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Experimental study on near-polished ultra-precision grinding of fused glass with the assistant of pure CeO2 atomizing liquid

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Abstract

It is easy to obtain the near-polished grinding surface using fine-size grain diamond wheel (such as #2000, grain size 6.5 μm) and a small grinding depth. However, a relatively big-size wheel (such as #600, grain size 24 μm) is difficult to accomplish the near-polished grinding. Hence, this paper proposes a novel axis-feed grinding approach with the assistant of pure CeO2 atomizing liquid to obtain the near-polished grinding roughness using a relatively big-size grain diamond wheel and a large grinding depth. Firstly, the brittle-ductile axis-feed grinding modes and the roughness prediction model are briefly introduced. Secondly, the #600 diamond wheel is employed to perform the experiments of grinding fused glass with the proposed technology. Then, the brittle-ductile axis-feed grinding modes, the softened speed and softened depth of fused glass by the effectivity of pure CeO2 atomizing liquid, and the grinding roughness obtained with different feed speeds and grinding depths are investigated. It is shown that the ultra-precision grinding of fused glass can be realized using a relatively big-size grain diamond wheel and a large grinding depth, and the resulting morphology and roughness are mainly influenced by the feed speed. There exists the combined action of softening and polishing caused by pure CeO2 atomizing liquid. The feed speed that the ductile grinding happens increases about 6.57 times due to the increase of the brittle-ductile transition depth from 21 to 138 nm caused by the softened effect. The mean grinding roughness can reach 1.05 nm at the feed speed of 1 mm/min and the grinding depth of 5–20 μm.

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References

  1. Dai W, Xiang X, Jiang Y, Wang HJ, Li XB, Yuan XD, Zheng WG, Lv HB, Zu XT (2011) Surface evolution and laser damage resistance of CO2 laser irradiated area of fused silica. Opt Lasers Eng 49(2):273–280

    Article  Google Scholar 

  2. Evans CJ, Paul E, Dornfeld D, Lucca DA, Byrne G, Tricard M, Klocke F, Dambon O, Mullany BA (2003) Material removal mechanisms in lapping and polishing. CIRP Ann Manuf Technol 52(2):611–633

    Article  Google Scholar 

  3. Lambropoulos JC (1998) Micromechanics of material-removal mechanisms from brittle surfaces. LLE Rev 74:131–138

    Google Scholar 

  4. Li YG, Wu YB, Zhou LB, Fujimoto M (2014) Vibration-assisted dry polishing of fused silica using a fixed-abrasive polisher. Int J Mach Tools Manuf 77:93–102

    Article  Google Scholar 

  5. Brinksmeier E, Mutlugünes Y, Klocke F, Aurich JC, Shore P, Ohmori H (2010) Ultra-precision grinding. CIRP Ann Manuf Technol 59(2):652–671

    Article  Google Scholar 

  6. Koch N (1992) Duktile bearbeitung optischer gläser zur herstellung asphärischer optischer linsen. Ind Diam Rev 2:118–126

    Google Scholar 

  7. Zhao QL, Liang YC, Stephenson D, Corbett J (2007) Surface and subsurface integrity in diamond grinding of optical glasses on Tetraform ‘C’. Int J Mach Tools Manuf 47(14):2091–2097

    Article  Google Scholar 

  8. Shore P (1995) Machining of optical surface in brittle materials using an ultra-precision machine tool. Ph.D. Thesis, Cranfield University

  9. Wang W, Yao P, Wang J, Huang CZ, Zhu HT, Zou B, Liu HL, Yan JW (2016) Crack-free ductile mode grinding of fused silica under controllable dry grinding conditions. Int J Mach Tools Manuf 109:126–136

    Article  Google Scholar 

  10. Gu WB, Yao ZQ, Li HL (2011) Investigation of grinding modes in horizontal surface grinding of optical glass BK7. J Mater Process Technol 211(10):1629–1636

    Article  Google Scholar 

  11. Li P, Jin T, Guo ZF, Yi J, Qu MN (2016) Analysis on the effects of grinding wheel speed on removal behavior of brittle optical materials. J Manuf Sci Eng Trans ASME 139(3):031014

    Article  Google Scholar 

  12. Liu W, Deng ZH, Shang YY, Wan LL (2017) Effects of grinding parameters on surface quality in silicon nitride grinding. Ceram Int 43(1):1571–1577

    Article  Google Scholar 

  13. Heinzel C, Rickens K (2009) Engineered wheels for grinding of optical glass. CIRP Ann Manuf Technol 58(1):315–318

    Article  Google Scholar 

  14. Xie J, Lu YX (2011) Study on axial-feed mirror finish grinding of hard and brittle materials in relation to micron-scale grain protrusion parameters. Int J Mach Tools Manuf 51(1):84–93

    Article  Google Scholar 

  15. Xie J, Deng ZJ, Liao JY, Li N, Zhou H, Ban WX (2016) Study on a 5-axis precision and mirror grinding of glass freeform surface without on-machine wheel-profile truing. Int J Mach Tools Manuf 109:65–73

    Article  Google Scholar 

  16. Hwang Y, Kim GH, Kim YB, Kim JH, Lee SK (2016) Suppression of the inflection pattern in ultraprecision grinding through the minimization of the hydrodynamic force using a toothed wheel. Int J Mach Tools Manuf 100:105–115

    Article  Google Scholar 

  17. Chen B, Li SC, Deng ZH, Guo B, Zhao QL (2017) Grinding marks on ultra-precision grinding spherical and aspheric surfaces. Int J Precis Eng Manuf Green Technol 4(4):419–429

    Article  Google Scholar 

  18. Gao S, Geng ZC, Wu YQ, Wang ZG, Kang RK (2019) Surface integrity of quartz glass induced by ultra-precision grinding. J Mech Eng 5:186–195

    Article  Google Scholar 

  19. Lakhdari F, Bouzid D, Belkhir N, Herold V (2017) Surface and subsurface damage in Zerodur® glass ceramic during ultrasonic assisted grinding. Int J Adv Manuf Technol 90:1993–2000

    Article  Google Scholar 

  20. Jia DZ, Li CH, Zhang YB, Yang M, Zhang XP, Li RZ, Ji HJ (2019) Experimental evaluation of surface topographies of NMQL grinding ZrO2 ceramics combining multiangle ultrasonic vibration. Int J Adv Manuf Technol 100:457–473

    Article  Google Scholar 

  21. Yu TB, Liu CM, Yu KD, Wang WS (2019) Experimental study on laser heat-assisted grinding quartz glass. J Northeast Univ (Nat Sci) 40(10):1467–1473

    Google Scholar 

  22. Kakinuma Y, Konuma Y, Fukuta M, Tanaka K (2019) Ultra-precision grinding of optical glass lenses with La-doped CeO2 slurry. CIRP Ann Manuf Technol 68(1):345–348

    Article  Google Scholar 

  23. Zhoua LB, Shiina T, Qiu ZJ, Shimizu J, Yamamoto T, Tashiro T (2009) Research on chemo-mechanical grinding of large size quartz glass substrate. Precis Eng 33:499–504

    Article  Google Scholar 

  24. Xie J, Xu J, Tang Y, Tamaki J (2008) 3D graphical evaluation of micron-scale protrusion topography of diamond grinding wheel. Int J Mach Tools Manuf 48:1254–1260

    Article  Google Scholar 

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Funding

This work was sponsored by the Natural Science Foundation of Chongqing, China (cstc2020jcyj-msxmX0601).

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Authors and Affiliations

  1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China

    Long Zhang, Gong Yu Liu, Li Min Zhu & Peng Guo

  2. Beijing Institute of Technology Chongqing Innovation Center, Chongqing, 401120, China

    Long Zhang, Tian Feng Zhou & Peng Liu

Authors
  1. Long Zhang
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  2. Gong Yu Liu
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  3. Li Min Zhu
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  4. Tian Feng Zhou
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  5. Peng Guo
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  6. Peng Liu
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Contributions

Long Zhang and Gong Yu Liu conceived and designed the study. Long Zhang and Peng Guo performed the experiments. Long Zhang wrote the paper. Li Min Zhu, Tian Feng Zhou, and Peng Liu reviewed and edited the manuscript. All authors read and approved the manuscript.

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Correspondence to Li Min Zhu.

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Zhang, L., Liu, G.Y., Zhu, L.M. et al. Experimental study on near-polished ultra-precision grinding of fused glass with the assistant of pure CeO2 atomizing liquid. Int J Adv Manuf Technol 115, 3243–3249 (2021). https://doi.org/10.1007/s00170-021-07347-1

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  • DOI: https://doi.org/10.1007/s00170-021-07347-1

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