Skip to main content
SpringerLink
Log in

Development of machining technology for micropatterns with large surface area

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

With increasing demand for micropatterns such as V-shaped microgrooves and the trend of large surface areas in developing technologies, precision machining technology for micropatterns with large surface areas is expected to play an increasingly important role in today's manufacturing technology. In large-surface micromachining, machining time is much longer than that in general pattern machining and it is not easy to achieve uniform machining accuracy in the entire machined areas because of various factors. Therefore, systematic machining processes and technical development for achieving precision in each process are essential prerequisites to reduce the errors. In this study, we focused on developing machining technologies, which include a machine vision system for precise tool setting, an on-machine measurement system for large-area measurement, and software for tool path generation and simulation, for the fabrication of large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in., 675 × 450-mm mold with tens of V-and pyramid-shaped micropatterns.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Heeren P, Reynaerts D, Van Brussel H, Beuret C, Larsson O, Bertholds A (1997) Microstructuring of sillicon by electro-discharge machining (EDM)-part II:applications. Sens Actuat A Phys 61:379–386

    Article  Google Scholar 

  2. Li Y, Guo M, Zhou Z, Hu M (2002) Micro electro discharge machine with an inchworm type of micro feed mechanism. Precis Eng 26(1):7–14

    Article  Google Scholar 

  3. Malek CK, Saile V (2004) Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review. Microelectron J 35(2):131–143

    Article  Google Scholar 

  4. Kang SW, Yang H (2000) Improvement of thickness uniformity in nickel electroforming for the LIGA process. Int J Mach Tools Manuf 40(7):1065–1072

    Article  Google Scholar 

  5. Bertsch A, Lorenz H, Renaud P (1999) 3D microfabrication by combining microstereolithography and thick resist UV lithography. Sens Actuat A Phys 73(1/2):14–23

    Article  Google Scholar 

  6. Azizur Rahman M, Rahman M, Senthil Kumar A, Lim HS (2005) CNC microturning: an application to miniaturization. Int J Mach Tools Manuf 45(6):631–639

    Article  Google Scholar 

  7. Lim HS, Kumar AS, Rahman M (2002) Improvement of form accuracy in hybrid machining of microstructures. J Electron Mater 31(10):1032–1038

    Article  Google Scholar 

  8. Liu X, Devor RE, Kapoor SG, Ehmann KF (2004) The mechanics of machining at the microscale: assessment of the current state of the science. J Manuf Sci Eng 126(4):666–678

    Article  Google Scholar 

  9. Liu X, Jun MB, Devor RE, Kapoor SG (2004) Cutting mechanisms and their influence on dynamic forces, vibrations and stability in micro-end milling. Proceedings of ASME IMECE Anaheim California pp 13–20

  10. Lee BK, Kim DS, Kwon TH (2004) Replication of microlens arrays by injection molding. Microsyst Technol 10(6/7):531–535

    Article  Google Scholar 

  11. Ikawa N, Donaldson RR, Kumanduri R, Konig W, Mckeown PA, Moriwaki T, Stowers IF (1991) Ultra-precision metal cutting - the past, the present and the future. Ann CIRP 40(2):587–593

    Article  Google Scholar 

  12. Weule H, Hüntrup V, Tritschler H (2001) Micro-cutting of steel to meet new requirements in miniaturization. Ann CIRP 50(1):61–65

    Article  Google Scholar 

  13. Childress FG, Eary SH, McLaughlin JE (1978) Cleaning and protecting LASL laser mirrors Y/DA-7591. Union Carbide Corporation-Nuclear Division Oak Ridge Y-12 Plant, Oak Ridge

    Google Scholar 

  14. Casstevens JM, Daugherty CE (1978) Diamond turning optical surfaces on electroless nickel. Precis Mach Optics SPIE 159:109–113

    Google Scholar 

  15. Sawada K, Kawai T, Takeuchi Y, Sata T (2000) Development of ultraprecision micro grooving. JSME Int J 43(1):170–176

    Google Scholar 

  16. Ghosh A, Neo KS, Yoshikawa T, Tan CH, Rahman M (2007) Performance evaluation of diamond tools for micro cutting of V-groove on electroless nickel plated die materials. Proceedings of the 7th euspen international conference Bermen pp 135–138

  17. Rezaur Rahman KM, Rahman M, Neo KS, Sawa M, Maeda Y (2006) Microgrooving on electroless nickel plated materials using a single crystal diamond tool. Int J Adv Manuf Technol 27(9):911–917

    Article  Google Scholar 

  18. Lee JM, Je TJ, Choi DS, Lee SW, Le D, Kim SJ (2010) Micro grooving simulation and optimization in the roughing stage. Int J Precis Eng Manuf 11(3):361–368

    Article  Google Scholar 

Download references

Acknowledgments

This research was supported by Basic Science Research Program Through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2009–0066078)

Author information

Authors and Affiliations

  1. High Safety Vehicle Core Technology Research Center, Department of Mechanical and Automotive Engineering, Inje University, Gimhae, South Korea

    Hyun-Chul Kim

  2. Electronics and Control Technology Team, Institute of Technology, Doosan Infracore, Yongin, Gyeonggi-Do, 448-795, South Korea

    Sung-Gun Lee

Authors
  1. Hyun-Chul Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sung-Gun Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Sung-Gun Lee.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kim, HC., Lee, SG. Development of machining technology for micropatterns with large surface area. Int J Adv Manuf Technol 58, 1261–1270 (2012). https://doi.org/10.1007/s00170-011-3544-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-011-3544-7

Keywords

Search

Navigation