Skip to main content
SpringerLink
Log in

Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The dielectric properties of zirconium dioxide (ZrO2) ceramic thin films were characterized up to 50 GHz using coplanar waveguides (CPWs) and metal–insulator–metal (MIM) capacitors with top circular electrodes. The ZrO2 films were deposited using a chemical solution onto high-resistivity Si wafers and metal layers. The real part of the dielectric constant of approximately 22 and 26 was extracted at 50 GHz for CPW and MIM structures, respectively, and the loss tangent was approximately 0.09 at 50 GHz. C–V and I–V measurements were carried out to determine low-frequency and DC dielectric properties. The measurement results indicate that ZrO2 is a promising material to be used as a dielectric layer for radio-frequency (RF) microelectromechanical systems (MEMS) capacitive switches.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Y. Seo, S. Lee, I. An, C. Song, J. Jeong, Semicond. Sci. Technol. 24, 115016 (2009)

    Article  ADS  Google Scholar 

  2. J. Zhu, Z.G. Liu, Appl. Phys. A (2003). doi:10.1007/s00339-002-2025-0

  3. X. Zhao, D. Vanderbilt, Phys. Rev. B 65, 075105 (2002)

    Article  ADS  Google Scholar 

  4. K. Prabakar, A. Park, N. Cho, W.I. Lee, C.K. Hwangbo, J.G. Lee, C. Lee, Vacuum 82, 1367 (2008)

    Article  Google Scholar 

  5. Y. Zhou, N. Kojima, K. Sasaki, J. Phys. D, Appl. Phys. 41, 175414 (2008)

    Article  ADS  Google Scholar 

  6. M.K. Bera, S. Chakraborty, S. Saha, D. Paramanik, S. Varma, S. Bhattacharya, C.K. Maiti, Thin Solid Films 504, 183 (2006)

    Article  ADS  Google Scholar 

  7. T. Bertaud, C. Bermond, T. Lacrevaz, C. Vallée, Y. Morand, B. Fléchet, A. Farcy, M. Gros-Jean, S. Blonkowski, Microelectron. Eng. 87, 301 (2010)

    Article  Google Scholar 

  8. E. Carlsson, S. Gevorgian, IEEE Trans. Microw. Theory Tech. 47, 1544 (1999)

    Article  ADS  Google Scholar 

  9. T.Y. Tseng, H.T. Lue, G.W. Huang, J. Appl. Phys. 91, 5275 (2009)

    Google Scholar 

  10. Z. Ma, A.J. Becker, P. Polakos, H. Huggins, J. Pastalan, H. Wu, K. Watts, Y.H. Wong, P. Mankiewich, IEEE Trans. Electron Devices 45, 1811 (1998)

    Article  ADS  Google Scholar 

  11. K. Wu, R. Vahldieck, IEEE Trans. Microw. Theory Tech. 39, 1348 (1991)

    Article  ADS  Google Scholar 

  12. M. Ouaddari, S. Delprat, F. Vidal, M. Chaker, K. Wu, IEEE Trans. Microw. Theory Tech. 53, 1390 (2005)

    Article  ADS  Google Scholar 

  13. H. Li, K. Liang, S. Gu, G. Xiao, J. Mater. Sci. Lett. 20, 1301 (2001)

    Article  Google Scholar 

  14. J.S. Lee, T. Matsubara, T. Sei, T. Tsuchiya, J. Mater. Sci. 32, 5249 (1997)

    Article  Google Scholar 

  15. S.J. Lee, B.Y. Jang, Y.H. Jung, S. Nahm, H.J. Lee, Y.S. Kim, J. Eur. Ceram. Soc. 26, 2165 (2006)

    Article  Google Scholar 

  16. D.M. Pozar, Microwave Engineering (Wiley, New York, 2004)

    Google Scholar 

  17. M.B. Steer, S.B. Goldberg, G. Rinne, P.D. Franzon, I. Turlik, J.S. Kasten, in IEEE MTT-S Int. Microwave Symp. Dig., vol. 3, p. 1455 (1992)

    Google Scholar 

  18. P. Rundqvist, A. Vorobiev, S. Gevorgian, K. Khamchane, Integr. Ferroelectr. 60, 1 (2004)

    Article  Google Scholar 

  19. M.M. Larijani, D. Najafi, M. Eshghabadi, Cryst. Res. Technol. 46, 956 (2011)

    Article  Google Scholar 

  20. Y. Zhou, K. Sasaki, T. Kawae, A. Morimoto, J. Phys. D, Appl. Phys. 42, 205406 (2009)

    Article  ADS  Google Scholar 

  21. S. Gevorgian, T. Martinsson, A. Deleniv, E. Kollberg, I. Vendik, IEE Proc., H Microw. Antennas Propag. 144, 145 (1997)

    Article  Google Scholar 

  22. Y. Wu, H.S. Gamble, B.M. Armstrong, V.F. Fusco, J.A.C. Stewart, IEEE Microw. Guided Wave Lett. 9, 10 (1999)

    Article  Google Scholar 

  23. A. Vorobiev, P. Rundqvist, S. Gevorgian, Appl. Phys. Lett. 83, 3144 (2003)

    Article  ADS  Google Scholar 

  24. S. Sheng, P. Wang, X.Y. Zhang, C.K. Ong, J. Phys. D, Appl. Phys. 42, 015501 (2009)

    Article  ADS  Google Scholar 

  25. S. Lawson, J. Eur. Ceram. Soc. 15, 485 (1995)

    Article  MathSciNet  Google Scholar 

  26. M. Weller, H. Schubert, J. Am. Ceram. Soc. 69, 573 (1986)

    Article  Google Scholar 

  27. M. Brunet, E. Scheid, K. Galicka-Fau, M. Andrieux, C. Legros, I. Gallet, M. Herbst, S. Schamm, Microelectron. Eng. 86, 2034 (2009)

    Article  Google Scholar 

  28. K. Elgaid, H. Zhou, C.D.W. Wilkinson, I.G. Thayne, Microelectron. Eng. 73, 452 (2004)

    Article  Google Scholar 

  29. J.P. Nagle, S.P.S. Sangha, P.J. West, J. Electron. Mater. 18, 167 (1989)

    Article  ADS  Google Scholar 

  30. P. Zurcher, P. Alluri, P. Chu, A. Duvallet, C. Happ, R. Henderson, J. Mendonca, M. Kim, M. Petras, M. Raymond, T. Remmel, D. Roberts, B. Steimle, J. Stipanuk, S. Straub, T. Sparks, M. Tarabbia, H. Thibieroz, M. Miller, in Tech. Dig. Int. Electron Devices Meet. (IEDM) (2000), p. 153

    Google Scholar 

  31. J.B. Rizk, G.M. Rebeiz, IEEE Trans. Microw. Theory Tech. 51, 1857 (2003)

    Article  ADS  Google Scholar 

  32. J.W. Lee, C.H. Je, S.W. Kang, C.A. Choi, IEEE Trans. Microw. Theory Tech. 53, 3335 (2005)

    Article  ADS  Google Scholar 

  33. G. Papaioannou, N. Tavassolian, M. Koutsoureli, E. Papandreou, J. Papapolymerou, in IEEE MTT-S Int. Microwave Symp. Dig. (2009), p. 1653

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Vestfold University College, Institute of Micro and Nano Systems Technology, 3103, Tønsberg, Norway

    Deokki Min, Nils Hoivik & Ulrik Hanke

  2. SINTEF ICT, PO Box 124 Blindern, 0314, Oslo, Norway

    Geir Uri Jensen

  3. SINTEF M&C, PO Box 124 Blindern, 0314, Oslo, Norway

    Frode Tyholdt & Camilla Haavik

Authors
  1. Deokki Min
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Nils Hoivik
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Geir Uri Jensen
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Frode Tyholdt
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Camilla Haavik
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Ulrik Hanke
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Deokki Min.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Min, D., Hoivik, N., Jensen, G.U. et al. Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches. Appl. Phys. A 105, 867–874 (2011). https://doi.org/10.1007/s00339-011-6582-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-011-6582-y

Keywords

Search

Navigation