Abstract
In this study, accurate nanostructures with various aspect ratios are created on several types of material. This work is highly applicable to the energy, optical, and nano-bio fields, for example. A silicon (Si) nano-mold is preserved using the method described, and target nanostructures are replicated reversibly and unlimitedly to or from various hard and soft materials. It is also verified that various materials can be applied to the substrates. The results confirm that the target nanostructures are successfully created in precise straight line structures and circle structures with various aspect ratios, including extremely high aspect ratios of 1:18. It is suggested that the optimal replicating and demolding process of nanostructures with high aspect ratios, which are the most problematic, could be controlled by means of the surface energy between the functional materials. Relevant numerical and analytical studies are also performed. It is possible to expand the applicability of the nanostructured mold by adopting various backing materials, including rounded substrates. The scope of the applications is extended further by transferring the nanostructures between different species of materials including metallic materials as well as identical species.
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Acknowledgement
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education Science and Technology (grant number: NRF-2010-0012249). This work was supported by a grant (Code No. 2011-0032147) from the Center for Advanced Soft Electronics under the Global Frontier Research Program of the MEST, Korea.
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H.-I. Jang and Prof. S. Ko are contributed equally to this paper.
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Jang, HI., Ko, S., Park, J. et al. Reversible creation of nanostructures between identical or different species of materials. Appl. Phys. A 108, 41–52 (2012). https://doi.org/10.1007/s00339-012-6999-y
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DOI: https://doi.org/10.1007/s00339-012-6999-y