Abstract
As an important micro-structure processing method, Micro Wire Electrical Discharge Machining (micro-WEDM) has unique advantages. However, the wire electrode has unavoidable vibration in the current micro-WEDM, and the vibration amplitude becomes larger with the increase of the thickness of the workpiece, which will lead to the decline of the machining surface quality and machining efficiency. One of the important structures of THz TWT, the beam tunnel, is characterized by small section size, large length size, and high dimensional accuracy requirements. The beam tunnel processed by the current micro-WEDM shows a waist drum shape, which cannot meet the requirements of dimensional consistency. Based on this, this study proposes a novel machining process called Wire Servo Discharge Grooving technology (WSDG), which can suppress the wire electrode vibration through the micro-groove of the wire jackscrew, and use the wire electrode discharge to erode the workpiece for forming processing. The forming size and shape accuracy are high, and the across scales machining can be realized through the servo motion of the wire jackscrew. The beam tunnel with 70-mm length, 0.1-mm diameter, 5-μm accuracy, and Ra 100-nm surface roughness of 0.67-THz high-frequency electrical vacuum TWT is machined by adopting WSDG. Multiple measurements show that the surface roughness Ra 31–56 nm and the size deviation 0.002 mm meet the design requirements. WSDG expands the application range of micro-WEDM and provides a novel idea for the processing similar across scales features.
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Funding
The research is supported by the Basic Research Plan of Sichuan (No. 2018212C015) and the Innovation and Development Fund Project of the China Academy of Engineering Physics (No. K1173).
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Weiran Yuan proposed the WSDG technology, constructed the experimental device, and wrote the initial draft of the paper. Yongbin Zhang designed and conducted the study, Jianyuan Li was in charge of the processing experiment, Qi Jing measured the workpieces and collected the data, and Bo Hu analyzed the data. All authors discussed the results and revised the manuscript.
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Yuan, W., Zhang, Y., Li, J. et al. Wire Servo Discharge Grooving technology based on WEDM for beam tunnel fabrication. Int J Adv Manuf Technol 115, 3907–3917 (2021). https://doi.org/10.1007/s00170-021-07232-x
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DOI: https://doi.org/10.1007/s00170-021-07232-x