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Production-flow-value-based job dispatching method for semiconductor manufacturing

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Abstract

In a wafer manufacturing system, the value added to a particular product at a station may differ significantly from that added to a different product at the same station. If an enterprise concentrates mainly on generating profits, throughput becomes a poor performance measurement for a manufacturing system. Job dispatching rules based on maximum throughput no longer guarantee maximizing profit. Hence, profitability would be a good alternative measurement. The main purpose of this study is to develop a production-flow-value-based job dispatching rule (PFV) by the theory of constraints (TOC) for wafer fabrication. This study derives a TOC cost estimation method and a profitability estimate of a WIP-wafer lot. Jobs are then prioritized based on their profitability. Thus the PFV job dispatching rule is developed. For comparison, two job dispatching rules, MCR and MBS, are also arbitrarily selected to perform simulations. The simulation results reveal that the proposed PFV maximizes the production flow value, while MCR and MBS do not.

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Acknowledgements

The authors would like to thank the National Science Council of the Republic of China, Taiwan for financially supporting this research under Contract No. NSC90-2212-E-002-210.

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Authors and Affiliations

  1. Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, ROC

    Suhua Hsieh & Kai-Chung Hou

Authors
  1. Suhua Hsieh
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  2. Kai-Chung Hou
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Corresponding author

Correspondence to Suhua Hsieh.

Appendix

Appendix

Table 2 Table 3 Table 4

Table 2 Machine data (MTBF and MTTR represent mean time between failure and mean time to repair, both are exponential distributions)
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Table 3 A 61-step product recipe used in the study (We assume all the process times are constant)
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Table 4 The average cycle times for the three dispatching rules from the simulation results (Note the standard deviations for all of the results are between 0.003∼0.006days.)
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Hsieh, S., Hou, KC. Production-flow-value-based job dispatching method for semiconductor manufacturing. Int J Adv Manuf Technol 30, 727–737 (2006). https://doi.org/10.1007/s00170-005-0105-y

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