Abstract
We report the use of a mode-locked fiber laser in pulsed laser deposition (PLD) of yttria-stabilized zirconium oxide. The fiber laser produces picosecond pulses with megahertz repetition rates at the wavelength of 1060 nm. We have investigated the effects of the time delay and the physical overlapping of the consecutive pulses on the ablation thresholds and the properties of the deposited films. Our results show existence of two distinct evaporation modes: (1) a single pulse evaporation mode observed for low overlapping and long time delays between the pulses and (2) a high repetition rate evaporation mode for high overlapping with short delays. The first mode is characterized by evaporation of nanoparticles and clusters and yields structured films with high surface area. The second mode yields smooth films, with evaporation characteristics closer to those of thermal evaporation than traditional PLD.
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Salminen, T., Hahtala, M., Seppälä, I. et al. Pulsed laser deposition of yttria-stabilized zirconium dioxide with a high repetition rate picosecond fiber laser. Appl. Phys. A 98, 487–490 (2010). https://doi.org/10.1007/s00339-009-5482-x
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DOI: https://doi.org/10.1007/s00339-009-5482-x