Skip to main content
SpringerLink
Log in

High-performance graphene-based heaters fabricated using maskless ultraviolet laser patterning

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

Graphene-based film heaters (GFHs) with laser-patterned electrode structures can be used in microheaters, thermal sensors, and thermostatic apparatuses for various high-value-added medical devices and creative products. To obtain uniform and higher temperatures, this study aims to design, fabricate, and measure GFHs with net-like electrode structures using ANSYS Workbench software, an ultraviolet laser processing system, and an infrared thermal imaging camera, respectively. The electric heating experiments (which were measured with an infrared thermal imaging camera) demonstrated that the temperatures of GFHs with net-like electrode structures were significantly higher than those of devices without patterned graphene films. Moreover, the temperatures of GFHs with net-like electrode structures increased rapidly with time when DC voltages higher than 12 V were applied for at least 10 s. A maximum temperature of 91.5 °C was obtained at 200 s when a DC voltage of 18 V was applied. Besides, minimal and maximal deviations of steady-state temperatures between experimental and simulated values were 6.9 °C and 10 °C under each corresponding DC voltage, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Denlinger DW, Abarra EN, Allen K, Rooney PW, Messer MT, Watson SK, Hellman F (1994) Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K. Rev Sci Instrum 65:946–959

    Article  Google Scholar 

  2. Semancik S, Cavicchi RE, Wheeler MC, Tiffany JE, Poirier GE, Walton RM, Suehle JS, Panchapakesan B, DeVoe DL (2001) Microhotplate platforms for chemical sensor research. Sens Actuators B Chem 77:579–591

    Article  Google Scholar 

  3. Barrettino D, Graf M, Song WH, Kirstein KU, Hierlemann A, Baltes H (2004) Hotplate-basedmonolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500°C. IEEE J Solid State Circuits 39:1202–1207

    Article  Google Scholar 

  4. Jung D, Kim D, Lee KH, Overzet LJ, Lee GS (2013) Transparent film heaters using multi-walled carbon nanotube sheets. Sens Actuators A Phys 199:176–180

    Article  Google Scholar 

  5. Scorzoni A, Caputo D, Petrucci G, Placidi P, Zampolli S, Cesare G, Tavernelli M, Nascetti A (2015) Design and experimental characterization of thin film heaters on glass substrate for lab-on-Chip applications. Sens Actuators A Phys 229:203–210

    Article  Google Scholar 

  6. An JE, Jeong YG (2013) Structure and electric heating performance of graphene/epoxy composite films. Eur Polym J 49:1322–1330

    Article  Google Scholar 

  7. Park SC, Kim JM, Kim T, Kim MH, Ahn HS (2016) Boiling characteristics on a serpentine-like geometry thin-film platinum heater under pool boiling. Int J Heat Mass Transf 95:214–223

    Article  Google Scholar 

  8. Adera S, Antao D, Raj R, Wang EN (2016) Design of micropillar wicks for thin-film evaporation. Int J Heat Mass Transf 101:280–294

    Article  Google Scholar 

  9. Khaligh HH, Xu L, Khosropour A, Madeira A, Romano M, Pradére C, Tréguer-Delapierre M, Servant L, Pope MA, Goldthorpe IA (2017) The joule heating problem in silver nanowire transparent electrodes. Nanotechnology 28:425703

    Article  Google Scholar 

  10. Dunst K, Jurków D, Jasiński P (2016) Laser patterned platform with PEDOT-graphene composite film for NO2 sensing. Sens Actuators B Chem 229:155–165

    Article  Google Scholar 

  11. Lu P, Cheng F, Ou Y, Lin M, Su L, Chen S, Yao X, Liu D (2017) A flexible and transparent thin film heater based on a carbon fiber /heat-resistant cellulose composite. Compos Sci Technol 153:1–6

    Article  Google Scholar 

  12. Jayathilake DSY, Sagu JS, Wijayantha KGU (2019) Transparent heater based on Al,Ga co-doped ZnO thin films. Mater Lett 237:249–252

    Article  Google Scholar 

  13. Seok HJ, Jang HW, Lee DY, Son BG, Kim HK (2019) Roll-to-roll sputtered, indium-free ZnSnO/AgPdCu/ZnSnO multi-stacked electrodes for high performance flexible thin-film heaters and heat-shielding films. J Alloys Compd 775:853–864

    Article  Google Scholar 

  14. Creemer JF, Briand D, Zandbergen HW, Vlist W, Boer CR, Rooij NF, Sarro PM (2008) Microhotplates with TiN heaters. Sens Actuators A Phys 148:416–421

    Article  Google Scholar 

  15. Hwang IS, Lee EB, Kim SJ, Choi JK, Cha JH, Lee HJ, Ju BK, Lee JH (2011) Gas sensing properties of SnO2 nanowires on micro-heater. Sens Actuators B Chem 154:295–300

    Article  Google Scholar 

  16. Wyzkiewicz I, Grabowska I, Chudy M, Brzozka Z, Jakubowska M, Wisniewski T, Dybko A (2006) Self-regulating heater for microfluidic reactors. Sens Actuators B Chem 114:893–896

    Article  Google Scholar 

  17. Cheong HG, Kim JH, Song JH, Jeong U, Park JW (2015) Highly flexible transparent thin film heaters based on silver nanowires and aluminum zinc oxides. Thin Solid Films 589:633–641

    Article  Google Scholar 

  18. Tseng SF, Hsiao WT, Cheng PY, Lin YS, Chang TL, Chung CK (2017) Laser structuring of parallel electrode array on graphene/glass substrates for rapid inspections of moisturizing efficacy. Int J Adv Manuf Technol 91:3663–3671

    Article  Google Scholar 

  19. Tseng SF, Chen MF, Hsiao WT, Huang CY, Yang CH, Chen YS (2014) Laser micromilling of convex microfluidic channels onto glassy carbon for glass molding dies. Opt Lasers Eng 57:58–63

    Article  Google Scholar 

  20. Tseng SF, Hsiao WT, Chung CK, Chang TL (2015) Investigation the interaction between the pulsed ultraviolet laser beams and PEDOT:PSS/graphene composite films. Appl Surf Sci 356:486–491

    Article  Google Scholar 

  21. Nguyen VT, Le HD, Nguyen VC, Ngo TTT, Le DQ, Nguyen XN, Phan NM (2013) Synthesis of multi-layer graphene films on copper tape by atmospheric pressure chemical vapor deposition method. Adv Nat Sci Nanosci Nanotechnol 4:035012

    Article  Google Scholar 

  22. Reina A, Jia XT, Ho J, Nezich D, Son HB, Bulovic V, Dresselhaus MS, Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett 9:30–35

    Article  Google Scholar 

Download references

Funding

This research was financially supported by the Ministry of Science and Technology of Taiwan under projects MOST 107-2221-E-027-129-MY2 and MOST 107-2622-E-019-CC3.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, National Taipei University of Technology, Taipei, 10608, Taiwan

    Shih-Feng Tseng

  2. Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan

    Pi-Ying Cheng & Po-Han Wang

  3. Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, 30076, Taiwan

    Wen-Tse Hsiao, Ming-Fu Chen & Chien-Kai Chung

Authors
  1. Shih-Feng Tseng
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Pi-Ying Cheng
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Wen-Tse Hsiao
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Ming-Fu Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Chien-Kai Chung
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Po-Han Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Shih-Feng Tseng.

Additional information

Publisher’s note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Tseng, SF., Cheng, PY., Hsiao, WT. et al. High-performance graphene-based heaters fabricated using maskless ultraviolet laser patterning. Int J Adv Manuf Technol 102, 3011–3020 (2019). https://doi.org/10.1007/s00170-019-03426-6

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-019-03426-6

Keywords

Search

Navigation