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A theoretical and experimental investigation into tool setting induced form error in diamond turning of micro-lens array

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Abstract

Micro-lens array (MLA) has been widely used for 3D imaging, etc., due to its excellent functional performances. Ultra-precision diamond turning (UPDT) offers a satisfying solution to the high-quality fabrication of MLA with sub-micrometric form accuracy and nanometric surface roughness. However, in UPDT tool setting, errors would deteriorate form accuracy as a crucial factor. This study focuses on discussing the tool setting effect on form error of MLA and proposes a new two-step tool setting method for UPDT. Firstly, a theoretical model was established for form error of MLA under tool setting errors. Moreover, a new two-step tool setting method was developed with high accuracy to control the tool setting errors. Finally, a series of experiments were carried out with different tool setting errors for the MLA fabrication, and its form error would be measured. The theoretical and experimental results are found that the proposed tool setting method is effective with a high-precision accuracy and the tool setting errors would crucially induce periodical form error at the MLA of UPDT. Significantly, the study draws up a comprehensive understanding of the tool setting effect on form accuracy of MLA in UPDT with the further improvement.

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Funding

The work was partially supported by the National Natural Science Foundation of China (Grant no. 51405217).

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All authors contributed to the study conception and design. Conceptualization, data collection, and analysis were performed by Pan Guo. Investigation and software were performed by Zhen Li. Material preparation and formal analysis were performed by Zhiwen Xiong. Resources, validation, and writing-review and editing were performed by Shaojian Zhang. The first draft of the manuscript was written by Pan Guo, and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

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Correspondence to Shaojian Zhang.

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Guo, P., Li, Z., Xiong, Z. et al. A theoretical and experimental investigation into tool setting induced form error in diamond turning of micro-lens array. Int J Adv Manuf Technol 124, 2515–2525 (2023). https://doi.org/10.1007/s00170-022-10643-z

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  • DOI: https://doi.org/10.1007/s00170-022-10643-z

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