Abstract
Electrochemical machining (ECM) and especially electrochemical micromachining (μECM) became an attractive area of research due to the fact that this process does not create any defective layer after machining and that there is a growing demand for better surface integrity on different micro-applications such as microfluidics systems and stress free drilled holes in automotive and aerospace manufacturing with complex shapes. Electrochemical machining is a non-conventional machining process based on the phenomenon of electrolysis. This process requires maintaining a small gap (size of a few μm)—the inter-electrode gap—between the anode (workpiece) and the cathode (tool electrode) in order to achieve acceptable machining results (i.e. accuracy, high aspect ratio with appropriate material removal rate and efficiency). This paper presents different problematic areas of electrochemical micromachining (often referred to as electrochemical micromachining or μECM). The aim of this paper is to address the problems met by the μECM technology developers and to present the current state-of-the-art solutions.
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References
McGeough JA (1974) Principles of electrochemical machining. Chapman and Hall, London
Datta M, Harris D (1997) Electrochemical micromachining: an environmentally friendly. High Speed Proc Tech 42:3007–3013. doi:10.1016/S0013-4686(97)00147-3
Wei B (1994) Modeling and analysis of pulse electrochemical machining. The University of Nebraska, Lincoln
Rajurkar KP, Kozak J, Wei B, McGeough JA (1993) Study of pulse electrochemical machining characteristics. CIRP Ann Manuf Technol 42:231–234. doi:10.1016/S0007-8506(07)62432-9
Rajurkar KP, Wei B, Kozak J, McGeough JA (1995) Modelling and monitoring interelectrode gap in pulse electrochemical machining. CIRP Ann Manuf Technol 44:177–180. doi:10.1016/S0007-8506(07)62301-4
Kozak J, Rajurkar KP, Makkar Y (2004) Study of pulse electrochemical micromachining. J Manuf Process 6:7–14. doi:10.1016/S1526-6125(04)70055-9
Kozak J, Rajurkar KP, Makkar Y (2004) Selected problems of micro-electrochemical machining. J Mater Process Technol 149:426–431. doi:10.1016/j.jmatprotec.2004.02.031
Zhang Z, Zhu D, Qu N, Wang M (2007) Theoretical and experimental investigation on electrochemical micromachining. Microsyst Technol 13:607–612. doi:10.1007/s00542-006-0369-7
Kamaraj AB, Sundaram MM (2013) Mathematical modeling and verification of pulse electrochemical micromachining of microtools. Int J Adv Manuf Technol. doi:10.1007/s00170-013-4896-y
Cagnon L, Kirchner V, Kock M et al (2003) Electrochemical micromachining of stainless steel by ultrashort voltage pulses. Z Phys Chem 217:299–314. doi:10.1524/zpch.217.4.299.20383
Schuster R, Kirchner V, Allongue P, Ertl G (2000) Electrochemical micromachining. Science 289:98–101. doi:10.1126/science.289.5476.98
Schuster R (2007) Electrochemical microstructuring with short voltage pulses. Chemphyschem A Eur J Chem Phys Phys Chem 8:34–39. doi:10.1002/cphc.200600401
Schuster R, Kirchner V (2004) Method for electrochemically processing material. US 6689269 B1
Trimmer AL, Hudson JL, Kock M, Schuster R (2003) Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses. Appl Phys Lett 82:3327. doi:10.1063/1.1576499
Kock M, Kirchner V, Schuster R (2003) Electrochemical micromachining with ultrashort voltage pulses—a versatile method with lithographical precision. Electrochim Acta 48:3213–3219. doi:10.1016/S0013-4686(03)00374-8
Li Z, Ji H (2009) Machining accuracy prediction of aero-engine blade in electrochemical machining based on BP neural network. Proceedings of the 2009 International Workshop on Information Security and Application (IWISA 2009). Academy Publisher, Qingdao, China, pp 9–12, ISBN 978-952-5726-06-0
Wang M, Zhu D, Qu NS, Zhang CY (2007) Preparation of turbulated cooling hole for gas turbine blade using electrochemical machining. Key Eng Mater 329:699–704. doi:10.4028/www.scientific.net/KEM.329.699
Datta M, Landolt D (2000) Fundamental aspects and applications of electrochemical microfabrication. Electrochim Acta 45:2535–2558. doi:10.1016/S0013-4686(00)00350-9
Kamaraj AB, Sundaram MM, Mathew R (2013) Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications. Microsyst Technol 19:179–186. doi:10.1007/s00542-012-1653-3
Lu X, Leng Y (2005) Electrochemical micromachining of titanium surfaces for biomedical applications. J Mater Process Technol 169:173–178. doi:10.1016/j.jmatprotec.2005.04.040
Bhattacharyya B, Doloi B, Sridhar PS (2001) Electrochemical micro-machining: new possibilities for micro-manufacturing. J Mater Process Technol 113:301–305. doi:10.1016/S0924-0136(01)00629-X
Bhattacharyya B, Malapati M, Munda J (2004) Advancement in electrochemical micro-machining. Int J Mach Tool Manuf 44:1577–1589. doi:10.1016/j.ijmachtools.2004.06.006
Landolt D, Chauvy P-F, Zinger O (2003) Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments. Electrochim Acta 48:3185–3201. doi:10.1016/S0013-4686(03)00368-2
Rajurkar KP, Levy G, Malshe A et al (2006) Micro and nano machining by electro-physical and chemical processes. CIRP Ann Manuf Technol 55:643–666. doi:10.1016/j.cirp.2006.10.002
Mithu MAH, Fantoni G, Ciampi J, Santochi M (2012) On how tool geometry, applied frequency and machining parameters influence electrochemical microdrilling. CIRP J Manuf Sci Technol 5:202–213. doi:10.1016/j.cirpj.2012.07.006
Shin HS, Kim BH, Chu CN (2008) Analysis of the side gap resulting from micro electrochemical machining with a tungsten wire and ultrashort voltage pulses. J Micromech Microeng 18:075009. doi:10.1088/0960-1317/18/7/075009
Bignon C, Bédrin C, Weill R (1982) Application of eddy currents to the in-process measurement of the gap in E.C.M. CIRP Ann Manuf Technol 31:115–118. doi:10.1016/S0007-8506(07)63280-6
Meijer J, Veringa JCM (1984) Characteristic numbers to describe the detail transfer quality of electro-chemical machining. Precis Eng 6:79–82. doi:10.1016/0141-6359(84)90036-9
Rajurkar KP, Schnacker CL, Packard H (1988) Some aspects of ECM performance and control. Ann of the CIRP 37:183–186. doi:10.1016/S0007-8506(07)61614-X
Wei B, Rajurkar KP, Talpallikar S (1996) On-line identification of interelectrode gap sizes in pulse electrochemical machining (PECM). Proceedings of the symposium on High Rate Metal Dissolution Processes. p 248
De Silva AKM, Altena HSJ, McGeough JA (2000) Precision ECM by process characteristic modelling. CIRP Ann Manuf Technol 49:151–155. doi:10.1016/S0007-8506(07)62917-5
Fan Z-W, Hourng L-W (2011) Electrochemical micro-drilling of deep holes by rotational cathode tools. Int J Adv Manuf Technol 52:555–563. doi:10.1007/s00170-010-2744-x
Yong L, Yunfei Z, Guang Y, Liangqiang P (2003) Localized electrochemical micromachining with gap control. Sensors Actuators A Phys 108:144–148. doi:10.1016/S0924-4247(03)00371-6
Bhattacharyya B, Munda J (2003) Experimental investigation on the influence of electrochemical machining parameters on machining rate and accuracy in micromachining domain. Int J Mach Tool Manuf 43:1301–1310. doi:10.1016/S0890-6955(03)00161-5
Mithu MAH, Fantoni G, Ciampi J (2011) A step towards the in-process monitoring for electrochemical microdrilling. Int J Adv Manuf Technol 57:969–982. doi:10.1007/s00170-011-3355-x
Choi SH, Kim BH, Shin HS et al (2013) Analysis of the electrochemical behaviors of WC–Co alloy for micro ECM. J Mater Process Technol 213:621–630. doi:10.1016/j.jmatprotec.2012.10.018
Ozkeskin FM (2008) Feedback controlled high frequency electrochemical micromachining. Thesis, Texas A&M University
Clifton D, Mount A, Alder G, Jardine D (2002) Ultrasonic measurement of the inter-electrode gap in electrochemical machining. Int J Mach Tool Manuf 42:1259–1267. doi:10.1016/S0890-6955(02)00041-X
Wei B, Li W, Lamphere MS (2005) Electrochemical machining tool assembly and method of monitoring electrochemical machining. LAP, New York
Muir RN, Curry DR, Mill F et al (2007) Real-time parameterization of electrochemical machining by ultrasound measurement of the interelectrode gap. Proc Inst Mech Eng Part B J Eng Manuf 221:551–558. doi:10.1243/09544054JEM567
Kim B, Na C, Lee Y et al (2005) Micro electrochemical machining of 3D micro structure using dilute sulfuric acid. CIRP Ann Manuf Technol 54:191–194. doi:10.1016/S0007-8506(07)60081-X
Labib AW, Keasberry VJ, Atkinson J, Frost HW (2011) Expert systems with applications towards next generation electrochemical machining controllers: a fuzzy logic control approach to ECM. Expert Syst Appl 38:7486–7493. doi:10.1016/j.eswa.2010.12.074
Çaydaş U, Hasçalık A, Ekici S (2009) An adaptive neuro-fuzzy inference system (ANFIS) model for wire-EDM. Expert Syst Appl 36:6135–6139. doi:10.1016/j.eswa.2008.07.019
Lin C-T, Chung I-F, Huang S-Y (2001) Improvement of machining accuracy by fuzzy logic at corner parts for wire-EDM. Fuzzy Set Syst 122:499–511. doi:10.1016/S0165-0114(00)00034-8
Mediliyegedara TKKR, Silva A, De KM, Harrison DK, McGeough JA (2005) New developments in the process control of the hybrid electro chemical discharge machining (ECDM) process. J Mater Process Technol 167:338–343. doi:10.1016/j.jmatprotec.2005.05.043
Skrabalak G, Zybura-Skrabalak M, Ruszaj A (2004) Building of rules base for fuzzy-logic control of the ECDM process. J Mater Process Technol 149:530–535. doi:10.1016/j.jmatprotec.2003.11.058
Abuzied HH (2012) Prediction of electrochemical machining process parameters using artificial neural networks. Int J Comp Sci Eng 4:125–132
Asokan P, Ravi Kumar R, Jeyapaul R, Santhi M (2008) Development of multi-objective optimization models for electrochemical machining process. Int J Adv Manuf Technol 39:55–63. doi:10.1007/s00170-007-1204-8
Zare Chavoshi S (2011) Analysis and predictive modeling of performance parameters in electrochemical drilling process. Int J Adv Manuf Technol 53:1081–1101. doi:10.1007/s00170-010-2897-7
Chang D-Y, Shen P-C, Hung J-C et al (2011) Process simulation-assisted fabricating micro-herringbone grooves for a hydrodynamic bearing in electrochemical micromachining. Mater Manuf Process 26:1451–1458. doi:10.1080/10426914.2011.551905
Yonghua L, Kai L (2010) Fuzzy controlling interelectrode gap of ECM based on 6 dimensional forces and machining current. 2010 International Conference on Intelligent System Design and Engineering Application. IEEE, pp 775–779
Wang Y, Chen H, Wang Z et al (2010) Development of a soft-computer numerical control system for micro-electrochemical machining. Am J Nanotech 1:51–55
Kirchner V, Cagnon L, Schuster R, Ertl G (2001) Electrochemical machining of stainless steel microelements with ultrashort voltage pulses. Appl Phys Lett 79:1721. doi:10.1063/1.1401783
Ahn SH, Ryu SH, Choi DK, Chu CN (2004) Electro-chemical micro drilling using ultra short pulses. Precis Eng 28:129–134. doi:10.1016/j.precisioneng.2003.07.004
Kozak J, Gulbinowicz D, Gulbinowicz Z (2008) The mathematical modeling and computer simulation of pulse electrochemical micromachining. IAENG Transactions on engineering technologies volume 2: special edition of the World Congress on Engineering and Computer Science. AIP Conf. Proc., San Francisco, CA, USA, pp 174–185
Marla D, Joshi SS, Mitra SK (2008) Modeling of electrochemical micromachining: comparison to experiments. J Micro/Nanolithography, MEMS and MOEMS 7:033015. doi:10.1117/1.2964215
Mithu MAH, Fantoni G, Ciampi J (2011) The effect of high frequency and duty cycle in electrochemical microdrilling. Int J Adv Manuf Technol 55:921–933. doi:10.1007/s00170-010-3123-3
Fan Z-W, Hourng L-W, Lin M-Y (2012) Experimental investigation on the influence of electrochemical micro-drilling by short pulsed voltage. Int J Adv Manuf Technol 61:957–966. doi:10.1007/s00170-011-3778-4
Zemann R, Reiss PW, Schörghofer P, Bleicher F (2012) Cutting edge research in new technologies—chapter 1: some contributions at the technology of electrochemical micromachining with ultra short voltage pulses. 3–29. Doi: 10.5772/33560
Yang I, Park MS, Chu CN (2009) Micro ECM with ultrasonic vibrations using a semi-cylindrical tool. Int J Precis Eng Manuf 10:5–10. doi:10.1007/s12541-009-0020-5
Park BJ, Kim BH, Chu CN (2006) The effects of tool electrode size on characteristics of micro electrochemical machining. CIRP Ann Manuf Technol 55:197–200. doi:10.1016/S0007-8506(07)60397-7
Davydov AD, Volgin VM, Lyubimov VV (2004) Electrochemical machining of metals: fundamentals of electrochemical shaping. Russ J Electrochem 40:1230–1265. doi:10.1007/s11175-005-0045-8
Kim BH, Ryu SH, Choi DK, Chu CN (2005) Micro electrochemical milling. J Micromech Microeng 15:124–129. doi:10.1088/0960-1317/15/1/019
Liu Y, Zhu D, Zhu L (2012) Micro electrochemical milling of complex structures by using in situ fabricated cylindrical electrode. Int J Adv Manuf Technol 60:977–984. doi:10.1007/s00170-011-3682-y
Gao W, Arai Y, Shibuya A et al (2006) Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage. Precis Eng 30:96–103. doi:10.1016/j.precisioneng.2005.06.003
Tsui H-P, Hung J-C, You J-C, Yan B-H (2008) Improvement of electrochemical microdrilling accuracy using helical tool. Mater Manuf Process 23:499–505. doi:10.1080/10426910802104237
Yong L, Di Z, Yongbin Z et al (2010) Experimental investigation on complex structures machining by electrochemical micromachining technology. Chin J Aeronaut 23:578–584. doi:10.1016/S1000-9361(09)60257-0
Jo CH, Kim BH, Shin HS et al (2008) Micro electrochemical machining for complex internal micro features. Internal Conference on Smart Manufacturing Application 247–250. doi: 10.1109/ICSMA.2008.4505651
Bhattacharyya B, Malapati M, Munda J, Sarkar A (2007) Influence of tool vibration on machining performance in electrochemical micro-machining of copper. Int J Mach Tool Manuf 47:335–342. doi:10.1016/j.ijmachtools.2006.03.005
Ruszaj A, Zybura M, Żurek R, Skrabalak G (2003) Some aspects of the electrochemical machining process supported by electrode ultrasonic vibrations optimization. Proc Inst Mech Eng B J Eng Manuf 217:1365–1371. doi:10.1243/095440503322617135
Oh KS (2000) MOSFET basics, application note AN9010, Fairchild semiconductor 1–37
Balogh L (2001) Design and application guide for high speed MOSFET gate drive circuits. Proc. Power Supply Design Seminar (SEM 1400)
Tang T, Burkhart C (2009) Hybrid MOSFET/driver for ultra-fast switching. IEEE Trans Dielectr Electr Insul 16:967–970. doi:10.1109/TDEI.2009.5211841
Campbell D, Harper J, Natham, Vinodhkumar, Xiao F, Sundararajan R (2008) A compact high voltage nanosecond pulse generator. Proc. ESA Annual Meeting on Electrostatics 2008. pp 1–12
Zhang YJ, Tang YJ, Liu XK et al (2009) Development of ultra-short pulse power supply applicable to micro-ECM. Mater Sci Forum 626–627:369–374. doi:10.4028/www.scientific.net/MSF.626-627.369
Burkert S, Schulze H, Gmelin T, Leone M (2009) The pulse electrochemical micromachining (PECMM)—specifications of the pulse units. Int J Mater Form 2:645–648. doi:10.1007/s12289-009-0464-2
Schulze H, Borkenhagen D, Burkert S (2008) Demands on process and process energy sources for the electro-erosive and electrochemical micro machining. J Mater 1:1383–1386. doi:10.1007/s12289-008-0
Danilovic M, Chen Z, Wang R et al (2011) Evaluation of the switching characteristics of a gallium-nitride transistor. 2011 IEEE Energy Conversion Congress and Exposition. IEEE, pp 2681–2688
Bhattacharyya B, Malapati M, Munda J (2005) Experimental study on electrochemical micromachining. J Mater Process Technol 169:485–492. doi:10.1016/j.jmatprotec.2005.04.074
Swain AK (2010) Preparation of coated microtools for electrochemical machining applications. University of Nebraska
Liu Y, Zhu D, Zeng Y, Yu H (2011) Development of microelectrodes for electrochemical micromachining. Int J Adv Manuf Technol 55:195–203. doi:10.1007/s00170-010-3035-2
Kozak J, Dabrowski L, Lubkowski K et al (2000) CAE-ECM system for electrochemical technology of parts and tools. J Mater Process Technol 107:293–299. doi:10.1016/S0924-0136(00)00685-3
Purcar M, Bortels L, Vandenbossche B, Deconinck J (2004) 3D electrochemical machining computer simulations. J Mater Process Technol 149:472–478. doi:10.1016/j.jmatprotec.2003.10.050
Deconinck J (1992) Current distributions and electrode shape changes in electrochemical systems. Springer, Berlin
Pattavanitch J, Hinduja S, Atkinson J (2010) Modelling of the electrochemical machining process by the boundary element method. CIRP Ann Manuf Technol 59:243–246. doi:10.1016/j.cirp.2010.03.072
Narayanan OH, Hinduja S, Noble CF (1986) The prediction of workpiece shape during electrochemical machining by the boundary element method. Inter J Mach Tool Design Res 26:323–338. doi:10.1016/0020-7357(86)90009-0
Kozak J (2001) Computer simulation system for electrochemical shaping. J Mater Process Technol 109:354–359. doi:10.1016/S0924-0136(00)00825-6
Jain VK, Pandey PC (1981) Tooling design for ECM—a finite element approach. J Eng Ind 103:183. doi:10.1115/1.3184473
Deconinck D, Van Damme S, Deconinck J (2012) A temperature dependent multi-ion model for time accurate numerical simulation of the electrochemical machining process. Part I: theoretical basis. Electrochim Acta 60:321–328. doi:10.1016/j.electacta.2011.11.070
Deconinck D, Van Damme S, Deconinck J (2012) A temperature dependent multi-ion model for time accurate numerical simulation of the electrochemical machining process. Part II: numerical simulation. Electrochim Acta 69:120–127. doi:10.1016/j.electacta.2012.02.079
Floridor G, Van den Bossche B, Nelissen G et al (2004) Numerical investigation of transient current density distributions for multi-ion electrolytes at a rotating disk electrode. Anal Chem 76:5579–5590. doi:10.1021/ac049804d
Kenney JA, Hwang GS, Shin W (2004) Two-dimensional computational model for electrochemical micromachining with ultrashort voltage pulses. Appl Phys Lett 84:3774. doi:10.1063/1.1738937
Hotoiu L, Van Damme S, Deconinck J (2011) Progress report PECMM simulations WP3-M4. 1–18
Hotoiu EL, Van Damme S, Deconinck D et al (2011) Development of simulation software package for nano-pulsed electrochemical micro machining. The 219th ECS meeting
Van Damme S, Hotoiu EL, Albu C et al (2011) Double layer effects in computational electrochemistry. The 219th ECS meeting
Wang MH, Zhu D (2009) Fabrication of multiple electrodes and their application for micro-holes array in ECM. Int J Adv Manuf Technol 41:42–47. doi:10.1007/s00170-008-1456-y
Zhu D, Xu HY (2002) Improvement of electrochemical machining accuracy by using dual pole tool. J Mater Process Technol 129:15–18. doi:10.1016/S0924-0136(02)00567-8
Zhang Z, Wang Y, Chen F, Mao W (2011) A micro-machining system based on electrochemical dissolution of material. Russ J Electrochem 47:819–824. doi:10.1134/S1023193511070172
Lee ES, Baek SY, Cho CR (2007) A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses. Int J Adv Manuf Technol 31:762–769. doi:10.1007/s00170-005-0247-y
Mathew R, Sundaram MM (2012) Modeling and fabrication of micro tools by pulsed electrochemical machining. J Mater Process Technol 212:1567–1572. doi:10.1016/j.jmatprotec.2012.03.004
Choi SH, Ryu SH, Choi DK, Chu CN (2007) Fabrication of WC micro-shaft by using electrochemical etching. Int J Adv Manuf Technol 31:682–687. doi:10.1007/s00170-005-0241-4
Huang SH, Huang FY, Yan BH (2004) Fracture strength analysis of micro WC-shaft manufactured by micro-electro-discharge machining. Int J Adv Manuf Technol 26:68–77. doi:10.1007/s00170-003-1974-6
Pham DT, Dimov S, Bigot S et al (2004) Micro-EDM—recent developments and research issues. J Mater Process Technol 149:50–57. doi:10.1016/j.jmatprotec.2004.02.008
Lee ES, Park JW, Moon YH (2002) A study on electrochemical micromachining for fabrication of microgrooves in an air-lubricated hydrodynamic bearing. Int J Adv Manuf Technol 20:720–726. doi:10.1007/s001700200229
Haisch T, Mittemeijer E, Schultze JW (2001) Electrochemical machining of the steel 100Cr6 in aqueous NaCl and NaNO3 solutions: microstructure of surface films formed by carbides. Electrochim Acta 47:235–241
Haisch T (2002) High rate electrochemical dissolution of iron-based alloys in NaCl and NaNO3 electrolytes. Max-Planck-Institut für Metallforschung Stuttgart
Bähre D, Weber O, Rebschläger A (2013) Investigation on pulse electrochemical machining characteristics of lamellar cast iron using a response surface methodology-based approach. Procedia CIRP 6:363–368. doi:10.1016/j.procir.2013.03.028
Schulze H-P (2009) Problems of the processing accuracy for electro-erosion and electro-chemical machining processes. Int J Mater Form 2:641–644. doi:10.1007/s12289-009-0460-6
Masuzawa T, Fujino M, Kobayashi K et al (1985) Wire electro-discharge grinding for micro-machining. CIRP Ann Manuf Technol 34:431–434. doi:10.1016/S0007-8506(07)61805-8
Clark WG, McGeough JA (1977) Temperature distribution along the gap in electrochemical machining. J Appl Electrochem 7:277–286. doi:10.1007/BF01059167
Mukherjee SK, Kumar S, Srivastava PK (2007) Effect of electrolyte on the current-carrying process in electrochemical machining. Proceedings of the Institution of Mechanical Engineers, part C. J Mech Eng Sci 1415–1419. doi: 10.1243/09544062JMES355
De Silva AKM, Altena HSJ, McGeough JA (2003) Influence of electrolyte concentration on copying accuracy of precision-ECM. CIRP Ann Manuf Technol 52:165–168. doi:10.1016/S0007-8506(07)60556-3
Hui C, Wang Y-K, Wang Z-L, Zhao W-S (2011) Effects of complexing agent on electrochemical micro machining of stainless steel. Am J Nanotechnol 2:100–105. doi:10.3844/ajnsp.2011.100.105
Owlad M, Aroua MK, Daud WAW, Baroutian S (2009) Removal of hexavalent chromium-contaminated water and wastewater: a review. Water Air Soil Pollut 200:59–77. doi:10.1007/s11270-008-9893-7
Schuurman A, Faber J (1997) (WO1997035810) A method of removing iron compounds and chromium compounds from an aqueous electrolytic solution as well as the use of this method in electrochemical machining. 1–11
Altena HSJ (2004) EDM and ECM for mass production Philips DAP. J Mater Process Technol 149:18–21. doi:10.1016/j.jmatprotec.2004.03.004
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Spieser, A., Ivanov, A. Recent developments and research challenges in electrochemical micromachining (µECM). Int J Adv Manuf Technol 69, 563–581 (2013). https://doi.org/10.1007/s00170-013-5024-8
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DOI: https://doi.org/10.1007/s00170-013-5024-8