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Micromachined ultrasonic transducers and arrays based on piezoelectric thick film

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Abstract

This paper reports on the design, fabrication, and characterization of diaphragm-type piezoelectric micromachined ultrasonic transducer (pMUT) and arrays. A combination of piezoelectric composite thick film techniques and silicon micromachining has been proven to be a promising approach for a batch production of pMUTs, especially pMUT transmitter arrays for ultrasound radiation. In this paper, some important issues related to the pMUT element design and micromachining processes are addressed. Thanks to the well-developed processing technology, pMUTs and arrays operating at different resonance frequencies by dimension variation have been successfully fabricated with a high yield for possible mass manufacturing. The characterization of piezoelectric composite thick film will be briefly reported. The performance of the prototype devices has been characterized in terms of vibration modes, dependency of the resonance frequency on bias voltage, nonlinearity, electromechanical coupling efficiency, equivalent circuit, output sound pressure level and directivity of a two-dimensional pMUT array.

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References

  1. J.J. Bernstein, S.L. Finberg, K. Houston, L.C. Niles, H.D. Chen, L.E. Cross, K.K. Li, K. Udayakumar, IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 44, 960 (1997)

    Article  Google Scholar 

  2. B. Xu, L.E. Cross, J.J. Bernstein, Thin Solid Films 377/378, 712 (2000)

    Google Scholar 

  3. F. Akasheh, T. Myers, J.D. Fraser, S. Bose, A. Bandyopadhyay, Sens. Actuators A 111, 275 (2004)

    Article  Google Scholar 

  4. K. Yamashita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, Y. Suzuki, Sens. Actuators A 97/98, 302 (2002)

    Google Scholar 

  5. K. Yamashita, L. Chansomphou, H. Murakami, M. Okuyama, Sens. Actuators A 114, 147 (2004)

    Article  Google Scholar 

  6. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P.K. Weber, W. Steichen, S. Petitgrang, A. Bosseboeuf, N. Setter, P. Gaucher, Proc. 2001 IEEE Ultrasonics Symposium, New York, USA, Oct. 7–10 (2001), pp. 907–911

  7. J. Baborowski, N. Ledermann, P. Muralt, Proc. 2002 IEEE Ultrasonics Symposium, New York, USA, Oct. 8–11 (2002), pp. 1051–1054

  8. J. Baborowski, P. Muralt, N. Ledermann, S. Petitgrand, A. Bosseboeuf, N. Setter, Ph. Gaucher, Proc. 13th IEEE Int. Symp. Appl. Ferroelectr., Nara, Japan, May 28–June 1 (2002), pp. 483–486

  9. G. Percin, B.T. Khuri-Yakub, IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 49, 573 (2002)

    Article  Google Scholar 

  10. Ö. Oralkan, A.S. Ergun, J.A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T.H. Lee, B.T. Khuri-Yakub, IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 49, 1596 (2002)

    Article  Google Scholar 

  11. P.C. Eccardt, K. Neiderer, Ultrasonics 38, 774 (2000)

    Article  Google Scholar 

  12. H. Nam, Y. Kim, S. Cho, C.S. Lee, J. Bu, J. Hong, Z. Khim, Japan. J. Appl. Phys. 41, 7153 (2002)

    Article  ADS  Google Scholar 

  13. T. Ren, L. Zhang, J. Liu, L. Liu, Z. Li, Microelectron. Eng. 66, 683 (2003)

    Article  Google Scholar 

  14. H. Kueppers, T. Leuerer, U. Schnakenberg, W. Mokwa, M. Hoffmann, T. Schneller, U. Boettger, R. Waser, Sens. Actuators A 97/98, 680 (2002)

    Google Scholar 

  15. T. Iijima, K. Kunii, Japan. J. Appl. Phys. 40, 5740 (2001)

    Article  ADS  Google Scholar 

  16. M. Lebedev, J. Akedo, Y. Akiyama, Japan. J. Appl. Phys. 39, 5600 (2000)

    Article  ADS  Google Scholar 

  17. R. Kurchania, S.J. Milne, J. Mater. Res. 14, 1852 (1999)

    Article  ADS  Google Scholar 

  18. J. Akedo, M. Lebedev, Japan. J. Appl. Phys. 40, 5528 (2001)

    Article  ADS  Google Scholar 

  19. Y. Yasuda, M. Akamatsu, M. Tani, M. Yoshida, K. Kondo, T. Iijima, Japan. J. Appl. Phys. 40, 5518 (2001)

    Article  ADS  Google Scholar 

  20. T. Tsurumi, S. Ozawa, G. Abe, N. Ohashi, S. Wada, M. Yamane, Japan. J. Appl. Phys. 39, 5604 (2000)

    Article  ADS  Google Scholar 

  21. D.A. Barrow, T.E. Petroff, R.P. Tandon, M. Sayer, J. Appl. Phys. 81, 876 (1997)

    Article  ADS  Google Scholar 

  22. M. Sayer, G.R. Lockwood, T.R. Olding, G. Pang, L.M. Cohen, W. Ren, B.K. Mukherjee, Mater. Res. Soc. Proc. 655, cc13.6.1 (2001)

  23. W. Zhu, Z. Wang, C. Zhao, O. Tan, H. Hng, Japan. J. Appl. Phys. 41, 6969 (2002)

    Article  ADS  Google Scholar 

  24. Z. Wang, W. Zhu, C. Zhao, O.K. Tan, Mater. Sci. Eng. B 99, 56 (2003)

    Article  Google Scholar 

  25. C. Zhao, Z. Wang, W. Zhu, X. Yao, W. Liu, Int. J. Mod. Phys. B 16, 242 (2002)

    Article  ADS  Google Scholar 

  26. R.A. Dorey, S.B. Stringfellow, R.W. Whatmore, J. Eur. Ceram. Soc. 22, 2921 (2002)

    Article  Google Scholar 

  27. Z. Wang, W. Zhu, H. Zhu, J. Miao, C. Chao, C. Zhao, O. Tan, IEEE Trans. Ultrason. Ferroelecrt. Freq. Control. 52, 2289 (2005)

    Google Scholar 

  28. C. Chao, Z. Wang, W. Zhu, Rev. Sci. Instrum. 76, 063906 (2005)

    Article  ADS  Google Scholar 

  29. C. Chao, Z. Wang, W. Zhu, Rev. Sci. Instrum. 75, 4641 (2004)

    Article  ADS  Google Scholar 

  30. L. Yao, L. Lu, Z. Wang, W. Zhu, IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 50, 1262 (2003)

    Article  Google Scholar 

  31. Z. Wang, H. Zhu, W. Zhu, J. Miao, C. Chao, O.K. Tan, Appl. Phys. Lett. 86, 033508 (2005)

    Article  ADS  Google Scholar 

  32. P. Muralt, N. Ledermann, J. Baborowski, A. Barzegar, S. Gentil, B. Belgacem, S. Petitgrand, A. Bosseboeuf, N. Setter, IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 52, 2276 (2005)

    Article  Google Scholar 

  33. Z. Wang, W. Zhu, J. Miao, H. Zhu, C. Chao, O.K. Tan, Sens. Actuators A 130/131, 485 (2006)

    Google Scholar 

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Authors and Affiliations

  1. Micromachines Centre, School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore, 639798, Singapore

    Zhihong Wang & Jianmin Miao

  2. Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798, Singapore

    Weiguang Zhu

Authors
  1. Zhihong Wang
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  2. Jianmin Miao
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  3. Weiguang Zhu
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Correspondence to Zhihong Wang.

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PACS

85.50.-n; 85.85.+j

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Wang, Z., Miao, J. & Zhu, W. Micromachined ultrasonic transducers and arrays based on piezoelectric thick film. Appl. Phys. A 91, 107–117 (2008). https://doi.org/10.1007/s00339-007-4369-y

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  • DOI: https://doi.org/10.1007/s00339-007-4369-y

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