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Thermally driven multi-layer actuator for 2D cantilever arrays

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Abstract

The present work reports on novel four-layer thermally driven piezoresistive cantilevers implemented in one- and two-dimensional arrays for parallel proximity scanning. There, the heater (metallic meander), the piezoresistive deflection sensor, and the metal actuation film with significantly higher thermal expansion coefficient make up separate layers. Actuation efficiency and cross-talk of the novel cantilever design are studied and compared with two recent designs: thin metallic film and ion-implanted heater. The novel actuator, integrated on a 240 μm long and 3 μm thick silicon cantilever and supplied by V dc=1 V enables deflections up to 5 μm of the AFM-tip with an actuation efficiency of about 170 nm/mW and suppressed cross-talk between actuator and sensor.

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References

  1. N. Crampton, M. Yokokawa, D. Dryden, M. Edwardson, D. Rao, K. Takeyasu, S. Yoshimura, R. Henderson, Proc. Natl. Acad. Sci. USA 104, 12755 (2007)

    Article  ADS  Google Scholar 

  2. G. Schitter, Tech. Mess. 76, 266 (2009)

    Article  Google Scholar 

  3. K. Leang, A. Fleming, Proc. Am. Control Conf. 3188 (2008)

  4. T. Ando, N. Kodera, E. Takai, D. Maruyama, K. Saito, A. Toda, Proc. Nat. Acad. Sci. USA 98, 12468 (2001)

    Article  ADS  Google Scholar 

  5. M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer, P. Vettiger, Sens. Actuators A 80, 100 (2000)

    Article  Google Scholar 

  6. W. King, T. Kenny, K. Goodson, G. Despont, U. Durig, H. Rothuizen, G.K. Binnig, P. Vettiger, Appl. Phys. Lett. 78, 1300 (2001)

    Article  ADS  Google Scholar 

  7. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Dürig, B. Gotsmann, W. Häberle, M. Lantz, H. Rothuizen, R. Stutz, G. Binnig, IEEE Trans. Nanotechnol. 1, 39 (2002)

    Article  ADS  Google Scholar 

  8. S.C. Minne, G. Yaralioglu, S. Manalis, J. Adams, J. Zesch, A. Atalar, C.F. Quate, Appl. Phys. Lett. 72, 2340 (1998)

    Article  ADS  Google Scholar 

  9. I.W. Rangelow, T. Ivanov, K. Ivanova, B. Volland, P. Grabiec, Y. Sarov, A. Persaud, T. Gotszalk, P. Zawierucha, M. Zielony, D. Dontzov, B. Schmidt, M. Zier, N. Nikolov, I. Kostic, W. Engl, T. Sulzbach, J. Mielczarski, S. Kolb, D. Latimier, R. Pedreau, V. Djakov, S. Huq, K. Edinger, O. Fortagne, A. Almansa, H.O. Blom, Microelectron. Eng. 84, 1260 (2007)

    Article  Google Scholar 

  10. K. Ivanova Y. Sarov, Tz. Ivanov, A. Frank, J. Zöllner, Ch. Bitterlich, U. Wenzel, B.E. Volland, S. Klett, I.W. Rangelow, P. Zawierucha, M. Zielony, T. Gotszalk, D. Dontzov, W. Schott, N. Nikolov, M. Zier, B. Schmidt, W. Engl, T. Sulzbach, I. Kostic, J. Vac. Sci. Technol. B 26, 2367 (2008)

    Article  Google Scholar 

  11. Y. Sarov, A. Frank, Tzv. Ivanov, J. Zöllner, K. Ivanova, B. Volland, I.W. Rangelow, A. Brogan, R. Wilson, P. Zawierucha, M. Zielony, T. Gotszalk, N. Nikolov, M. Zier, B. Schmidt, I. Kostic, J. Vac. Sci. Technol. B 27, 3132 (2009)

    Article  Google Scholar 

  12. R. Pedrak, Tz. Ivanov, K. Ivanova, T. Gotszalk, N. Abedinov, I.W. Rangelow, K. Edinger, E. Tomerov, T. Schenkel, P. Hudek, J. Vac. Sci. Technol. B 21, 3102 (2003)

    Article  Google Scholar 

  13. A. Frank J.-P. Zöllner, Y. Sarov, Tz. Ivanov, S. Klett, T. Gotszalk, M. Zielony, P. Zawierucha, B. Schmidt, M. Zier, N. Nikolov, W. Engl, T. Sulzbach, D. Dontsov, E. Langlotz, W. Schott, I.W. Rangelow, Proceedings of Eurosensors XXII, 7–10 Sept. 2008, Dresden, Germany. ISBN 978-3-00-025217-4 744 (2008)

  14. T. Sulzbach, W. Engl, R. Maier, P. Besmens, D. Dontsov, E. Langlotz, W. Schott, in Proceedins of the 54th International Scientific Colloquium, Workshop PRONANO, ed. by P. Scharff, 10. Sept. 2009, Ilmenau, Germany (2009), p. 16

  15. S. Timoshenko, J. Opt. Soc. Am. 11, 233 (1925)

    Article  ADS  Google Scholar 

  16. H. Zhiyu, T. Thundat, R.J. Warmack, J. Appl. Phys. 90, 427 (2001)

    Article  ADS  Google Scholar 

  17. N.V. Lavrik, M.J. Sepaniak, P.G. Datskos, Rev. Sci. Instrum. 75, 2229 (2004)

    Article  ADS  Google Scholar 

  18. Y. Sarov, T. Ivanov, A. Frank, I.W. Rangelow, Appl. Phys. A 92, 525–530 (2008)

    Article  ADS  Google Scholar 

  19. M. Woszczyna T. Gotszalk, P. Zawierucha, M. Zielony, Tz. Ivanov, K. Ivanova, Y. Sarov, N. Nikolov, J. Mielczarski, E. Mielczarska, I.W. Rangelow, Microelectron. Eng. 86, 1212 (2009)

    Article  Google Scholar 

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Authors and Affiliations

  1. Faculty of Electrical Engineering and Information Technology, Institute of Micro- and Nanoelectronics, Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, P.O. Box 100565, 98684, Ilmenau, Germany

    Y. Sarov, T. Ivanov, A. Frank & I. W. Rangelow

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  1. Y. Sarov
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  2. T. Ivanov
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  3. A. Frank
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  4. I. W. Rangelow
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Correspondence to Y. Sarov.

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Sarov, Y., Ivanov, T., Frank, A. et al. Thermally driven multi-layer actuator for 2D cantilever arrays. Appl. Phys. A 102, 61–68 (2011). https://doi.org/10.1007/s00339-010-6078-1

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  • DOI: https://doi.org/10.1007/s00339-010-6078-1

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