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Laser processing of sapphire by strongly focused femtosecond pulses

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Abstract

The high-temperature annealing (1500°C for 15 min) of the shock-amorphized and compressed sapphire around the voids rendered the amorphous sapphire insoluble in aqueous solution of hydrofluoric acid. There were no observable back relaxation and reflow of the compressed amorphous phase. The overlapping of femtosecond pulses by >70% of the focal diameter also made the photomodified regions insoluble in aqueous solution of hydrofluoric acid. Femtosecond laser cutting of hard dielectric materials is discussed.

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Authors and Affiliations

  1. Research Institute for Electronic Science, Hokkaido University, N21W10 CRIS Bldg., Sapporo, 001-0021, Japan

    Saulius Juodkazis & Hiroaki Misawa

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  1. Saulius Juodkazis
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  2. Hiroaki Misawa
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Correspondence to Saulius Juodkazis.

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Juodkazis, S., Misawa, H. Laser processing of sapphire by strongly focused femtosecond pulses. Appl. Phys. A 93, 857–861 (2008). https://doi.org/10.1007/s00339-008-4763-0

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  • DOI: https://doi.org/10.1007/s00339-008-4763-0

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