Skip to main content
SpringerLink
Log in

Bottom-up fabrication and piezoelectric properties of CaBi4Ti4O15 micro-plateaus

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

CaBi4Ti4O15 (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, d33, had some distribution, and the maximum d33 was confirmed as about 45 pm/V, which is identical to the d33 of the polar-axis oriented CBTi144 thin films.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. E.C. Subbarao, J. Am. Ceram. Soc. 45, 166 (1962)

    Article  Google Scholar 

  2. L. Korzanova, Ferroelectrics 134, 175 (1992)

    Google Scholar 

  3. W. Xu, W.I. Lee, T. Ko, J.K. Lee, Appl. Phys. Lett. 82, 3496 (2003)

    Article  ADS  Google Scholar 

  4. A. Garg, Z.H. Barber, M. Dawber, J.F. Scott, A. Snedden, P. Lightfoot, Appl. Phys. Lett. 83, 2414 (2003)

    Article  ADS  Google Scholar 

  5. K. Kato, D. Fu, K. Suzuki, K. Tanaka, K. Nishizawa, T. Miki, Appl. Phys. Lett. 84, 3771 (2004)

    Article  ADS  Google Scholar 

  6. K. Kato, K. Suzuki, K. Nishizawa, T. Miki, Appl. Phys. Lett. 78, 1119 (2001)

    Article  ADS  Google Scholar 

  7. K. Kato, K. Suzuki, D. Fu, K. Nishizawa, T. Miki, Appl. Phys. Lett. 81, 3227 (2002)

    Article  ADS  Google Scholar 

  8. D. Fu, K. Suzuki, K. Kato, Japan. J. Appl. Phys. 42, 5994 (2003)

    Article  Google Scholar 

  9. D. Fu, K. Suzuki, K. Kato, Appl. Phys. Lett. 85, 3519 (2004)

    Article  ADS  Google Scholar 

  10. K. Kato, K. Tanaka, K. Suzuki, K. Nishizawa, T. Miki, Appl. Phys. Lett. 86, 112901 (2005)

    Article  Google Scholar 

  11. F. Arai, K. Motoo, T. Fukuda, K. Kato, Appl. Phys. Lett. 85, 4217 (2004)

    Article  ADS  Google Scholar 

  12. C.S. Ganpule, A. Stanishevsky, Q. Su, S. Aggarwal, J. Melngaillis, E. Williams, R. Ramesh, Appl. Phys. Lett. 75, 409 (1999)

    Article  ADS  Google Scholar 

  13. M. Alexe, C. Harnagea, D. Hesse, U. Gosele, Appl. Phys. Lett. 75, 1763 (1999)

    Article  ADS  Google Scholar 

  14. K. Kato, K. Suzuki, D. Fu, K. Nishizawa, T. Miki, Japan. J. Appl. Phys. 41, 6829 (2003)

    Article  Google Scholar 

  15. J.A. Christman, R.R. Woolcott Jr., A.I. Kingon, R.J. Nemanich, Appl. Phys. Lett. 73, 3851 (1998)

    Article  ADS  Google Scholar 

  16. J.S. Lee, H.H. Kim, H.J. Kwon, Y.W. Jeong, Appl. Phys. Lett. 73, 166 (1998)

    Article  ADS  Google Scholar 

  17. T. Takeuchi, T. Tani, Y. Saito, Japan. J. Appl. Phys. 38, 5553 (1999)

    Article  Google Scholar 

  18. T. Takeuchi, T. Tani, Y. Saito, Japan. J. Appl. Phys. 39, 5577 (2000)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. National Institute of Advanced Industrial Science and Technology, 2266-98 Anagahora, Shimoshidami, Moriyama-ku, Nagoya, 463-8560, Japan

    K. Kato, K. Suzuki, Y. Masuda, T. Kimura, K. Nishizawa & T. Miki

  2. Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya, 466-8555, Japan

    K. Kato, K. Tanaka & S. Kayukawa

Authors
  1. K. Kato
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. K. Tanaka
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. Kayukawa
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. K. Suzuki
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Y. Masuda
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. T. Kimura
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. K. Nishizawa
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. T. Miki
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to K. Kato.

Additional information

PACS

77.84.-s; 81.20.Fw; 77.65.-j

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kato, K., Tanaka, K., Kayukawa, S. et al. Bottom-up fabrication and piezoelectric properties of CaBi4Ti4O15 micro-plateaus. Appl. Phys. A 88, 273–276 (2007). https://doi.org/10.1007/s00339-007-3985-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-007-3985-x

Keywords

Search

Navigation