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Topographical and surface chemical characterization of nanosecond pulsed-laser micromachining of titanium at 532-nm wavelength

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Abstract

Electropolished titanium was micromachined by single, 5-ns pulses from a frequency-doubled (532 nm) Nd:YAG laser. The focal spot size was varied from 10 to 100 μm and the applied fluences varied from the melting threshold (∼1 J/cm2) to more than 100 J/cm2. The resulting craters were imaged by optical microscopy, topographically characterized by interferometry and chemically characterized on the surface by small-spot depth-profiling Auger electron spectroscopy and small-spot X-ray photoelectron spectroscopy. The prevailing ablation regime for the studied fluences and focal spot sizes was found to be melt ejection. The surface chemical characterization showed growing oxide thickness in the heat-affected zone (around the center spot) for increasing fluence but no difference inside the crater. Titanium nitride formation was found inside the crater.

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Authors and Affiliations

  1. Department of Applied Physics, Chalmers University of Technology and Göteborg University , 41296 , Göteborg, Sweden

    H. Reimers, J. Gold, B. Kasemo & D. Chakarov

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  1. H. Reimers
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  2. J. Gold
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  3. B. Kasemo
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  4. D. Chakarov
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Correspondence to D. Chakarov.

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PACS

81.65; 87.80Mj

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Reimers, H., Gold, J., Kasemo, B. et al. Topographical and surface chemical characterization of nanosecond pulsed-laser micromachining of titanium at 532-nm wavelength. Appl Phys A 77, 491–498 (2003). https://doi.org/10.1007/s00339-002-1477-6

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