Skip to main content

Glass Cutting

  • Chapter
  • First Online:
The Theory of Laser Materials Processing

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 119))

  • 1984 Accesses

Abstract

The state of the technology of ultrashort pulse laser applications such as glass cutting is dominated by direct ablation of a dielectric material, however the first installations used in-volume filament-like modifications. The variety of intriguing physical phenomena range from numerous nonlinear effects of ionisation to propagation of radiation strongly coupled to electron dynamics and include the formation of filaments. However, the potential as well as the challenge with respect to glass cutting is to tailor the combination of material composition and the laser radiation, which enables the suppression of unwanted damage and stable propagation of an optical and electronic channel; both might be called filaments. Ultrashort laser pulses interacting with the dielectric material generate free electrons dominantly via multiphoton ionisation (MPI) and cascade ionisation (CI). The dense plasma produced results in great changes of the refractive index and the surface reflectivity. When laser-induced plasma density reaches the well-known critical value \(\rho_{crit}\) = \(\omega^{2} \varepsilon_{0} m_{e} \,/\,e^{2}\) dependent on the laser frequency ω, the material gets highly absorbing. Laser ablation induced by relaxation of electron energy to the atoms takes place after the laser pulse has ceased. This ablation mechanism allows the use of the critical free-electron density \(\rho_{crit}\) as the criterion \(\rho_{ablation}\) = \(\rho_{crit}\) for modelling ablation. The material near the ablated wall is characterised by a free electron density \(\rho < \rho_{crit}\). Here indeed the material is not ablated but will be modified or damaged due to the energy released by high-density free-electrons. Once more, a threshold value \(\rho_{damage}\) for the free electron density can be identified. As result, the shape of the ablation front as well as the morphology of a damaged region is described nearly quantitatively.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 229.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 299.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 299.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Gattass RR, Mazur E (2008) Femtosecond laser micro machining in transparent materials. Nat Photonics 2:219–225

    Article  ADS  Google Scholar 

  2. Döring S, Szilagyi J, Richter S, Zimmermann F, Richardson M, Tünnermann A et al (2012) Evolution of hole shape and size during short and ultrashort pulse laser deep drilling. Opt Express 20:27147–27154

    Article  ADS  Google Scholar 

  3. Varel H, Ashkenasi D, Rosenfeld A, Wähmer M, Campbell EEB (1997) Micro-machining of quartz with ultrashort laser pulses. Appl Phys A 65:367–373

    Google Scholar 

  4. Vanagas E, Kawai J, Tuzhilin D, Kudryashov I, Mizuyama A, Nakamura KG et al (2004) Glass cutting by femtosecond pulsed irradiation. J Microlithogr Microfabr Microsyst 3:358–363

    Google Scholar 

  5. Sudrie L, Couairon A, Franco M, Lamouroux B, Prade B, Tzorzakis S et al (2002) Femtosecond laser-induced damage and filamentary propagation in fused silica. Phys Rev Lett 89:186601

    Article  ADS  Google Scholar 

  6. Burakov IM, Bulgakova NM, Stoian R, Mermillod-Blondin A, Audouard E, Rosenfeld A et al (2007) Spatial distribution of refractive index variations induced in bulk fused silica by single ultrashort and short laser pulses. J Appl Phys 101:043506

    Article  ADS  Google Scholar 

  7. Popov KI, McElcheran C, Briggs K, Mack S, Ramunno L (2011) Morphology of femtosecond laser modification of bulk dielectrics. Opt Express 19:271–282

    Article  ADS  Google Scholar 

  8. Sun M, Eppelt U, Schulz W, Zhu J (2013) Role of thermal ionization in internal modification of bulk borosilicate glass with picoseconds laser pulses at high repetition rates. Opt Mater Express 3:1716–1726

    Article  Google Scholar 

  9. Eaton SM, Zhang H, Ng ML, Li J, Chen W, Ho S et al (2008) Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides. Opt Express 16:9443–9458

    Article  ADS  Google Scholar 

  10. Ben-Yakar A, Harkin A, Ashmore J, Byer RL, Stone HA (2007) Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses. J Phys D Appl Phys 40(5):1447–1459

    Article  ADS  Google Scholar 

  11. Vázquez de Aldana JR, Méndez C, Roso L (2006) Saturation of ablation channels micro-machined in fused silica with many femtosecond laser pulses. Opt Express 14(3):1329–1338

    Article  ADS  Google Scholar 

  12. Sun M, Eppelt U, Schulz W, Zhu J (2014) Ultrafast reflection and secondary ablation in laser processing of transparent dielectrics with ultrashort pulses. Opt Eng 53(5):051512

    Article  ADS  Google Scholar 

  13. Jiang L, Tsai HL (2004) Prediction of crater shape in femtosecond laser ablation of dielectrics. J Phys D Appl Phys 37(10):1492–1496

    Article  Google Scholar 

  14. Vázquez de Aldana JR, Méndez C, Roso L, Moreno P (2005) Propagation of ablation channels with multiple femtosecond laser pulses in dielectrics: numerical simulations and experiments. J Phys D Appl Phys 38:3764

    Article  Google Scholar 

  15. Sun M, Eppelt U, Hartmann C, Schulz W, Zhu J, Lin Z (2016) Damage morphology and mechanism in ablation cutting of thin glass sheets with picosecond pulsed lasers. Opt Laser Technol 80:227–236

    Article  ADS  Google Scholar 

  16. Vogel A, Noack J, Hüttman G, Paltauf G (2005) Mechanisms of femtosecond laser nanosurgery of cells and tissues. Appl Phys B 81(8):1015–1047

    Article  ADS  Google Scholar 

  17. Gulley JR, Winkler SW, Dennis WM, Liebig CM, Stoian R (2012) Interaction of ultrashort-laser pulses with induced undercritical plasmas in fused silica. Phys Rev A 85(1):013808

    Article  ADS  Google Scholar 

  18. Kennedy PK (1995) A first-order model for computation of laser-induced breakdown thresholds in ocular and aqueous media: Part I—Theory. IEEE J Quantum Electron 31(12):2241–2249

    Article  ADS  Google Scholar 

  19. Wang Y, Zhao Y, Shao J, Fan Z (2011) Effect of native effect and laser-induced defects on multi-shot laser induced damage in multilayer mirrors. Chin Opt Lett 9(9):093102–093105

    Article  ADS  Google Scholar 

  20. Keldysh LV (1965) Ionization in the field of a strong electromagnetic wave. Sov Phys JETP 20:1307–1314

    MathSciNet  Google Scholar 

  21. Sun M, Eppelt U, Russ S, Hartmann C, Siebert C, Zhu J, Schulz W (2013) Numerical analysis of laser ablation and damage in glass with multiple picosecond laser pulses. Opt Express 21:7858–7867

    Article  ADS  Google Scholar 

  22. Shimizu M, Sakakura M, Ohnishi M, Yamaji M, Shimotsuma Y, Hirao K et al (2012) Three-dimensional temperature distribution and modification mechanism in glass during ultrafast laser irradiation at high repetition rates. Opt Express 20:934–940

    Article  ADS  Google Scholar 

  23. Sakakura M, Terazima M, Shimotsuma Y, Miura K, Hirao K (2007) Heating and rapid cooling of bulk glass after photo excitation by a focused femtosecond laser pulse. Opt Express 15:16800–16807

    Article  ADS  Google Scholar 

  24. Sun Q, Jiang HB, Liu Y, Zhou Y, Yang H, Gong Q (2006) Relaxation of dense electron plasma induced by femtosecond laser in dielectric materials. Chin Phys Lett 23:189–192

    Article  ADS  Google Scholar 

  25. Askar’yan GA (1962) Wave guide properties of a tubular light beam. Sov Phys JETP 15:1088

    Google Scholar 

  26. Chiao RY, Garmire E, Townes CH (1964) Self-Trapping of Optical Beams. Phys Rev Lett 13:479

    Article  ADS  Google Scholar 

  27. Hercher M (1964) Laser-induced damage in transparent media. J Opt Soc Am 54:563

    Google Scholar 

Download references

Acknowledgements

The author would like to thank the German Research Association DFG for their kind support within the Cluster of Excellence “Integrative Production Technology for High-Wage Countries” of RWTH Aachen University.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Wolfgang Schulz .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2017 Springer International Publishing AG

About this chapter

Cite this chapter

Schulz, W. (2017). Glass Cutting. In: Dowden, J., Schulz, W. (eds) The Theory of Laser Materials Processing. Springer Series in Materials Science, vol 119. Springer, Cham. https://doi.org/10.1007/978-3-319-56711-2_3

Download citation

Publish with us

Policies and ethics