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Investigation of droplet formation in pulsed Nd:YAG laser deposition of metals and silicon

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Abstract

In the process of pulsed laser deposition of nickel (Ni) and ruthenium (Ru) thin films, the occurrence of phase explosion in ablation was found to affect the deposition rate and enhance the optical emissions from the plasma plume. Faster thin-film growth rates coincide with the onset of phase explosion as a result of superheating and/or sub-surface boiling which also increased the particulates found on the thin-film surface. These particulates were predominantly droplets which may not be round but flattened and also debris for the case of silicon (Si) ablation. The droplets from Ni and Ru thin films were compared in terms of size distribution and number density for different laser fluences. The origins of these particulates were correlated to the bubble and ripple formations on the targets while the transfer to the thin film surface was attributed to the laser-induced ejection from the targets.

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Author notes

  1. Thian-Khok Yong

    Present address: Faculty of Engineering and Science, Universiti Tunku Abdul Rahman, Kuala Lumpur, Malaysia

  2. Seong-Shan Yap

    Present address: Institute of Physics, Norwegian University of Science and Technology, 7491, Trondheim, Norway

Authors and Affiliations

  1. Faculty of Engineering, Multimedia University, Cyberjaya, Selangor, Malaysia

    Wee-Ong Siew, Wai-Keat Lee, Hin-Yong Wong, Thian-Khok Yong, Seong-Shan Yap & Teck-Yong Tou

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  1. Wee-Ong Siew
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  2. Wai-Keat Lee
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Correspondence to Teck-Yong Tou.

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Siew, WO., Lee, WK., Wong, HY. et al. Investigation of droplet formation in pulsed Nd:YAG laser deposition of metals and silicon. Appl. Phys. A 101, 627–632 (2010). https://doi.org/10.1007/s00339-010-5914-7

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  • DOI: https://doi.org/10.1007/s00339-010-5914-7

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