Skip to main content
SpringerLink
Log in

Investigation of work coordinate system setting in ultra-precision machining using electrical breakdown for non-conductive materials

  • Original Article
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

The ultra-precision machine tool industry has been consistently improving to the point where machine tools with extreme thermal controls, vibration damping, and command resolutions of 0.1 nm are commercially available. As little research focus has been given to developing peripheral technologies, currently available work coordinate system setting methods are a bottleneck on the achievable accuracy of ultra-precision machine tools. One of the work coordinate system setting methods uses electrical breakdown. The electrical phenomenon occurs when a sufficiently large voltage difference is applied between two conductors. This phenomenon has been observed to have a linear relationship between the breakdown voltage and gap size at short gap sizes. Electrical breakdown is a capable work coordinate system setting with an accuracy of 100 s nm. However, this method is limited to electrically conductive cutting tools and workpiece materials. This study proposes a work coordinate system setting method for ultra-precision machining based on electrical breakdown for non-conductive materials. In this study, a conductive thin film coating is applied to polycrystalline diamond cutting tools to facilitate electrical breakdown work coordinate system setting. With similar motivation, a modification method was tested to enable electrical breakdown work coordinate system setting on non-conductive workpiece materials. The modification method used a 50-nm-thick platinum coating on the workpiece. This study also introduces a method for automatic work coordinate system setting using electrical breakdown and sensors built into the machine tool.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  1. Zhang S, Zhou Y, Zhang H, Xiong Z, To S (2019) Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications. Int J Mach Tools Manuf 142:16–41. https://doi.org/10.1016/j.ijmachtools.2019.04.009

    Article  Google Scholar 

  2. Abdulkadir LN, Abou-El-Hossein K, Jumare AI, Odedeyi PB, Liman MM, Olaniyan TA (2018) Ultra-precision diamond turning of optical silicon—a review. Int J Adv Manuf Technol 96:173–208. https://doi.org/10.1007/s00170-017-1529-x

    Article  Google Scholar 

  3. Brinksmeier E, Gläbe R, Osmer J (2006) Ultra-Precision Diamond Cutting of Steel Molds. CIRP Ann 55:551–554. https://doi.org/10.1016/S0007-8506(07)60480-6

    Article  Google Scholar 

  4. Ruibin X, Wu H (2016) Study on cutting mechanism of Ti6Al4V in ultra-precision machining. Int J Adv Manuf Technol 86:1311–1317. https://doi.org/10.1007/s00170-015-8304-7

    Article  Google Scholar 

  5. Schneider F, Das J, Kirsch B, Linke B, Aurich JC (2019) Sustainability in Ultra Precision and Micro Machining: A Review. Int J Precis Eng Manuf-Green Technol 6:601–610. https://doi.org/10.1007/s40684-019-00035-2

    Article  Google Scholar 

  6. Zareena AR, Veldhuis SC (2012) Tool wear mechanisms and tool life enhancement in ultra-precision machining of titanium. J Mater Process Technol 212:560–570. https://doi.org/10.1016/j.jmatprotec.2011.10.014

    Article  Google Scholar 

  7. Yuan ZJ, Zhou M, Dong S (1996) Effect of diamond tool sharpness on minimum cutting thickness and cutting surface integrity in ultraprecision machining. J Mater Process Technol 62:327–330. https://doi.org/10.1016/S0924-0136(96)02429-6

    Article  Google Scholar 

  8. Zhang R, Wang YP (2014) On-Machine Measurement System Implemented Based on Fanuc CNC System Using a Touch Trigger Probe. Adv Mater Res 1016:3–7. https://doi.org/10.4028/www.scientific.net/AMR.1016.3

    Article  Google Scholar 

  9. Renishaw: Small VMC - High accuracy. Renishaw n.d. http://www.renishaw.com/en/preferred-high-accuracy-probe-for-small-vmcs%2D%2D9499. Accessed 9 Oct 2021

  10. Workpiece Touch Probes n.d. https://www.heidenhain.com/products/touch-probes/workpiece-measurement. Accessed 28 Nov 2021

  11. Min S, Lidde J, Raue N, Dornfeld D (2011) Acoustic emission based tool contact detection for ultra-precision machining. CIRP Ann 60:141–144. https://doi.org/10.1016/j.cirp.2011.03.079

    Article  Google Scholar 

  12. Uhlmann E, Raue N, Gabriel C (2013) Acoustic emission-based micro milling tool contact detection as an integrated machine tool function. Proc 13th Int EUSPEN Conf: 152–155

  13. Bourne KA, Jun MBG, Kapoor SG, DeVor RE (2008) An Acoustic Emission-Based Method for Determining Contact Between a Tool and Workpiece at the Microscale. J Manuf Sci Eng 130:031101. https://doi.org/10.1115/1.2917285

    Article  Google Scholar 

  14. Yoshioka H, Shinno H, Sawano H, Tanigawa R (2014) Monitoring of distance between diamond tool edge and workpiece surface in ultraprecision cutting using evanescent light. CIRP Ann 63:341–344. https://doi.org/10.1016/j.cirp.2014.03.129

    Article  Google Scholar 

  15. Gandarias E, Dimov S, Pham DT, Popov K, Lizarralde R, Arrazola PJ (2006) New methods for tool failure detection in micromilling. Proc Inst Mech Eng Part B J Eng Manuf 220:137–144. https://doi.org/10.1243/095440506X77562

    Article  Google Scholar 

  16. Castaño F, del Toro RM, Haber RE, Beruvides G (2015) Conductance sensing for monitoring micromechanical machining of conductive materials. Sensors Actuators A Phys 232:163–171. https://doi.org/10.1016/j.sna.2015.05.015

    Article  Google Scholar 

  17. Popov K, Dimov S, Ivanov A, Pham DT, Gandarias E (2010) New tool-workpiece setting up technology for micro-milling. Int J Adv Manuf Technol 47:21–27. https://doi.org/10.1007/s00170-009-2055-2

    Article  Google Scholar 

  18. Bono MJ, Seugling RM, Kroll JJ, Nederbragt WW (2010) An uncertainty analysis of tool setting methods for a precision lathe with a B-axis rotary table. Precis Eng 34:242–252. https://doi.org/10.1016/j.precisioneng.2009.06.003

    Article  Google Scholar 

  19. Kimoto A, Tsuji S, Shida K (2007) Noncontact Material Identification and Distance Measurement Using Effective Capacitance With CdS Cells. IEEE Sensors J 7:1440–1446. https://doi.org/10.1109/JSEN.2007.904856

    Article  Google Scholar 

  20. Wang D-C, Chou J-C, Wang S-M, Lu P-L, Liao L-P (2003) Application of a Fringe Capacitive Sensor to Small-Distance Measurement. Jpn J Appl Phys 42:5816–5820. https://doi.org/10.1143/JJAP.42.5816

    Article  Google Scholar 

  21. Maeng S, Min S (2023) Work Coordinate Setup in the Ultra-precision Machine Tool Using Electrical Breakdown. Int J Precis Eng Manuf:1–9. https://doi.org/10.1007/s12541-023-00779-7

  22. Meek JM (1978) Electrical breakdown of gases. John Wiley and Sons, Ltd, United States

    MATH  Google Scholar 

  23. Loeb LB (1928) The theory of the electrical breakdown of gases at atmospheric pressures. J Frankl Inst 205:305–321. https://doi.org/10.1016/S0016-0032(28)91353-8

    Article  Google Scholar 

  24. Wagner KW (1922) The physical nature of the electrical breakdown of solid dielectrics. J Am Inst Electr Eng 41:1034–1044. https://doi.org/10.1109/JoAIEE.1922.6593245

    Article  Google Scholar 

  25. Townsend JS (1915) Electricity in Gases. Clarendon Press, Oxford, U.K.

    Book  Google Scholar 

  26. Boyle WS, Kisliuk P (1955) Departure from Paschen’s Law of Breakdown in Gases. Phys Rev 97:255–259. https://doi.org/10.1103/PhysRev.97.255

    Article  Google Scholar 

  27. Peschot A, Bonifaci N, Lesaint O, Valadares C, Poulain C (2014) Deviations from the Paschen’s law at short gap distances from 100 nm to 10 μm in air and nitrogen. Appl Phys Lett 105:123109. https://doi.org/10.1063/1.4895630

    Article  Google Scholar 

  28. Torres J-M, Dhariwal RS (1999) Electric field breakdown at micrometre separations in air and vacuum. Microsyst Technol 6:6–10. https://doi.org/10.1007/s005420050166

    Article  Google Scholar 

  29. Slade PG, Taylor ED (2002) Electrical breakdown in atmospheric air between closely spaced (0.2 /spl mu/m-40 /spl mu/m) electrical contacts. IEEE Trans Compon Packag Technol 25:390–396. https://doi.org/10.1109/TCAPT.2002.804615

    Article  Google Scholar 

  30. Wallach AJ, Levit L (2003) Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps. Reliab Test Charact 4980:87–96. MEMSMOEMS II, SPIE. https://doi.org/10.1117/12.478191

    Article  Google Scholar 

  31. Cyril PJ, Asokan P, Jerald J, Kanagaraj G, Mukund NJ, Nielsen I (2017) Tool speed and polarity effects in micro-EDM drilling of 316L stainless steel. Prod Manuf Res 5:99–117. https://doi.org/10.1080/21693277.2017.1357055

    Article  Google Scholar 

Download references

Funding

Authors gratefully acknowledge the help of kind support from the FANUC Corporation, Japan, for the donation of the ROBONANO α-0iB, one of the latest ultra-precision machine tool, to MIN LAB at UW-Madison. Sangjin Maeng has received a new faculty research fund from Hongik University.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, University of Wisconsin, Madison, WI, USA

    Zach Lowery & Sangkee Min

  2. Mechanical & System Design Engineering, Hongik University, Seoul, South Korea

    Sangjin Maeng

Authors
  1. Zach Lowery
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sangjin Maeng
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Sangkee Min
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

All authors have contributed to the study conception and research development. ZL performed material preparation, experiment, and data analysis. ZL and SM wrote the draft of the manuscript, and SM reviewed the manuscript. All authors proofread and approved the final manuscript.

Corresponding author

Correspondence to Sangkee Min.

Ethics declarations

Competing interests

The authors declare no competing interests.

Additional information

Publisher’s Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lowery, Z., Maeng, S. & Min, S. Investigation of work coordinate system setting in ultra-precision machining using electrical breakdown for non-conductive materials. Int J Adv Manuf Technol 129, 1731–1740 (2023). https://doi.org/10.1007/s00170-023-12396-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-023-12396-9

Keywords

Search

Navigation