Abstract
An appropriate calibration of the local vibrational mode absorption of carbon in GaAs on arsenic sublattice sites, CAs, at wavenumber 582 cm–1 (77 K) is presented. Integrated absorptions Iα of CAs, the dominant acceptor in undoped monocrystalline GaAs, and calibrated carbon concentrations [C] were measured in single crystals using the methods FTIR and SSMS, respectively. A calibration factor fC = [C]/Iα of (7.1 ± 0.2) × 1015 cm–1 has been derived for 2.8 × 1014 cm–3≤ [C] ≤ 1.4 × 1016 cm–3 above a SSMS detection limit of [C]DL≅ 1.4 × 1013 cm–3. The carbon concentrations [C] = [C]SSMS/RSCC were calibrated with a relative sensitivity coefficient RSCC = [C]SSMS/ [C]TRUE of 3.1 ± 0.1. CPAA was used as a reference method for [C]CPAA≥ 4.4 × 1014 cm–3 in order to approximate [C]TRUE.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
Author information
Authors and Affiliations
Additional information
Received: 15 December 1998 / Revised: 8 April 1999 / Accepted: 13 April 1999
Rights and permissions
About this article
Cite this article
Wiedemann, B., Alt, H., Meyer, J. et al. Spark source mass spectrometric calibration of the local vibrational mode absorption of carbon in gallium arsenide on arsenic sublattice sites. Fresenius J Anal Chem 364, 768–771 (1999). https://doi.org/10.1007/s002160051430
Issue Date:
DOI: https://doi.org/10.1007/s002160051430