synthesize/grow ZnO nanowires capable of manufacturing massive humidity/gas sensors. The process utilizing a chemical solution deposition with an annealing process (heating in vacuum without gas) is capable of producing ZnO nanowires within an hour. Through depositing the ZnO nanowires on the top of a Pt-interdigitated-electrode/SiO2/Si-Wafer, a humidity/gas-hybrid sensor is fabricated. The humidity sensitivity (i.e., ratio of the electrical resistance of the sensor at 11–95 % relative humidity level) is approximately 104. The response and recovery time with the humidity changing from 11 to 95 % directly and reversely is 6 and 10 s, respectively. The gas sensitivity (i.e., ratio of electrical resistance of the sensor under the air to vaporized ethanol) is increased from 2 to 56 when the concentration of the ethanol is increased from 40 to 600 ppm. Both the response and recovery times are less than 15 s for the gas sensor. These results show the sensor utilizing the nanowires exhibits excellent humidity and gas sensing.

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Acknowledgments

The authors would like to thank the National Science Council of the Republic of China, Taiwan, for financially supporting this research under Contract No. NSC 101-2218-E-539-001 and NSC 102-2623-E-539-001-ET. The authors also thank Mr. Chieh-Min Wang in National Chiao Tung University, Taiwan for the electrode preparation and TEM/HR-TEM characterization.

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Authors and Affiliations

  1. Department of General Education and Power Mechanical Engineering, Army Academy, Chung Li, 32092, Taiwan

    Nai-Feng Hsu

  2. Department of Mechanical Engineering, National Chiao Tung University, Hsin-chu, 30010, Taiwan

    Tien-Kan Chung

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  1. Nai-Feng Hsu
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  2. Tien-Kan Chung
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Correspondence to Nai-Feng Hsu.

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Hsu, NF., Chung, TK. A rapid synthesis/growth process producing massive ZnO nanowires for humidity and gas sensing. Appl. Phys. A 116, 1261–1269 (2014). https://doi.org/10.1007/s00339-013-8217-y

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  • DOI: https://doi.org/10.1007/s00339-013-8217-y

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