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Relationship between subsurface damage depth and breaking strength for brittle materials

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Abstract

Subsurface damages (SSD) induced by lapping strongly influence performances of optical components. However, to date, a wide variety of destructive and non-destructive techniques for measuring the SSD depth have been explored. In the present study, a novel destructive technique was proposed based on breaking strength of the lapped materials. The proposed technique relates the length of median cracks, formed through the Vickers indentation test, and the breaking strength of the indented samples. With this technique, subsurface damage depth can be practically evaluated via measuring breaking strength of lapped samples. The subsurface damage depth and surface roughness of ground and lapped BK7 glass were measured by the bonded interface sectioning technique and contacting profilometer, respectively. In order to validate the feasibility of the proposed technique, the values of SSD depth obtained by the calibration curve were compared with the values of SSD depth measured by the bonded interface sectioning technique. The obtained results are in concordance in the both used methods, which prove the efficiency of our technique to estimate the SSD depth of brittle materials.

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References

  1. Cheng H, Dong Z, Ye X, Tam HY (2014) Subsurface damages of fused silica developed during deterministic small tool polishing. Opt Express 22(15):18588–18603. https://doi.org/10.1364/OE.22.018588

    Article  Google Scholar 

  2. Aida H, Takeda H, Kim S-W, Aota N, Koyama K, Yamazaki T, Doi T (2014) Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives. Appl Surf Sci 292:531–536. https://doi.org/10.1016/j.apsusc.2013.12.005

    Article  Google Scholar 

  3. Belkhir N, Bouzid D, Lakhedari F, Aliouane T, Raedlein E (2011) Characterization of glass surface damaged by alumina abrasive grains. J Non-Cryst Solids 357(15):2882–2887. https://doi.org/10.1016/j.jnoncrysol.2011.03.026

    Article  Google Scholar 

  4. Zhao P, Zhou M, Huang S (2017) Sub-surface crack formation in ultrasonic vibration-assisted grinding of BK7 optical glass. Int J Adv Manuf Technol 93(5–8):1685–1697. https://doi.org/10.1007/s00170-017-0622-5

    Article  Google Scholar 

  5. Li Y, Huang H, Xie R, Li H, Deng Y, Chen X, Wang J, Xu Q, Yang W, Guo Y (2010) A method for evaluating subsurface damage in optical glass. Opt Express 18(16):17180–17186. https://doi.org/10.1364/oe.18.017180

    Article  Google Scholar 

  6. Camp DW, Kozlowski MR, Sheehan LM, Nichols MA, Dovik M, Raether RG, Thomas IM Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces. In: Laser-induced damage in optical materials: 1997, 1998. SPIE, p 9

  7. Cheng J, Chen M, Liao W, Wang H, Wang J, Xiao Y, Li M (2014) Influence of surface cracks on laser-induced damage resistance of brittle KH(2)PO(4) crystal. Opt Express 22(23):28740–28755. https://doi.org/10.1364/OE.22.028740

    Article  Google Scholar 

  8. Hongjie L, Jin H, Fengrui W, Xinda Z, Xin Y, Xiaoyan Z, Laixi S, Xiaodong J, Zhan S, Wanguo Z (2013) Subsurface defects of fused silica optics and laser induced damage at 351 nm. Opt Express 21(10):12204–12217. https://doi.org/10.1364/OE.21.012204

    Article  Google Scholar 

  9. Zhang L, Chen W, Hu L (2013) Systematic investigation on light intensification by typical subsurface cracks on optical glass surfaces. Appl Opt 52(5):980–989. https://doi.org/10.1364/ao.52.000980

    Article  Google Scholar 

  10. Miller PE, Suratwala TI, Wong LL, Feit MD, Menapace JA, Davis PJ, Steele RA (2005) The distribution of subsurface damage in fused silica. Proc of SPIE 5991:599101. https://doi.org/10.1117/12.638821

    Article  Google Scholar 

  11. Li HN, Yu TB, Zhu LD, Wang WS (2016) Evaluation of grinding-induced subsurface damage in optical glass BK7. J Mater Process Technol 229:785–794. https://doi.org/10.1016/j.jmatprotec.2015.11.003

    Article  Google Scholar 

  12. Blaineau P, André D, Laheurte R, Darnis P, Darbois N, Cahuc O, Neauport J (2015) Subsurface mechanical damage during bound abrasive grinding of fused silica glass. Appl Surf Sci 353:764–773. https://doi.org/10.1016/j.apsusc.2015.07.047

    Article  Google Scholar 

  13. Li S, Wang Z, Wu Y (2008) Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes. J Mater Process Technol 205(1–3):34–41. https://doi.org/10.1016/j.jmatprotec.2007.11.118

    Article  Google Scholar 

  14. Hed PP, Edwards DF (1987) Optical glass fabrication technology. 2: relationship between surface roughness and subsurface damage. Appl Opt 26(21):4677–4680. https://doi.org/10.1364/ao.26.004677

    Article  Google Scholar 

  15. Lambropoulos J (2000) From abrasive size to subsurface damage in grinding. In: Optical fabrication and testing. OSA Technical Digest. Optical Society of America, Québec City, p OMA6. https://doi.org/10.1364/oft.2000.oma6

    Google Scholar 

  16. Lee Y (2011) Evaluating subsurface damage in optical glasses. J Eur Opt Soc Rapid Publ 6:11001. https://doi.org/10.2971/jeos.2011.11001

    Google Scholar 

  17. Yao Z, Gu W, Li K (2012) Relationship between surface roughness and subsurface crack depth during grinding of optical glass BK7. J Mater Process Technol 212(4):969–976. https://doi.org/10.1016/j.jmatprotec.2011.12.007

    Article  Google Scholar 

  18. Yin J-F, Bai Q, Zhang B (2018) Methods for detection of subsurface damage: a review. Chin J Mech Eng 31(1):1–14. https://doi.org/10.1186/s10033-018-0229-2

    Article  Google Scholar 

  19. Shen J, Liu S, Yi K, He H, Shao J, Fan Z (2005) Subsurface damage in optical substrates. Optik 116(6):288–294. https://doi.org/10.1016/j.ijleo.2005.02.002

    Article  Google Scholar 

  20. Arrasmith SR, Jacobs SD, Lambropoulos JC, Maltsev A, Golini D, Kordonski WI (2001) Use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers. In: International Symposium on Optical Science and Technology. SPIE, p 9

  21. Yang F (2005) Effect of subsurface damage on indentation behavior of ground ULE™ glass. J Non-Cryst Solids 351(52–54):3861–3865. https://doi.org/10.1016/j.jnoncrysol.2005.10.022

    Article  Google Scholar 

  22. Zhou Y, Funkenbusch PD, Quesnel DJ, Golini D, Lindquist A (1994) Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses. J Am Ceram Soc 77(12):3277–3280. https://doi.org/10.1111/j.1151-2916.1994.tb04585.x

    Article  Google Scholar 

  23. Lucca DA, Rhorer RL, Maggiore CJ, Seo YW, Donaldson RR (1995) Assessment of subsurface damage in ultraprecision-machined CdS by ion channeling. CIRP Ann 44(1):513–516. https://doi.org/10.1016/s0007-8506(07)62375-0

    Article  Google Scholar 

  24. Vicente P, David D, Camassel J (2001) Raman scattering as a probing method of subsurface damage in SiC. Mater Sci Eng B Solid-State Mater Adv Technol 80:348–351

    Article  Google Scholar 

  25. Yan J, Asami T, Kuriyagawa T (2008) Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser micro-Raman spectroscopy. Precis Eng 32:186–195

    Article  Google Scholar 

  26. Lodha GS, Yamashita K, Kunieda H, Tawara Y, Yu J, Namba Y, Bennett JM (1998) Effect of surface roughness and subsurface damage on grazing-incidence x-ray scattering and specular reflectance. Appl Opt 37:5239–5252

    Article  Google Scholar 

  27. Jabr SN (1985) Total internal reflection microscopy: inspection of surfaces of high bulk scatter materials. Appl Opt 24:1689–1692

    Article  Google Scholar 

  28. Kranenberg CF, Jungling KC (1994) Subsurface damage identification in optically transparent materials using a nondestructive method. Appl Opt 33:4248–4253

    Article  Google Scholar 

  29. Lawn BR, Evans AG (1980) Elastic/plastic indentation damage in ceramics: the median/radial crack system. J Am Ceram Soc 63(9–10):481–600

    Google Scholar 

  30. Lv D, Tang Y, Wang H, Huang Y (2013) Experimental investigations on subsurface damage in rotary ultrasonic machining of Glassbk7. Mach Sci Technol 17(3):443–463. https://doi.org/10.1080/10910344.2013.806114

    Article  Google Scholar 

  31. Lakhdari F, Bouzid D, Belkhir N, Herold V (2016) Surface and subsurface damage in Zerodur® glass ceramic during ultrasonic assisted grinding. Int J Adv Manuf Technol 90(5–8):1993–2000. https://doi.org/10.1007/s00170-016-9551-y

    Google Scholar 

  32. Aleinikov FK (1957) The effect of certain physical and mechanical properties on the grinding of brittle materials. Phys Tech Phys 27:2529–2538

    Google Scholar 

  33. Neauport J, Destribats J, Maunier C, Ambard C, Cormont P, Pintault B, Rondeau O (2010) Loose abrasive slurries for optical glass lapping. Appl Opt 49(30):5736–5745. https://doi.org/10.1364/ao.49.005736

    Article  Google Scholar 

  34. Randi JA, Lambropoulos JC, Jacobs SD (2005) Subsurface damage in some single crystalline optical materials. Appl Opt 44(12):2241–2249. https://doi.org/10.1364/ao.44.002241

    Article  Google Scholar 

  35. Dong Z, Cheng H, Ye X, Tam HY (2014) Subsurface damage of fused silica lapped by fixed-abrasive diamond pellets. Appl Opt 53(26):5841–5849. https://doi.org/10.1364/AO.53.005841

    Article  Google Scholar 

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Correspondence to Fouad Lakhdari.

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Lakhdari, F., Belkhir, N., Bouzid, D. et al. Relationship between subsurface damage depth and breaking strength for brittle materials. Int J Adv Manuf Technol 102, 1421–1431 (2019). https://doi.org/10.1007/s00170-018-03284-8

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  • DOI: https://doi.org/10.1007/s00170-018-03284-8

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