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Analysis of plume deflection in the silicon laser ablation process

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Abstract

Changes in target surface morphology and ablation plume direction have been experimentally observed during the initial stages of the silicon laser ablation process. A relationship between both phenomena can be observed upon analysing the temperature field induced by the laser beam in a rough surface material. Theoretical studies on the deflection of the ablation plume are presented. These analyses are based on the hypothesis that particles that reach evaporation temperature will exit normally to the target surface with a velocity that is proportional to the surface temperature and the amount of the ablated material. Numerical solutions and experimental results of laser ablation process of silicon targets are found to agree with theoretical studies.

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References

  1. J.C. Miller, R.F. Haglund (Eds.), Laser Ablation and Desorption (Academic Press, USA, 1998)

    Google Scholar 

  2. D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films (John Wiley & Sons, New York, 1994)

    Google Scholar 

  3. R.F.W. Herrmann, J. Gerlach, E.E.B. Campbell, Appl. Phys. A 66, 35 (1998)

    Article  ADS  Google Scholar 

  4. F. Garrelie, J. Aubreton, A. Catherinot, J. Appl. Phys. 83, 5075 (1998)

    Article  ADS  Google Scholar 

  5. S. Amoruso, M. Armenante, V. Berardi, R. Bruzzese, N. Spinelli, Appl. Phys. A 65, 265 (1997)

    Article  ADS  Google Scholar 

  6. D. Kim, M. Ye, C.P. Grigoropoulos, Appl. Phys. A 67, 169 (1997)

    Article  ADS  Google Scholar 

  7. P. Serra, J.L. Morenza, Appl. Phys. A 67, 289 (1998)

    Article  ADS  Google Scholar 

  8. S. Amoruso, Appl. Phys. A 69, 323 (1999)

    Article  ADS  Google Scholar 

  9. K.J. Koivusaari, J. Levoska, S. Leppavuori, J. Appl. Phys. 85, 2915 (1999)

    Article  ADS  Google Scholar 

  10. F. Claeyssens, R.J. Lade, K.N. Rosser, M.N.R. Ashfold, J. Appl. Phys. 89, 697 (2001)

    Article  ADS  Google Scholar 

  11. T.D. Bennett, C.P. Grigoropoulos, D.J. Krajnovich, J. Appl. Phys. 77, 849 (1995)

    Article  ADS  Google Scholar 

  12. S.I. Anisimov, B.S. Luk’yanchuk, A. Luches, Appl. Surf. Sci. 96–98, 24 (1996)

    Article  Google Scholar 

  13. Y.V. Afanasiev, V.A. Isakov, I.N. Zavestovskaya, B.N. Chichkov, F. von Alvensleben, H. Welling, Appl. Phys. A 64, 561 (1997)

    Article  ADS  Google Scholar 

  14. V.V. Semak, B. Damkroger, S. Kempka, J. Phys. D Appl. Phys. 32, 1819 (1999)

    Article  ADS  Google Scholar 

  15. A.G. Gnedovets, A.V. Gusarov, I. Smurov, G. Flamant, Appl. Surf. Sci. 109–110, 74 (1997)

    Article  Google Scholar 

  16. B. Dick, M.J. Brett, T. Smy, M. Belov, M.R. Freeman, J. Vac. Sci. Technol. B 19, 1813 (2001)

    Article  Google Scholar 

  17. P.E. Dyer; S.D. Jenkins, J. Sidhu, Appl. Phys. Lett. 49, 453 (1986)

    Article  ADS  Google Scholar 

  18. S.R. Foltyn, R.C. Dye, K.C. Ott, E. Peterson, K.M. Hubbard, W. Hutchinson, R.E. Muenchausen, R.C. Estler, X.D. Wu, Appl. Phys. Lett. 59, 594 (1991)

    Article  ADS  Google Scholar 

  19. J. Heitz, J.D. Pedarnig, D. Bäuerle, G. Petzow, Appl. Phys. A 65, 259 (1997)

    Article  ADS  Google Scholar 

  20. D.J. Krajnovich, J.E. Vázquez, J. Appl. Phys. 73, 3001 (1993)

    Article  ADS  Google Scholar 

  21. R. Pinto, S.P. Pai, C.P. D’Souza, L.C. Gupta, R. Vijayaraghavan, D. Kumar, M. Sharon, Physica C 196, 264 (1992)

    Article  ADS  Google Scholar 

  22. R.E. Leuchtner, J.S. Horwitz, D.B. Chrisey, J. Appl. Phys. 83, 5477 (1998)

    Article  ADS  Google Scholar 

  23. Y. Watanabe, Y. Seo, M. Tanamura, H. Asami, Y. Matsumoto, J. Appl. Phys. 78, 5126 (1995)

    Article  ADS  Google Scholar 

  24. A. Jacquot, B. Lenoir, M.O. Boffoué, A. Dauscher, Appl. Phys. A 69, 195 (1999)

    Article  ADS  Google Scholar 

  25. I.J. Jeon, D. Kim, J.S. Song, J.H. Her, D.R. Lee, K.B. Lee, Appl. Phys. A 70, 235 (2000)

    Article  ADS  Google Scholar 

  26. R.K. Singh, D. Bhattacharya, J. Narayan, Appl. Phys. Lett. 61, 483 (1992)

    Article  ADS  Google Scholar 

  27. E. Van de Riet, C.J.C.M. Nillesen, J. Dieleman, J. Appl. Phys. 74, 2008 (1993)

    Article  ADS  Google Scholar 

  28. K.L. Saenger, J. Appl. Phys. 70, 5629 (1991)

    Article  ADS  Google Scholar 

  29. J.C. Conde, F. Lusquiños, P. González, J. Serra, B. León, L. Cultrera, D. Guido, A. Perrone, Appl. Phys. A 79, 1105 (2004)

    ADS  Google Scholar 

  30. J.C. Conde, Thesis Dissertation, University of Vigo (2004)

  31. L. Ward, The Constants of the Materials and Films, 2nd edn. (IOP Publishing Ltd Institute of Physics, London, 1994)

  32. M.W. Chase, Jr., NIST-JANAF Thermochemical Tables, 4th edn. (The American Chemical Society and the American Institute of Physics, USA, 1998)

  33. R.C. Weast, Handbook of Chemistry and Physics (CRC Press, Inc, USA, 1976)

    Google Scholar 

  34. ANSYS®, Analysis Guides and Others, 1st edn. (SAS IP, Inc.©)

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Authors and Affiliations

  1. Dpto. Física Aplicada, University of Vigo, Lagoas-Marcosende, 36310, Vigo, Spain

    J.C. Conde, P. González, F. Lusquiños, S. Chiussi, J. Serra & B. León

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  1. J.C. Conde
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  2. P. González
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  3. F. Lusquiños
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  4. S. Chiussi
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  5. J. Serra
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  6. B. León
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Correspondence to J.C. Conde.

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PACS

42.25.Lc; 79.20.Dc; 02.70.Dc

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Conde, J., González, P., Lusquiños, F. et al. Analysis of plume deflection in the silicon laser ablation process. Appl. Phys. A 88, 667–671 (2007). https://doi.org/10.1007/s00339-007-4024-7

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  • DOI: https://doi.org/10.1007/s00339-007-4024-7

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