Abstract
We report here a top-down process for fabricating a freestanding circular GaN grating. The circular gratings are defined by electron-beam lithography and realized by fast-atom beam (FAB) etching. The silicon substrate below the GaN grating region is completely removed to make the circular grating suspended in space. The optical responses of the fabricated GaN gratings are characterized in reflectance measurements. The polarization-independent responses of circular gratings are experimentally demonstrated, corresponding well with the theoretical prediction. This work represents an important step in combining GaN-based material with freestanding nanostructures.
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H.Y. Ryu, Y.H. Lee, R.L. Sellin, D. Bimberg, Over 30-fold enhancement of light extraction from free-standing photonic crystal slabs with InGaAs quantum dots at low temperature. Appl. Phys. Lett. 79, 3573 (2001)
S. Boutami, B. Ben Bakir, J.-L. Leclercq, X. Letartre, P. Rojo-Romeo, M. Garrigues, P. Viktorovitch, I. Sagnes, L. Legratiet, M. Strassner, Highly selective and compact tunable MOEMS photonic crystal Fabry–Perot filter. Opt. Express 14, 3129 (2006)
M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, AlN air-bridge photonic crystal nanocavities demonstrating high quality factor. Appl. Phys. Lett. 91, 051106 (2007)
A. Rosenberg, K. Bussmann, M. Kim, M.W. Carter, M.A. Mastro, R.T. Holm, R.L. Henry, J.D. Caldwell, C.R. Eddy Jr., Fabrication of GaN suspended photonic crystal membranes and resonant nanocavities on Si(111). J. Vac. Sci. Technol. B 25(3), 721 (2007)
Y.-S. Choi, K. Hennessy, R. Sharma, E. Haberer, Y. Gao, S.P. DenBaars, S. Nakamura, E.L. Hu, C. Meier, GaN blue photonic crystal membrane nanocavities. Appl. Phys. Lett. 87, 243101 (2005)
C. Meier, K. Hennessy, E.D. Haberer, R. Sharma, Y.-S. Choi, K. McGroddy, S. Keller, S.P. DenBaars, S. Nakamura, E.L. Hu, Visible resonant modes in GaN-based photonic crystal membrane cavities. Appl. Phys. Lett. 88, 031111 (2006)
A.C. Tamboli, E.D. Haberer, R. Sharma, K.H. Lee, S. Nakamura, E.L. Hu, Room-temperature continuous-wave lasing in GaN/InGaN microdisks. Nat. Photon 1, 61 (2007)
C.-C. Chen, C.-H. Hou, J.-K. Sheu, J.-Y. Chang, M.-H. Li, G.-C. Chi, C. Wu, Gratings in GaN membranes. Jpn. J. Appl. Phys. 43, 5854 (2004)
T. Ono, N. Orimoto, S. Lee, T. Simizu, M. Esashi, RF-plasma-assisted fast atom beam etching. Jpn. J. Appl. Phys. 39, 6976 (2000)
Y. Wang, Y. Kanamori, J. Ye, H. Sameshima, K. Hane, Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane. Opt. Express 17, 4938 (2009)
C. Bauer, H. Giessen, B. Schnabel, E.-B. Kley, C. Schmitt, U. Scherf, R.F. Mahrt, A surface-emitting circular grating polymer laser. Adv. Mater. 13, 1161 (2001)
G.A. Turnbull, A. Carleton, A. Tahraouhi, T.F. Krauss, I.D.W. Samuel, G.F. Barlow, K.A. Shore, Effect of gain localization in circular-grating distributed feedback lasers. Appl. Phys. Lett. 87, 201101 (2005)
Y. Chen, Z. Li, Z. Zhang, D. Psaltis, A. Scherer, Nanoimprinted circular grating distributed feedback dye laser. Appl. Phys. Lett. 91, 051109 (2007)
X. Sun, A. Yariv, Surface-emitting circular DFB, disk- and ring- Bragg resonator lasers with chirped gratings: a unified theory and comparative study. Opt. Express 16, 9155–9164 (2008)
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Wang, Y., Hu, F., Wakui, M. et al. Freestanding circular GaN grating fabricated by fast-atom beam etching. Appl. Phys. A 97, 39–43 (2009). https://doi.org/10.1007/s00339-009-5376-y
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DOI: https://doi.org/10.1007/s00339-009-5376-y