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On Predtechensky and Mayorov model for the plume expansion dynamics study into an ambient gas during thin film deposition by laser ablation

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Abstract

The plume expansion dynamics for the Sm1−x Nd x NiO3 thin films deposition by a KrF excimer laser into oxygen atmosphere has been investigated using fast imaging. The study was carried out at 0.2 and 0.3 mbar of oxygen pressure and for different laser fluences. The plasma plume dynamics was analysed in the framework of Predtechensky and Mayorov (PM) model. It was found that PM model gives a general description of the plume expansion by using parameters (laser fluence and oxygen pressure) that ensure a hemispherical expansion of the plume. The latter was discussed in the framework of the shock-wave model and the plume dimensions.

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Acknowledgement

The authors wish to thank Dr. S. Amoruso for helpful discussions and advice.

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Lafane, S., Kerdja, T., Abdelli-Messaci, S. et al. On Predtechensky and Mayorov model for the plume expansion dynamics study into an ambient gas during thin film deposition by laser ablation. Appl. Phys. A 110, 241–248 (2013). https://doi.org/10.1007/s00339-012-7121-1

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  • DOI: https://doi.org/10.1007/s00339-012-7121-1

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