A Composite Probe for Surface Topography Measurement

A composite surface measurement probe, developed for the characterisation of engineering surfaces, is presented. The probe is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wide range of applications. It integrates a focus-detection optical system with a stylus-mirror system. Calibration results show that the probe can measure dimensions larger than ±500 μm with good linearity for both contact and non-contact measurement. The vertical measurement resolution of the probe is 5 nm.