Abstract
To implement new process control strategies, including intelligent processing of materials, advanced sensors are required to nonintrusively evaluate process and microstructure variables. This overview examines the nature and characteristics of emerging sensors based upon nondestructive evaluation technologies and other new measurement methods. Also featured are various aspects of sensors emerging from recent R&D efforts and the trade-offs between sensor needs and process understanding. In general, sophisticated sensors can reduce the dependence upon quantitative process models for process control and vice-versa.
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Additional information
Haydn N.G. Wadley received his Ph.D. in solid state physics from the University of Reading in 1979. He is currently a group leader in the Metallurgy Division of the National Bureau of Standards in Gaithersburg, Maryland.
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Wadley, H.N.G. Sensors for Intelligent Processing of Materials. JOM 38, 49–53 (1986). https://doi.org/10.1007/BF03258585
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DOI: https://doi.org/10.1007/BF03258585