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Ultrafast laser ablation of metal films on flexible substrates

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Abstract

For the development of organic electronics on flexible substrates, we study the potentialities of direct laser patterning of conductive films deposited on plastic foils. The materials under study are silver and platinum films (100-nm thick) deposited on Kapton® substrates. The experiments are done using a laser source operating at 1030 nm, 500 fs, under different irradiation conditions: single and multiple pulses at various frequencies. The laser ablation thresholds are measured and the ablation morphologies are analyzed with scanning electron microscopy. The results of these investigations show that photomechanical effects lead to delamination of the film and that depending of the irradiation conditions, incubation or heat accumulation effects can occur. The experimental results are compared to simulations based on the two-temperature model. Particularly we study the heat accumulation effects that can occur in the case of multiple pulses and that are detrimental for plastic substrates.

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References

  1. A.C. Hubler, G.C. Schmidt, H. Kempa, K. Reuter, M. Hambsch, M. Bellmann, Org. Electron. 12, 419 (2011)

    Article  Google Scholar 

  2. N.A. Azarova, J.W. Owen, C.A. McLellan, M.A. Grimminger, E.K. Chapman, J.E. Anthony, O.D. Jurshescu, Org. Electron. 11, 1960 (2010)

    Article  Google Scholar 

  3. X. Nie, H. Wang, J. Zou, Appl. Surf. Sci. 261, 554 (2012)

    Article  ADS  Google Scholar 

  4. D. Karnakis, A. Kearsley, M. Knowles, J. Laser Micro Nanoeng. 4, 218 (2009)

    Article  Google Scholar 

  5. R. Mandamparambil, H. Fledderus, G. Van Steenberge, A. Dietzel, Opt. Express 18, 7575 (2010)

    Article  Google Scholar 

  6. S. Preuss, A. Demchuk, M. Stuke, Appl. Phys. A 61, 33 (1995)

    Article  ADS  Google Scholar 

  7. B.N. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996)

    Article  ADS  Google Scholar 

  8. M. Lenzner, J. Kruger, W. Kautek, F. Krausz, Appl. Phys. A 68, 369 (1999)

    Article  ADS  Google Scholar 

  9. K. Fuchs, Proc. Camb. Philos. Soc. 34 (1938)

  10. E.H. Sondheimer, Adv. Phys. 1 (1952)

  11. Q. Huang, W. Shen, W. Song, Synthesis of colourless silver precursor ink for printing conductive patterns on silicon nitride substrates. Appl. Surf. Sci. 258(19), 7384–7388 (2012)

    Article  ADS  Google Scholar 

  12. M.J. Webber, Handbook of Optical Materials (CRC Press, Boca Raton, 2003)

    Google Scholar 

  13. B. Mangote, L. Gallais, M. Zerrad, F. Lemarchand, L.H. Gao, M. Commandré, M. Lequime, Rev. Sci. Instrum. 83, 013109 (2012)

    Article  ADS  Google Scholar 

  14. J. Bonse, J.M. Wrobel, J. Kruger, W. Kautek, Appl. Phys. A 72, 89 (2001)

    Article  ADS  Google Scholar 

  15. Y. Jee, M.F. Becker, R.M. Walser, J. Opt. Soc. Am. B 5, 648 (1988)

    Article  ADS  Google Scholar 

  16. J. Byskov-Nielsen, J.M. Savolainen, M. Snogdahl, P. Balling, Appl. Phys. A 101, 97 (2010)

    Article  ADS  Google Scholar 

  17. Y. Dai, M. He, H. Bian, B. Lu, X. Yan, G. Ma, Appl. Phys. A 106, 567 (2012)

    Article  ADS  Google Scholar 

  18. M. Kimmel, P. Rambo, R. Broyles, M. Geissel, J. Schwarz, J. Bellum, B. Atherton, Proc. SPIE 7504, 75041G (2009)

    Article  ADS  Google Scholar 

  19. B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, S.I. Anisimov, Appl. Phys. A 79, 767 (2004)

    Article  ADS  Google Scholar 

  20. Y. Ren, J.K. Chen, Y. Zhang, J. Huang, Appl. Phys. Lett. 98, 191105 (2009)

    Article  ADS  Google Scholar 

  21. S.I. Anisimov, B.S. Luk’yanchuk, Phys. Usp. 45, 293 (2002)

    Article  Google Scholar 

  22. Z. Lin, L.V. Zhigilei, V. Celli, Phys. Rev. B 77, 075133 (2008)

    Article  ADS  Google Scholar 

  23. X.Y. Wang, D.M. Riffe, Y.-S. Lee, M.C. Downer, Phys. Rev. B 50, 8016 (1994)

    Article  ADS  Google Scholar 

  24. E. Leveugle, D.S. Ivanov, L.V. Zhigilei, Appl. Phys. A 79, 1643 (2004)

    ADS  Google Scholar 

  25. D.S. Ivanov, B. Rethfeld, G.M. O’Connor, T.J. Glynn, A.N. Volkov, L.V. Zhigilei, Appl. Phys. A 92, 791 (2008)

    Article  ADS  Google Scholar 

  26. D.E. Hare, J. Franken, D.D. Dlott, J. Appl. Phys. 77, 5950 (1995)

    Article  ADS  Google Scholar 

  27. T.V. Kononenko, S.M. Pimenov, V.V. Kononenko, E.V. Zavedeev, V.I. Konov, G. Dumitru, V. Romano, Appl. Phys. A 79, 543 (2004)

    Article  ADS  Google Scholar 

  28. S.E. Kirkwood, A.C. Van Popta, Y.Y. Tsui, R. Fedosejevs, Appl. Phys. A 81, 129 (2005)

    Article  Google Scholar 

  29. P.T. Mannion, J. Magee, E. Coyne, G.M. O’Connor, T.J. Glynn, Appl. Surf. Sci. 233, 275 (2004)

    Article  ADS  Google Scholar 

  30. C.S. Lee, N. Koumvakalis, M. Bass, Appl. Phys. Lett. 41, 625 (1982)

    Article  ADS  Google Scholar 

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Acknowledgements

We gratefully acknowledge the Mission des Ressources et Compétences Technologiques from the Centre National de la Recherche Scientifique for their financial support.

We thank F. Lemarchand (Institut Fresnel) for the spectrophotometric measurements.

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Authors and Affiliations

  1. Institut Fresnel, UMR 7249, Aix Marseille Université, CNRS, Centrale Marseille, 13013, Marseille, France

    L. Gallais

  2. IM2NP UMR 7334, Aix-Marseille Université, CNRS, 13397, Marseille Cedex 20, France

    E. Bergeret, M. Guerin & E. Bènevent

  3. Department of Applied Physics, Nanjing University of Science & Technology, Nanjing, 210094, P.R. China

    B. Wang

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  1. L. Gallais
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  2. E. Bergeret
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  4. M. Guerin
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  5. E. Bènevent
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Correspondence to L. Gallais.

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Gallais, L., Bergeret, E., Wang, B. et al. Ultrafast laser ablation of metal films on flexible substrates. Appl. Phys. A 115, 177–188 (2014). https://doi.org/10.1007/s00339-013-7901-2

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  • DOI: https://doi.org/10.1007/s00339-013-7901-2

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