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Influence of the laser-spot diameter on photo-ablation rates

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Abstract

The dependence of the ablation rate of various materials on the laser spot diameter on the sample surface has been investigated. The experiments have been performed with excimer lasers at the wavelengths 193, 248 and 308 nm. Polymers, aluminum oxide ceramics, and glasses have been ablated under vacuum and ambient atmosphere conditions. In general, all materials show a more or less pronounced increase of the ablation rate with decreasing spot diameter in the range of 10–200 μm if pulses with nanosecond pulse durations are applied. For ultrashort pulses (500 fs) at 248 nm this diameter dependence is not observed. The expansion of the ablation plume over areas of different size seems to be the main reason for this effect.

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References

  1. R. Srinivasan, V. Mayne-Banton: Appl. Phys. Lett.41, 576 (1982)

    Google Scholar 

  2. R. Srinivasan, B. Braren: Chem. Rev.89, 1303 (1989)

    Google Scholar 

  3. S. Lazare, V. Granier: Laser Chem.10, 25 (1989)

    Google Scholar 

  4. For a more detailed study see, for example: D. Bäuerle:Chemical Processing with Lasers, Springer Ser. Mater. Sci., Vol. 1 (Springer, Berlin Heidelberg 1986)

    Google Scholar 

  5. M. von Allmen:Laser-Beam Interactions with Materials, Springer Ser. Mater. Sci., Vol. 2 (Springer, Berlin, Heidelberg 1987)

    Google Scholar 

  6. P. Simon: Appl. Phys. B48, 253 (1989)

    Google Scholar 

  7. P.E. Dyer, R. Srinivasan: Appl. Phys. Lett.48, 445 (1986)

    Google Scholar 

  8. G. Koren: Appl. Phys. Lett.50, 1030 (1987)

    Google Scholar 

  9. M. Eyett, D. Bäuerle: Appl. Phys. Lett.51 2054 (1987)

    Google Scholar 

  10. Th. Beuermann, H.J. Brinkmann, T. Damm, M. Stuke: MRS Proc.191, 37 (1990)

    Google Scholar 

  11. S. Szatmári, F.P. Schäfer: Appl. Phys. B43, 173 (1987)

    Google Scholar 

  12. E. Sutcliffe, R. Srinivasan: J. Appl. Phys.60, 3315 (1986)

    Google Scholar 

  13. R. Srinivasan, B. Braren, R.W. Dreyfus: J. Appl. Phys.61, 372 (1987)

    Google Scholar 

  14. S. Lazare, V. Granier: Chem. Phys. Lett.168, 593 (1990)

    Google Scholar 

  15. J. Kutzner: Untersuchungen zur Wechselwirkung von UV-Laserstrahlung mit Polymeren und Kondensaten. Dissertation, Bielefeld (1989)

  16. P.E. Dyer, C.A. Oldershaw, J. Sidhu: J. Phys. Chem.95, 10004 (1991)

    Google Scholar 

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Authors and Affiliations

  1. Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077, Göttingen, Germany

    B. Wolff-Rottke, J. Ihlemann, H. Schmidt & A. Scholl

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  1. B. Wolff-Rottke
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  2. J. Ihlemann
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  3. H. Schmidt
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  4. A. Scholl
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Wolff-Rottke, B., Ihlemann, J., Schmidt, H. et al. Influence of the laser-spot diameter on photo-ablation rates. Appl. Phys. A 60, 13–17 (1995). https://doi.org/10.1007/BF01577606

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  • DOI: https://doi.org/10.1007/BF01577606

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