Skip to main content
Log in

Hydrogen and ozone gas sensing using multiple ZnO nanorods

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

ZnO nanorods grown by site-selective molecular beam epitaxy show current–voltage characteristics that are sensitive to the presence of hydrogen or ozone in the measurement ambient for temperatures as low as ∼112 °C for H2 or room temperature for O3. The sensitivity to hydrogen increases sharply with temperature and multiple nanorods contacted at both ends by ohmic electrodes show currents of ∼10-8 A at 200 °C and a differential current change of ∼18% when changing from a pure N2 ambient to 10% H2 in N2. The nanorods are able to detect small concentrations (3%) of O3 in O2, with changes in current of ∼10-7 A at 25 °C. The sensitivity was 21% for O3 at room temperature. The nanorods also show a strong response to above-band-gap illumination with ultraviolet light.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Q. Wan, Q.H. Li, Y.J. Chen, T.H. Wang, X.L. He, J.P. Li, C.L. Lin: Appl. Phys. Lett. 84, 3654 (2004)

    Article  ADS  Google Scholar 

  2. Q. Wan, Q.H. Li, Y.J. Chen, T.H. Wang, X.L. He, X.G. Gao, J.P. Li: Appl. Phys. Lett. 85, 2566 (2004)

    ADS  Google Scholar 

  3. K. Keem, H. Kim, G.T. Kim, J.S. Lee, B. Min, K. Cho, M.Y. Sung, S. Kim: Appl. Phys. Lett. 84, 4376 (2004)

    Article  ADS  Google Scholar 

  4. D.C. Look: Mater. Sci. Eng. B 80, 383 (2001)

    Article  Google Scholar 

  5. M. Wraback, H. Shen, S. Liang, C.R. Gorla, Y. Lu: Appl. Phys. Lett. 76, 507 (1999)

    Article  ADS  Google Scholar 

  6. C.R. Gorla, N.W. Emanetoglu, S. Liang, W.E. Mayo, Y. Lu, M. Wraback, H. Shen: J. Appl. Phys. 85, 2595 (1999)

    Article  ADS  Google Scholar 

  7. S. Krishnamoorthy, A.A. Iliadis, A. Inumpudi, S. Choopun, R.D. Vispute, T. Venkatesan: Solid-State Electron. 46, 1631 (2002)

    Article  ADS  Google Scholar 

  8. S. Liang, H. Sheng, Y. Liu, Z. Huo, Y. Lu, H. Shen: J. Cryst. Growth 225, 110 (2001)

    Article  ADS  Google Scholar 

  9. S.O. Kucheyev, J.E. Bradley, J.S. Williams, C. Jagadish, M.V. Swain: Appl. Phys. Lett. 80, 956 (2002)

    Article  ADS  Google Scholar 

  10. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, T. Steiner: J. Vac. Sci. Technol. B 22, 932 (2004)

    Article  Google Scholar 

  11. M.H. Huang, S. Mao, H. Feick, H. Yan, Y. Wu, H. Kind, E. Weber, R. Russo, P. Yang: Science 292, 1897 (2001)

    Article  ADS  Google Scholar 

  12. Q.H. Li, Q. Wan, Y.X. Liang, T.H. Wang: Appl. Phys. Lett. 84, 4556 (2004)

    Article  ADS  Google Scholar 

  13. B.H. Kind, H. Yan, B. Messer, M. Law, P. Yang: Adv. Mater. 14, 158 (2002)

    Article  Google Scholar 

  14. C.H. Liu, W.C. Liu, F.C.K. Au, J.X. Ding, C.S. Lee, S.T. Lee: Appl. Phys. Lett. 83, 3168 (2003)

    Article  ADS  Google Scholar 

  15. W.I. Park, G.C. Yi, J.W. Kim, S.M. Park: Appl. Phys. Lett. 82, 4358 (2003)

    Article  ADS  Google Scholar 

  16. J.J. Wu, S.C. Liu: Adv. Mater. 14, 215 (2002)

    Article  Google Scholar 

  17. H.T. Ng, J. Li, M.K. Smith, P. Nguygen, A. Cassell, J. Han, M. Meyyappan: Science 300, 1249 (2003)

    Article  Google Scholar 

  18. J.Q. Hu, Y. Bando: Appl. Phys. Lett. 82, 14019 (2003)

    Google Scholar 

  19. W.I. Park, G.C. Yi, M.Y. Kim, S.J. Pennycook: Adv. Mater. 15, 526 (2003)

    Article  Google Scholar 

  20. Y.W. Heo, V. Varadarjan, M. Kaufman, K. Kim, D.P. Norton, F. Ren, P.H. Fleming: Appl. Phys. Lett. 81, 3046 (2002)

    Article  ADS  Google Scholar 

  21. D.P. Norton, Y.W. Heo, M.P. Ivill, K. Ip, S.J. Pearton, M.F. Chisholm, T. Steiner: Mater. Today, June, 34 (2004)

  22. P.J. Poole, J. Lefebvre, J. Fraser: Appl. Phys. Lett. 83, 2055 (2003)

    Article  ADS  Google Scholar 

  23. M. He, M.M.E. Fahmi, S. Noor Mohammad, R.N. Jacobs, L. Salamanca-Riba, F. Felt, M. Jah, A. Sharma, D. Lakins: Appl. Phys. Lett. 82, 3749 (2003)

    Article  ADS  Google Scholar 

  24. X.C. Wu, W.H. Song, W.D. Huang, M.H. Pu, B. Zhao, Y.P. Sun, J.J. Du: Chem. Phys. Lett. 328, 5 (2000)

    Article  ADS  Google Scholar 

  25. M.J. Zheng, L.D. Zhang, G.H. Li, X.Y. Zhang, X.F. Wang: Appl. Phys. Lett. 79, 839 (2001)

    Article  ADS  Google Scholar 

  26. S.C. Lyu, Y. Zhang, H. Ruh, H.J. Lee, H.W. Shim, E.K. Suh, C.J. Lee: Chem. Phys. 104, 233 (2001)

    ADS  Google Scholar 

  27. B.P. Zhang, N.T. Binh, Y. Segawa, K. Wakatsuki, N. Usami: Appl. Phys. Lett. 83, 1635 (2003)

    Article  ADS  Google Scholar 

  28. W.I. Park, Y.H. Jun, S.W. Jung, G. Yi: Appl. Phys. Lett. 82, 964 (2003)

    Article  ADS  Google Scholar 

  29. B.D. Yao, Y.F. Chan, N. Wang: Appl. Phys. Lett. 81, 757 (2002)

    Article  ADS  Google Scholar 

  30. Z.W. Pan, Z.R. Dai, Z.L. Wang: Science 291, 1947 (2001)

    Article  ADS  Google Scholar 

  31. J.Y. Lao, J.Y. Huang, D.Z. Wang, Z.F. Ren: Nano Lett. 3, 235 (2003)

    Article  ADS  Google Scholar 

  32. X.W. Sun, S.F. Yu, C.X. Xu, C. Yuen, B.J. Chen, S. Li: Jpn. J. Appl. Phys. 42, L1229 (2003)

  33. Z.L. Wang: Mater. Today, June, 26 (2004)

  34. A.A. Tomchenko, G.P. Harmer, B.T. Marquis, J.W. Allen: Sens. Actuators B 93, 126 (2003)

    Article  Google Scholar 

  35. H.L. Hartnagel, A.L. Dawar, A.K. Jain, C. Jagadish: Semiconducting Transparent Thin Films (IOP, Bristol 1995)

  36. K.D. Mitzner, J. Sternhagen, D.W. Galipeau: Sens. Actuators B 93, 92 (2003)

    Article  Google Scholar 

  37. P. Mitra, A.P. Chatterjee, H.S. Maiti: Mater. Lett. 35, 33 (1998)

    Article  Google Scholar 

  38. J.F. Chang, H.H. Kuo, I.C. Leu, M.H. Hon: Sens. Actuators B 84, 258 (1994)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to S.J. Pearton.

Additional information

PACS

81.05.Dz; 73.61.Ga; 72.80.Ey

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kang, B., Heo, Y., Tien, L. et al. Hydrogen and ozone gas sensing using multiple ZnO nanorods. Appl. Phys. A 80, 1029–1032 (2005). https://doi.org/10.1007/s00339-004-3098-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-004-3098-8

Keywords

Navigation