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Development of a micro punching machine tool for micro lens array on steel mold

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Abstract

Micro lens arrays (MLAs) are widely applied in different areas to fulfill different functions. Ultra-precision diamond cutting technology can generate MLA with sub-micrometer form accuracy and nanometer surface roughness but mostly for nonferrous material. In this paper, a three-axis micro punching machine tool is developed to use diamond tool to produce MLAs on steel mold. The developed micro punching machine realizes high-feed and high-precision motions by a macro-micro composite structure. An on-site measurement system based on machine vision is designed to provide evaluation results for MLAs and compensation data for the PZT. The fabrication methodologies for MLAs are studied under the consideration of the output voltage of PZT, tool path generation, and machining parameters. Experiments are conducted to testify the machine tool and the on-site measurement system by machining of MLAs on mold steel. The experimental results show that the micro punching machine can produce MLAs on hard materials with sub-micrometer form accuracy, and the evaluation results from the on-site measurement are close to those from the white-interference profiler.

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Funding

This study is funded by National Natural Science Foundation of China (No. 51605101, No. 51575520, No. U1601202) and Science and Technology Program of Guangzhou, China (No. 201804020040).

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Authors and Affiliations

  1. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China

    Rongli Zhao, Sujuan Wang, Xin Chen, Ziqiang Yin & Jiewu Leng

  2. Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China

    Rongli Zhao, Sujuan Wang, Ziqiang Yin & Xiafeng Zhang

  3. Key Laboratory of Computer Integrated Manufacturing System, Guangdong University of Technology, Guangzhou, China

    Jiewu Leng

Authors
  1. Rongli Zhao
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  2. Sujuan Wang
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  3. Xin Chen
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  4. Ziqiang Yin
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  5. Jiewu Leng
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  6. Xiafeng Zhang
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Correspondence to Sujuan Wang.

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Zhao, R., Wang, S., Chen, X. et al. Development of a micro punching machine tool for micro lens array on steel mold. Int J Adv Manuf Technol 106, 4307–4320 (2020). https://doi.org/10.1007/s00170-019-04809-5

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  • DOI: https://doi.org/10.1007/s00170-019-04809-5

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