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Processing quartz glass by using the second harmonic of picosecond pulse Nd:YVO4 laser

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Abstract

The processing of synthetic quartz glass by use of the second harmonic of a picosecond Nd:YVO4 laser was examined. The threshold irradiation pulse energy density to process the glass using a picosecond pulse is about 3.8 J/(cm2 pulse). The groove depth does not increase effectively by scanning with a single line even if the number of scans is increased. It becomes easy to process a thick material when the aperture is widened. A through hole (entrance side diameter 106 μm) was formed through a 0.3-mm-thick synthetic quartz glass plate without cracking by the use of circular scanning. The trepanning of a ring (outer diameter 3 mm, inner diameter 1 mm) from 0.3-mm synthetic quartz glass was achieved.

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Authors and Affiliations

  1. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba East, Namiki 1-2-1, Tsukuba, Ibaraki, 305-8564, Japan

    Y. Matsuoka

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  1. Y. Matsuoka
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Correspondence to Y. Matsuoka.

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PACS

52.38.Mf; 42.62.Cf; 81.05.Kf

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Matsuoka, Y. Processing quartz glass by using the second harmonic of picosecond pulse Nd:YVO4 laser. Appl. Phys. A 89, 457–460 (2007). https://doi.org/10.1007/s00339-007-4143-1

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  • DOI: https://doi.org/10.1007/s00339-007-4143-1

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