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Theoretical and experimental analysis of surface topography and surface roughness evolution in fixed abrasive double-sided planetary lapping of YAG wafers

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Abstract

Double-sided lapping process with fixed abrasive shows a strong capability of achieving high efficiency and high surface quality due to its controllable movement of the abrasive and determined material removal modes, and it can be as an alternative technology for fabricating ultra-precision optical components. However, the formation and evolution of the surface topography and roughness (Ra) were rarely clarified in the previous research due to the complicity of the double-sided lapping process. This paper established a new mathematical analytical model to provide a better scientific understanding of the formation and evolution of the surface topography and roughness, in which the spatial location and protrusion height of abrasive particles, each abrasive-material interaction, kinematics trajectory of abrasive particles, and force balance on the workpiece were considered. A series of lapping experiments on the Y3Al5O12 (YAG) wafer were conducted to verify the feasibility of the proposed model and analyze the influence of processing parameters on surface topography and roughness evolution. The results indicated that the proposed analytical model can be effectively used to predict surface topography and optimize the process parameters of double-sided planetary lapping for better surface roughness. The variation of processing time and rotational speed of the lapping plate (pad) possesses a significant influence on surface topography and Ra values. Better surface Ra values can be achieved by selecting the proper processing time and rotational speed of the lapping plate.

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Data used to support the findings of this study are available from the corresponding author upon request.

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Funding

National Natural Science Foundation of China (51991372)

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Authors and Affiliations

  1. Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, 116024, People’s Republic of China

    Lei Yang, Xiaoguang Guo, Renke Kang, Xianglong Zhu & Yufan Jia

Authors
  1. Lei Yang
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  2. Xiaoguang Guo
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  3. Renke Kang
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  4. Xianglong Zhu
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  5. Yufan Jia
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Contributions

Renke Kang contributed to the conception of the study.

Yufan Jia performed the experiment.

Xianglong Zhu contributed significantly to the analysis and manuscript preparation.

Lei Yang performed the data analyses and wrote the manuscript.

Xiaoguang Guo helped perform the analysis with constructive discussions.

Corresponding author

Correspondence to Xianglong Zhu.

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Yang, L., Guo, X., Kang, R. et al. Theoretical and experimental analysis of surface topography and surface roughness evolution in fixed abrasive double-sided planetary lapping of YAG wafers. Int J Adv Manuf Technol 127, 195–209 (2023). https://doi.org/10.1007/s00170-023-11417-x

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  • DOI: https://doi.org/10.1007/s00170-023-11417-x

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