Abstract
Ba0.6Sr0.4TiO3 (BST) bulk ceramic synthesized by solid state reaction was used as target for thin films grown by pulsed laser deposition (PLD) and radiofrequency beam assisted PLD (RF-PLD). The X-ray diffraction patterns indicate that the films exhibit a polycrystalline cubic structure with a distorted unit cell. Scanning Electron Microscopy investigations showed a columnar microstructure with size of spherical grains up to 150 nm. The capacitance–voltage (C–V) characteristics of the BST films were performed by applying a DC voltage up to 5 V. A value of 280 for dielectric constant and 12.5% electrical tunability of the BST capacitor have been measured at room temperature.
Similar content being viewed by others
References
J.F. Scott, Annu. Rev. Mater. Sci. 28, 79 (1998)
H. Takasu, J. Electroceram. 4, 327 (2000)
A. Kozyrev, A. Ivanov, T. Samoilova, O. Soldatenkov, K. Astafiev, L.C. Sengupta, J. Appl. Phys. 88, 5334 (2000)
W. Chang, S.W. Kirchoefer, J.M. Pond, J.S. Horwitz, L. Sengupta, J. Appl. Phys. 92, 1528 (2002)
H.V. Alexandru, C. Berbecaru, A. Ioachim, M.I. Toacsan, M.G. Banciu, L. Nedelcu, D. Ghetu, Mater. Sci. Eng. B 109, 152 (2004)
W. Chang, L. Sengupta, J. Appl. Phys. 92, 3941 (2002)
B. Su, J.E. Holmes, C. Meggs, T.W. Button, J. Eur. Ceram. Soc. 23, 269 (2003)
D.R. Chase, L.-Y. Chen, R.A. York, IEEE Trans. Microwave Theory Tech. 53, 3215 (2005)
Z. Wang, J. Liu, T. Ren, L. Liu, Sens. Actuators A 117, 293 (2005)
A. Ioachim, H.V. Alexandru, C. Berbecaru, S. Antohe, F. Stanculescu, M.G. Banciu, M.I. Toacsan, L. Nedelcu, D. Ghetu, A. Dutu, G. Stoica, Mater. Sci. Eng. C 26, 1156 (2006)
B.W. Hakki, P.D. Coleman, IRE Trans. Microwave Theory Tech. 8, 402 (1960)
L.L. Lopez, J. Portelles, J.M. Siqueiros, G.A. Hirata, J. McKittrick, Thin Solid Films 373, 49 (2000)
W. Hu, C. Yang, W. Zhang, G. Liu, D. Dong, J. Sol-Gel Sci. Technol. 39, 293 (2006)
D.M. Potrepka, S. Hirsch, M.W. Cole, W.D. Nothwang, S. Zhong, S.P. Alpay, J. Appl. Phys. 99, 014108 (2006)
K.R. Carroll, J.M. Pond, D.B. Chrisey, J.S. Horwitz, R.E. Leuchtner, K.S. Grabowski, Appl. Phys. Lett. 62, 1845 (1993)
C.L. Canedy, H. Li, S.P. Alpay, L. Salamanca-Riba, A.L. Roytburd, R. Ramesh, Appl. Phys. Lett. 77, 1695 (2000)
J. Miao, Y. Wang, H.Y. Tian, X.Y. Zhou, H.L.W. Chan, C.L. Choy, L.X. Cao, B.R. Zhao, J. Phys. D Appl. Phys. 39, 2565 (2006)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Nedelcu, L., Ioachim, A., Toacsan, M.I. et al. PLD and RF-PLD synthesis of Ba0.6Sr0.4TiO3 ferroelectric thin films for electrically controlled devices. Appl. Phys. A 93, 675–679 (2008). https://doi.org/10.1007/s00339-008-4694-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-008-4694-9