Skip to main content
SpringerLink
Log in

Ultraprecision Machining-based Micro-Hybrid lens design for micro scanning devices

  • Published:
International Journal of Precision Engineering and Manufacturing Aims and scope Submit manuscript

Abstract

This paper presents design of a refractive-diffractive hybrid lens for use in micro optical scanning systems. To achieve the target focal length with minimized aberration, the refractive lens was optimally designed with consideration of reducing transverse ray aberration. The diffractive efficiency was calculated in terms of depth and period of the Fresnel pattern via rigorous coupled wave-analysis (RCWA). The geometry of the V-shaped diamond tools limits the depth of Fresnel edge of the diffractive lens due to the interference, which eventually determines the whole size of the lens. In this study, two types of hybrid lenses for micro scanning system were compared and designed in consideration of optical performance and machining limit. Therefore, the designed diffractive lens was optimized for 300 μm focal length with minimum aberration. The depth of Fresnel edge and the diameter was determined to be 0.94μm and 423.4μm within the machining limit, respectively. The lens base mold was fabricated using a 5-axis ultraprecision machine, and the lens was imprinted through a hot embossing process. The measured focal length and the calculated NA are 336μm and 0.63 respectively. Lastly, Imaging tests and diffractive efficiency are measured to evaluate the optical performance of the micro-hybrid lens.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Abbreviations

NA:

Numerical aperture

Z(x):

Profile of the Fresnel lens

Z0(x):

Original aspheric surface profile

d :

Zone depth of Fresnel lens

M:

Magnification

l :

Object distance

l’:

Image distance

References

  1. Joo, J. Y. and Lee, S. K., “Miniaturized TIR Fresnel Lens For Miniature Optical Led Applications,” Int. J. Precis. Eng. Manuf., Vol. 10, No. 2, pp. 137–140, 2009.

    Article  Google Scholar 

  2. Sweeney, D. W. and Sommargren, G. E., “Harmonic Diffractive Lenses,” Applied Optics, Vol. 34, No. 14, pp. 2469–2475, 1995.

    Article  Google Scholar 

  3. Stone, T. and George, N., “Hybrid Diffractive-Refractive Lenses and Achromats,” Applied Optics, Vol. 27, No. 14, pp. 2960–2971, 1988.

    Article  Google Scholar 

  4. Davidson, N., Friesem, A. A., and Hasman, E., “Analytic Design of Hybrid Diffractive-Refractive Achromats,” Applied Optics, Vol. 32, No. 25, pp. 4770–4774, 1993.

    Article  Google Scholar 

  5. Fu, Y. Q. and Bryan, N. K. A., “Hybrid Microdiffractive-Microrefractive Lens with a Continuous Relief Fabricated by Use of Focused-Ion-Beam Milling for Single-Mode Fiber Coupling,” Applied Optics, Vol. 40, No. 32, pp. 5872–5876, 2001.

    Article  Google Scholar 

  6. Woo, D. K., Hane, K., and Lee, S.-K., “Fabrication of a Multi-Level Lens using Independent-Exposure Lithography and FAB Plasma Etching,” Journal of Optics A: Pure and Applied Optics, Vol. 10, No. 4, Paper No. 044001, 2008.

    Google Scholar 

  7. Fujita, T., Nishihara, H., and Koyama, J., “Fabrication of Micro Lenses using Electron-Beam Lithography,” Optics Letters, Vol. 6, No. 12, pp. 613–615, 1981.

    Article  Google Scholar 

  8. Blough, C. G., Rossi, M., Mack, S. K., and Michaels, R. L., “Single-Point Diamond Turning and Replication of Visible and Near-Infrared Diffractive Optical Elements,” Applied Optics, Vol. 36, No. 20, pp. 4648–4654, 1997.

    Article  Google Scholar 

  9. Yan, J., Maekawa, K., Tamaki, J. I., and Kuriyagawa, T., “Micro Grooving on Single-Crystal Germanium for Infrared Fresnel Lenses,” Journal of Micromechanics and Microengineering, Vol. 15, No. 10, pp. 1925–1931, 2005.

    Article  Google Scholar 

  10. Lee, H. S. and Park, J. R., “Experimental Study of Injection- Compression Molding of Film Insert Molded Plates,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 3, pp. 455–461, 2014.

    Article  Google Scholar 

  11. Chen, S. T., Chang, K. E., Huang, W. P., Yang, H. Y., and Lee, X. M., “Development of A Cost-Effective High-Precision Bench Machine Tool for Multi-Level Micro Aspheric Lighting-Lens Mold Machining,” Int. J. Precis. Eng. Manuf., Vol. 13, No. 12, pp. 2225–2231, 2012.

    Article  Google Scholar 

  12. Smith, W. J., “Modern Lens Design,” McGraw-Hill, pp. 3–23, 2005.

    Google Scholar 

  13. Moharam, M. G. and Gaylord, T. K., “Rigorous Coupled-Wave Analysis of Planar-Grating Diffraction,” Journal of Optical Society of America, Vol. 71, No. 7, pp. 811–818, 1981.

    Article  Google Scholar 

  14. Pramanik, A., Neo, K. S., Rahman, M., Li, X. P., Sawa, M., and Maeda, Y., “Cutting Performance of Diamond Tools during Ultra-Precision Turning of Electroless-Nickel Plated Die Materials,” Journal of Materials Processing Technology, Vol. 140, No. 1, pp. 308–313, 2003.

    Article  Google Scholar 

  15. Becker, H. and Heim, U., “Hot Embossing as a Method for the Fabrication of Polymer High Aspect Ratio Structures,” Sensors and Actuators A: Physical, Vol. 83, No. 1, pp. 130–135, 2000.

    Article  Google Scholar 

  16. Gale, M. T., Gimkiewicz, C., Obi, S., Schnieper, M., Söchtig, J., et al., “Replication Technology for Optical Microsystems,” Optics and Lasers in Engineering, Vol. 43, No. 3, pp. 373–386, 2005.

    Article  Google Scholar 

  17. Lee, C., Kuriyagawa, T., Woo, D. K., and Lee, S. K., “Optimizing the Fabrication Process of a High-Efficiency Blazed Grating through Diamond Scribing and Molding,” Journal of Micromechanics and Microengineering, Vol. 20, No. 5, Paper No. 055028, 2010.

    Google Scholar 

  18. Buralli, D. A. and Morris, G. M., “Effects of Diffraction Efficiency on the Modulation Transfer Function of Diffractive Lenses,” Applied Optics, Vol. 31, No. 22, pp. 4389–4396, 1992.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Advanced Photonics Research Institute, Gwangju Institute Science and Technology, 123, Cheomdangwagi-ro, Buk-gu, Gwangju, 500-712, South Korea

    Dong-Yoon Yoo

  2. School of Mechatronics, Gwangju Institute Science and Technology, 123, Cheomdangwagi-ro, Buk-gu, Gwangju, 500-712, South Korea

    Sun-Kyu Lee & Dong-Ho Lee

Authors
  1. Dong-Yoon Yoo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sun-Kyu Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Dong-Ho Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Dong-Ho Lee.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Yoo, DY., Lee, SK. & Lee, DH. Ultraprecision Machining-based Micro-Hybrid lens design for micro scanning devices. Int. J. Precis. Eng. Manuf. 16, 639–646 (2015). https://doi.org/10.1007/s12541-015-0085-2

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12541-015-0085-2

Keywords

Search

Navigation