Abstract
Micro electro-discharge machining (micro-EDM) is a critical technology to fabricate high aspect ratio 3D micro-components. However, the surfaces of micro-components manufactured by micro-EDM will exhibit micro-cracks to produce notch effects, and lead to stress concentrate and reduction of fatigue strength. This paper performs micro-bending tests to investigate the influence of various roughness and size on the bending fracture strength of micro WC-shafts manufactured by micro-EDM. The experimental results indicate that the surface roughness, axial surface area, volume, and length of the specimen will affect its bending fracture strength. For specimens with the same size, the mean bending fracture strength decreases as the surface roughness increases, and the bending fracture probability of the specimens also increases (roughness effect). For specimens with the same roughness, reducing the length or axial surface area will increase the mean bending fracture strength, and reduces the bending fracture probability (size effect).
Similar content being viewed by others
References
Yamamoto M, Kanno I, Aoki S (2000) Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films. Micro Electro Mechanical Systems, The Thirteenth Annual International Conference, pp 217–222
Reynaerts D, Meeusen W, Brussel HV (1998) Machining of three-dimensional microstructures insilicon by electro-discharge machining. Sens Actuators A 67:159–165
Qian J, Steegen S, Poorten EV, Reynaerts D, Brussel HV (2002) EDM texturing of multicrystalline silicon wafer and EFG ribbon for solar cell application. Int J Mach Tools Manuf 42:1657–1664
Her MG, Weng FT (2002) A study of the electrical discharge machining of semi-conductor BaTiO3. J Mater Process Technol 122:1–5
Unoa Y, Okadaa A, Okamotoa Y, Yamazakib K, Risbudb SH, Yamadac Y (1999) High efficiency fine boring of monocrystalline silicon ingot by electrical discharge machining. Precis Eng 23:126–133
Yang CT, Ho SS, Yan BH (2001) Micro hole machining of glass through electrochemial discharge machining (ECDM). Key Eng Mater 196:149–166
Lee ES, Howard D, Liang E, Collins SD, Smith RL (2004) Removable tubing interconnects for glass-based micro-fluidic systems made using ECDM. J Micromech Microeng 14:535–541
Fofonoff TA, Martel SM, Hatsopoulos NG, Donoghue JP, Hunter IW (2004) Microelectrode array fabrication by electrical discharge machining and chemical etching. Biomed Eng IEEE 51(6):890–895
Takahata K, Shibaike N, Guckel H (2000) High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM. Microsyst Technol 6:75–178
Takahata K, Gianchandani YB (2002) Batch mode micro-electro-discharge machining. J Microelectromechan Syst 11(2):102–110
Takahata K, Aoki S, Sato T (1996) Fine surface finishing method for 3-dimensional microstructures. Micro Electro Mechanical Systems, IEEE The Ninth Annual International Workshop 11–15:73–78
Menciassi A, Eisinberg A, Mazzoni M, Dario P (2002) A sensorized electro discharge machined superelastic alloy microgripper for micromanipulation: simulation and characterization. Intelligent Robots and System, IEEE/RSJ International Conference 2:1591–1595
Huang JD, Kuo CL (2002) Pin-plate micro assemble by integrating micro-EDM and Nd-YAG laser. Int J Mach Tools Manuf 42(13):1455–1464
Wang AC, Yan BH, Lee XT, Huang FY (2002) Use of micro ultrasonic vibration lapping to enhance the precision of micro holes drilled by micro electro-discharge machining Int J Mach Tools Manuf 42(8):915–923
Yan BH, Wang AC, Huang CY, Huang FY (2002) Study of precision micro-holes in borosilicate glass using micro EDM combined with micro ultrasonic vibration machining. Int J Mach Tools Manuf 42:1105–1112
Grimes CA, Jain MK, Singh RS, Cai Q, Mason A (2001) Magneto-elastic mcirosensors for environmental monitoring, Micro Electro Mechanical Systems, The 14th IEEE International Conference, pp 278–281
Sun XQ, Masuzawa T, Fujino M (1996) Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems IEEE, pp 312–317
Heeren PH, Reynaerts D, Van Brussel H, Beuret C, Larrson O, Bertholds A (1997) Microstructuring of silicon by electro-discharge machining (EDM) - part II: applications. Sens Actuators A 61:379–386
Clijnen J, Meeusen W, Reynaerts D, Van Brussel HV, Simons R, Plessers K (2002) Design and realization of an optical bi-axial inclination sensor. Sensors, Proceedings of IEEE 2:870–873
Takeuchi H, Nakamura K, Shimizu N, Shibaike N (2000) Optimization of mechanical interface for a practical micro-reducer. Micro Electro Mechanical Systems, The Thirteenth Annual International Conference, pp 23–27
Meeusen W, Clijnen J, Reynaerts D, Brussel HV, Puers R (2003) Micro-electro-discharge machining as microsensor fabrication technology. IEEE Sens J 3(5):632–638
Egashira K, Mizutani K (2002) Ultrasonic vibration drilling of microholes in glass. Ann CIRP 51:339–342
Egashira K, Mizutani K (2002) Micro-drilling of monocrystalline silicon using a cutting tool. J Int Soc Precis Eng Nanotechnol 26:263–268
Huang SH, Huang FY, Yan BH (2005) Fracture strength analysis of micro WC-shaft manufactured by micro electro-discharge machining. accepted Int J Adv Manuf Technol 26:68–77
Serre C, Gorostiza P, Rodriguez AP, Sanz F, Morante JR (1998) Measurement of micromechanical properties of polysilicon microstructures with atomic force microscope. Sens Actuators A 67:215–219
Stephens LS, Kelly KW, Simhadri S, McCandless AB, Meletis EI (2001) Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts. J Microelectromech Syst 10(3):347–359
Ericson F, Schweitz JA (1990) Micromechanical fracture strength of silicon. J Appl Phys 68(11):5840–5844
Sundararajan S, Bhushan B (2002) Development of AFM-based techniques to measure mechanical properties of nanoscale structures. Sens Actuators A 101:338–351
Kapels H, Aigner R, Binder J (2000) Fracture strength and fatigue of polysilicon determined by a novel thermal actuator. IEEE Trans Electron Devices 47(7):1522–1528
Namazu T, Isono Y (2003) Quasi-static bending test of nano-scale SiO2 wire at intermediate temperatures using AFM-based technique. Sens Actuators A 104:78–85
Ding JN, Meng YG, Wen SZ (2001) Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter. Mater Sci Eng B 83:42–47
Namazu T, Isono Y, Tanaka T (2000) Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM. J Microelectromech Syst 9(4):450–459
Yang J, Paul O (2002) Fracture properties of LPCVD silicon nitride thin films from the load-deflection of long membranes. Sens Actuators A 97-98:520–526
Vallo CI (2002) Influence of load type on flexural strength of a bone cement based on PMMA. Polym Test 21:793–800
Namazu T, Isono Y, Tanaka T (2000) Nano-scale bending test of Si beam for MEMS. Micro Electro Mechanical Systems, The Thirteenth Annual International Conference 23–27:205–210
Isono Y, Namazu T, Tanaka T (2001) AFM bending of nanometric single crystal silicon wire at intermediate temperatures for MEMS. Micro Electro Mechanical Systems, The 14th IEEE International Conference 21–25:135–138
Namazu T, Isono Y (2003) High-cycle fatigue test of nanoscale Si and SiO2 wires based on AFM technique, Micro Electro Mechanical Systems, IEEE The Sixteenth Annual International Conference, pp 19–23
Lee T, Deng J (2002) Mechanical surface treatments of electro-discharge machined (EDMed) ceramic composite for improved strength and reliability. J Eur Ceram Soc 22:545–550
Lok YK, Lee TC (1997) Processing of advanced ceramics using the wire-cut EDM process. J Mater Process Technol 63:839–843
Liu CC, Huang JL (2003) Effect of the electrical discharge machining on strength and reliability of TiN/Si3N4 composites. Ceram Int 29:679–687
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Yan, B., Huang, S. & Huang, F. Bending strength analysis of micro WC-shaft manufactured by micro electro-discharge machining. Int J Adv Manuf Technol 29, 695–706 (2006). https://doi.org/10.1007/s00170-005-2565-5
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00170-005-2565-5