Abstract
The micro powder injection molding (μPIM) process was used to fabricate metallic microstructures in this paper. The production of 316L stainless steel microstructures arrays with the dimensions of ∅ 100 μm×height200 μmand∅ 60 μm × height 191 μm is presented. Injection molding was conducted on a conventional injection molding machine and silicon mold inserts with vertical sidewall made by deep reactive ion etching (DRIE) were used. Molded parts with microstructures were well obtained after selecting suitable processing parameters based on the feedstock characteristics. Then the molded parts were debound catalytically and sintered. Sintering at different temperature was conducted under vacuum. The effects of sintering temperatures were evaluated based on the polished and etched micrographs of the sintered microstructures. Finally Young’s Modulus of sintered microstructure was evaluated using nano-indenter.
Similar content being viewed by others
References
V. Piotter, W. Bauer, T. Benzler, A. Emde: Microsyst. Technol. 7, 99 (2001)
V. Piotter, T. Gietzelt, L. Merz: SADHANA – Acad. Proc. Eng. Sci. 28, 299 (2003)
R. Ruprecht, T. Benzler, T. Hanemann, K. Müller, J. Konys, V. Piotter, G. Schanz, L. Schmidt, A. Thies, H. Wöllmer, J. Hausselt: Microsyst. Technol. 4, 28 (1997)
P. Dario, M.C. Carrozza, A. Benvenuto, A. Menciassi: J. Micromech. Microeng. 10, 235 (2000)
A. Rota, T.-V. Duong, T. Hartwig: Microsys. Technol. 7, 225 (2002)
G. Fu, N.H. Loh, S.B. Tor, B.Y. Tay, Y. Murakoshi, R. Maeda: Microsyst. Technol., accepted for publication (2005)
Z.Y. Liu, N.H. Loh, S.B. Tor, K.A. Khor, Y. Murakoshi, R. Maeda: Mater. Lett. 48, 31 (2001)
A.E. Guber, D. Herrmann, A. Muslija: Med. Dev. Tech. 12, 22 (2001)
R.M. German: Powder Injection Molding (MPIF Princeton New Jersey 1990)
Author information
Authors and Affiliations
Corresponding author
Additional information
PACS
81.20.Ev
Rights and permissions
About this article
Cite this article
Fu, G., Loh, N., Tor, S. et al. Injection molding, debinding and sintering of 316L stainless steel microstructures. Appl. Phys. A 81, 495–500 (2005). https://doi.org/10.1007/s00339-005-3273-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-005-3273-6