Microstructural changes in amorphous Si/crystalline Al thin bilayer films upon annealing

Abstract

Microstructural changes occurring in a sputter deposited Si (150 nm, amorphous)/Al (50 nm, crystalline); {111} fibre textured bilayer, upon annealing at 523 K for 60 min in a vacuum of 2.0×10^-4 Pa, were analyzed employing X-ray diffraction, Auger electron spectroscopy, scanning electron microscopy, atomic force microscopy and focused-ion beam imaging. After the annealing the Al and Si sublayers had largely exchanged their locations in the bilayer; i.e. the Si layer was adjacent to the substrate after annealing. Simultaneously, the amorphous Si layer had crystallized into an aggregate of {111} oriented nanocrystals, with a crystallite size of about 15 nm. The Al layer, now adjacent to the surface, had formed a uniformly net-shaped layer in association with an increase of the surface roughness. Upon this rearrangement, the already initially present Al {111} fibre texture had become stronger, the Al crystallites had grown laterally and the macrostress in the Al layer had relaxed. An extensive analysis of thermodynamic driving forces for the transformation indicated that the largest gain in energy upon transformation is due to the crystallization of the amorphous Si. The only identifiable driving force for the layer exchange appears to be the release of elastic energy upon the rearrangement of the Si and Al phases in the layer.