Skip to main content
SpringerLink
Log in

Cross-sectional TEM analysis of laser-induced ripple structures on the 4H–SiC single-crystal surface

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The microstructures of femtosecond laser-induced ripples formed on a 4H–SiC single-crystal surface were studied by cross-sectional transmission electron microscopy (TEM), with particular attention on the crystal structure underlying fine and coarse ripples differing in period and morphology. Conventional and high-resolution TEM analyses showed that a continuous amorphous layer approximately 10 to 50 nm thick covers the topmost region of both fine and coarse ripples. These results strongly suggest that the fundamental surface deformation process is common for the entire region of fine and coarse ripples, even though the factors that determine their periods are different.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. Birnbaum, J. Appl. Phys. 36, 3688 (1965)

    Article  ADS  MathSciNet  Google Scholar 

  2. J.E. Sipe, J.F. Young, J.S. Preston, H.M. Driel, Phys. Rev. B 27, 1141 (1983)

    Article  ADS  Google Scholar 

  3. J. F Young, J.S. Preston, H.M. Driel, J.E. Sipe, Phys. Rev. B 27, 1155 (1983)

    Article  ADS  Google Scholar 

  4. J.F. Young, J.E. Sipe, H.M. Driel, Phys. Rev. B 30, 2001 (1984)

    Article  ADS  Google Scholar 

  5. J. Bonse, H. Sturm, D. Schmidt, W. Kautek, Appl. Phys. A 71, 657 (2000)

    Article  ADS  Google Scholar 

  6. F. Costache, M. Henyk, J. Reif, Appl. Surf. Sci. 186, 352 (2002)

    Article  ADS  Google Scholar 

  7. N. Yasumaru, K. Miyazaki, J. Kiuchi, Appl. Phys. A 76, 983 (2003)

    Article  ADS  Google Scholar 

  8. A. Borowiec, H.K. Haugen, Appl. Phys. Lett. 82, 4462 (2003)

    Article  ADS  Google Scholar 

  9. Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, K. Wang, Appl. Phys. Lett. 82, 1703 (2003)

    Article  ADS  Google Scholar 

  10. J. Bonse, M. Munz, H. Sturm, J. Appl. Phys. 97, 013538 (2005)

    Article  ADS  Google Scholar 

  11. T.Q. Jia, H.X. Chen, M. Huang, F.L. Zhao, J.R. Qiu, R.X. Li, Z.Z. Xu, X.K. He, J. Zhang, H. Kuroda, Phys. Rev. B 72, 125429 (2005)

    Article  ADS  Google Scholar 

  12. W. Kautek, P. Rudolph, G. Daminelli, J. Krüger, Appl. Phys. A 81, 65 (2005)

    Article  ADS  Google Scholar 

  13. Y. Shimotsuma, P.G. Kazansky, J. Qiu, K. Hirano, Phys. Rev. Lett. 91, 247405 (2003)

    Article  ADS  Google Scholar 

  14. V.R. Bhardwaj, E. Simova, P.P. Rajeev, C. Hnatovsky, R.S. Taylor, D.M. Rayner, P.B. Corkum, Phys. Rev. Lett. 96, 057404 (2006)

    Article  ADS  Google Scholar 

  15. T. Tomita, K. Kinoshita, S. Matsuo, S. Hashimoto, Jpn. J. Appl. Phys. 45, L444 (2006)

    Article  ADS  Google Scholar 

  16. T. Tomita, K. Kinoshita, S. Matsuo, S. Hashimoto, Appl. Phys. Lett. 90, 153115 (2007)

    Article  ADS  Google Scholar 

  17. M. Yamaguchi, S. Ueno, K. Kinoshita, T. Murai, T. Tomita, S. Matsuo, S. Hashimoto, in Proc. 4th Int. Cong. Laser Advanced Materials Processing, Kyoto, 2006, p. 117

  18. A. Borowiec, M. Mackenzie, G.C. Weatherly, H.K. Haugen, Appl. Phys. A 76, 201 (2003)

    Article  ADS  Google Scholar 

  19. A. Borowiec, M. Mackenzie, G.C. Weatherly, H.K. Haugen, Appl. Phys. A 77, 411 (2003)

    Article  ADS  Google Scholar 

  20. A. Borowiec, M. Couillard, G.A. Botton, H.K. Haugen, Appl. Phys. A 79, 1887 (2004)

    ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Technology and Science, The University of Tokushima, Tokushima, 770-8506, Japan

    T. Okada, T. Tomita, S. Matsuo & S. Hashimoto

  2. Graduate School of Advanced Technology and Science, The University of Tokushima, Tokushima, 770-8506, Japan

    H. Kawahara, Y. Ishida & R. Kumai

  3. Central Research Center, Asahi Glass Co., Ltd, Yokohama, 221-8755, Japan

    M. Kawamoto

  4. Health Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Takamatsu, 761-0395, Japan

    Y. Makita

  5. Technical Research Institute, Japan Society for the Promotion of Machine Industry, Higashi-Kurume, Tokyo, 203-0042, Japan

    M. Yamaguchi

Authors
  1. T. Okada
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. H. Kawahara
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Y. Ishida
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. R. Kumai
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. T. Tomita
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S. Matsuo
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. S. Hashimoto
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. M. Kawamoto
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Y. Makita
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. M. Yamaguchi
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to T. Okada.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Okada, T., Kawahara, H., Ishida, Y. et al. Cross-sectional TEM analysis of laser-induced ripple structures on the 4H–SiC single-crystal surface. Appl. Phys. A 92, 665–668 (2008). https://doi.org/10.1007/s00339-008-4611-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-008-4611-2

PACS

Search

Navigation