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Surface resonance properties of thin silver films with nanoparticles induced by pulsed-laser interference dewetting process

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Abstract

Pure Ag thin films with a thickness of 10 nm were deposited on glass substrates using a thermal evaporator system. Nanoparticles were then induced in the films by a Michelson interferometer dewetting process. The particle size was found to decrease with an increasing laser power and exposure time. The minimum particle size was 150 nm for a laser power of 4 W and exposure time of 60 s. However, a smaller particle size of 110 nm was obtained by adopting a two-step exposure process with a rotation angle of 30° and an exposure time of 55 s. The absorption peak wavelength of the dewetted films increased with an increasing rotation angle. By contrast, a blue shift in the absorption spectrum occurred as the laser power increased. The half-height widths of the absorption peaks of the films dewetted using different rotation angles were wider than those of the films dewetted without rotation, indicating that the two-step rotation process resulted in a wider particle size distribution. Overall, the results show that the optical properties of the laser-dewetted Ag films are highly dependent on the interference parameters.

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Funding

The authors received financial support provided by the Ministry of Science and Technology of Taiwan, ROC, under Project No. MOST 109–2637-E-020–001.

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Hsuan-Kai Lin: writing, review, and funding acquisition. Ying-Chi Chen: investigation, formal analysis, data collection, visualization, and writing. Jia-Ren Lee: conceptualization, formal analysis, and review. Wei-Hua Lu: original draft, resources and visualization. Yuan-Jen Chang: review, methodology and editing.

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Correspondence to Hsuan-Kai Lin.

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Lin, HK., Chen, YC., Lee, JR. et al. Surface resonance properties of thin silver films with nanoparticles induced by pulsed-laser interference dewetting process. Int J Adv Manuf Technol 120, 377–384 (2022). https://doi.org/10.1007/s00170-022-08827-8

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  • DOI: https://doi.org/10.1007/s00170-022-08827-8

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