Skip to main content
SpringerLink
Log in

Novel optical technique for microscopic imaging of water stains

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

We propose and experimentally demonstrate a fluorescent imaging technique for surface quality control of wet-cleaned silicon wafers. This simple technique allows submicron resolution and fast scanning, while it reveals significant information about water stains distribution. Distribution of water stains is measured using this novel technique and correlated to the surface structure.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. Heyns, P.W. Mertens, J. Ruzyllo, M.Y.M. Lee: Solid State Technol. 42, 37 (1999).

    Google Scholar 

  2. V. Yakovlev, K. Mikhaylichenko, M. Ravkin: US Patent #09/752,609 pending (2000).

  3. K. Mikhaylichenko, M. Ravkin, V. Yakovlev: US Patent #09/752,697 pending (2000).

  4. C.H. Bjorkman, M. Fukuda, T. Yamazaki, S. Miyazaki, M. Hirose: Jpn. J. Appl. Phys. Pt. 1 34, 722 (1995).

    Article  ADS  Google Scholar 

  5. P. Hoffmann, R.P. Mikalo, D. Schmeisser, M. Kittler: Physica Status Solidi B215, 743 (1999).

  6. K. Endo, K. Arima, T. Kataoka, Y. Oshikane, H. Inoue, Y. Mori: Appl. Phys. Lett. 73, 1853 (1998).

    Article  ADS  Google Scholar 

  7. L.M. Sanchez-Brea, P. Siegmann, M.A. Rebollo, E. Bernabeu: Appl. Opt. 39, 539 (2000).

    Article  ADS  Google Scholar 

  8. J. Lange, J.A.E. Manson, A. Hult: J. Coating Tech. 66, 19 (1994).

    Google Scholar 

  9. D.J. Whitehouse: Meas. Sci. Technol. 8, 955 (1997).

    Article  ADS  Google Scholar 

  10. K.I. Jolic, C.R. Nagarajan, W. Thompson: Meas. Sci. Technol. 5, 671 (1994).

    Article  ADS  Google Scholar 

  11. T. Kohno, N. Ozawa, K. Miyamoto, T. Musha: Appl. Opt. 27, 103 (1988).

    Article  ADS  Google Scholar 

  12. A.I. Potapov, L.L. Malygin, E.V. Ershov, U.G. Mikhalchuk: Russ. J. Nondestructive Testing 31, 159 (1995).

    Google Scholar 

  13. S. Gomez, K. Hale, J. Burrows, B. Griffits: Meas. Sci. Technol. 9, 607 (1998).

    Article  ADS  Google Scholar 

  14. J. Lorincik, D. Marton, R.L. King, J. Fine: J. Vac. Sci. Technol. B 14, 2417 (1996).

    Article  Google Scholar 

  15. L.M. Sanchez-Brea, J.A. Gomez-Pedrero, E. Bernabeu: Appl. Surf. Sci. 150, 125 (1999).

    Article  ADS  Google Scholar 

  16. H. Kanaya, K. Usuda, K. Yamada: Appl. Phys. Lett. 67, 682 (1995).

    Article  ADS  Google Scholar 

  17. U. Brackmann, LambdaChrome laser dyes (Lambda Physik, Goettingen, Germany 2000).

Download references

Author information

Authors and Affiliations

  1. Department of Physics, University of Wisconsin – Milwaukee, P.O. Box 413, Milwaukee, WI, 53211, USA

    V.V. Yakovlev

  2. Lam Research, Inc., 1765 South Main Str., Suite 101, Milpitas, CA , 95035, USA

    K. Mikhaylichenko & M. Ravkin

Authors
  1. V.V. Yakovlev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. K. Mikhaylichenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Ravkin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V.V. Yakovlev.

Additional information

PACS

33.50.-j; 42.62.Cf; 61.72.Qq; 81.65.Cf

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yakovlev, V., Mikhaylichenko, K. & Ravkin, M. Novel optical technique for microscopic imaging of water stains. Appl. Phys. A 80, 309–311 (2005). https://doi.org/10.1007/s00339-003-2181-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-003-2181-x

Keywords

Search

Navigation