Abstract
Currently, the major issue in the growth of GaAs and InP single crystal density. This is necessitated by optical and electronis device performance requirements. This paper reviews the major appplications of these III–V compounds and then describes the theoretical analysis from which a practical realization of dislocation elimination in crystal growth can be based. Also outlined are recent developments in low temperature gradient growth and hardening by In-alloying that in some judicious combination offer the hope to meet device and IC fabrication objectives
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References
R.A. Laudise,J. Crystal Growth, 65 (1983) 3.
V. Swaminathan, Bulletin of Materials Science, 4 (1982) 403.
H. Goronkin, Robert O. Grondin and D.K. Ferry, Gallium Arsenide Technology, ed. D.K. Ferry (Indianapolis, Indiana: H.W. Sams and Co., Inc., 1985) 155–187.
H. Hirayama, M. Togashi, N. Kato, M. Suzuki, Y. Matsuoka and Y. Kawasaki, IEEE Trans. Electron Devices, ED-33 (1986) 104.
D.V. Morgan and F.H. Eisen, “Ion Implantation and Damage in GaAs,” Gallium Arsenide, ed. M.J. Howes and D.V. Morgan (New York, N.Y.: John Wiley and Sons, 1985) 161.
D.E. Holmes, K.R.E. Elliott, R.T. Chen and C.G. Kirkpátrick, “Stoichiometry-Related Centres in LEC-GaAs,” Semi-Insulating III—V Materials, ed. S. Makram-Ebeid and B. Tuck (Cheshire, U.K.: Shiva Publishing Ltd., 1982) 19–27.
H.M. Hobgood, L.B. Ta, A. Rohatgi, G.W. Eldridge and R.N. Thomas, “Residual Impurities and Defect Levels in Semi-Insulating GaAs Grown by Liquid Encapsulation Czochralski,” op cit. Reference 6, 28–35.
J.B. Clegg, “Impurity Analysis of Semi-Insulating GaAs,“ op cit. Reference 6, 80–91.
J.P. Farges, G. Jacob, C. Schemali, G.M. Martin, A. Mircea-Roussel and J. Hallois, “Undoped LEC GaAs with Improved Purity and Yield of S.I. Crystals,” op cit. Reference 6, 45–53.
T.R. Aucoin, R.L. Ross, M.J. Wade and R.D. Savage, Solid State Technology, 22 (1975) 59.
S. Tong-nien, L. Szu-lin and K. Shu-tseng, “The Preparation of Semi-Insulating and Low Dislocation Density InP Single Crystals,” op cit. Reference 6, 61–67.
R.J. Roedel, A.R. VonNeida, R. Caruso and L.R. Dawson, J. Electrochem. Soc., 126 (1979) 637.
P. Petroff and R.L. Hartman, Appl. Phys. Letters,23 (1973) 469.
S. Mahajan, V.G. Keramidas, A.D. Chin, S.N.G. Chu, W.A. Bonner and D.D. Manchon, Jr., In: Defects and Radiation Effects in Semiconductors 1980, Inst. Phys. Conf., Ser. 59 (Inst. Phys. London-Bristol, 1981) 413.
S. Mahajan et al., Appl. Phys. Letters, 38 (1981) 255
A.K. Chin, “The Effect Of Crystal Defects on Device Performance and Reliability,” J. Crystal Growth, 70 (1984) 582.
R.T. Blunt, S. Clark and D.J. Stirland, IEEE Trans, on Microwave Theory and Techniques, Vol. MIT 30 7 (1982) 943.
G.M. Martin, G. Jacob, G. Poiblaud, A. Goitzene and C. Schwob, Inst. Phys. Conf. Ser., 59 (1980) 281.
D.E. Holmes, M.R. Brozel, I. Grant, R.M. Ware and D.J. Stirland, Appl. Phys. Lett., 42 (1983) 610.
Y. Matsmoto and H. Watanabe, Jap. J. Appl. Phys., 21 (1982) L515.
Y. Nanishi, S. Ishida, T. Honda, H. Yamazaki and S. Miyazawa, “Inhomogeneous GaAs FET Threshold Voltages Related to Dislocation Distribution,” Jap. J. Appl. Phys., 21 (1982) L335–L337.
S. Miyazawa and F. Hyuga, IEEE Trans. Electron Devices, ED-33 (1986) 227.
W.C. Dash, J. Appl. Phys., 29 (1958) 736.
J.H. Matlock, Semiconductor Silicon 1977, ed. RR. Huff and E. Sirtl, (The Electrochemical Society, Princeton, N.J., 1977) 32.
B.C. Grabmaier and J.G. Grabmaier, J. Crystal Growth, 13/14 (1972) 635.
E. Billig, Proc. Roy. Soc. London, A235 (1956) 37.
D.C. Bennet and B. Sawyer, Bell Syst. Tech. J., 35 (1956) 637.
P. Penning, Philips Res. Rept., 13 (1958) 79.
S.F. Nygreh, J. Crystal Growth, 19 (1973) 21.
A.S. Jordan, R. Caruso and A.R. VonNeida, Bell Syst. Tech. J., 59 (1980) 593.
A.S. Jordan, A.R. VonNeida and R. Caruso, J. Crystal Growth, 70 (1984) 555–573.
A.S. Jordan, J. Crystal Growth, 71 (1985) 559–565.
A.S. Jordan, R. Caruso, A.R. VonNeida and J.W. Nielsen, J. Appl. Phys., 52 (1981) 3331.
N.P. Sazhin, M.G. Milvidskii, V.B. Osvenskii and O.G. Stoljarov, Soviet Phys. Solid State, 8 (1966) 22.
Y. Seki, H. Watanabe and J. Matsui, J. Appl. Phys., 49 (1978) 22.
G.T. Brown, B. Cockayne and W.R. MacEwan, J. Crystal Growth, 51 (1981) 369.
G.T. Brown, B. Cockayne, W.R. MacEwan and D.J. Ashen, J. Mater. Sci. Letters, 2 (1983) 667.
A.S. Jordan, G.T. Brown, B. Cockayne, D. Brasen and W.A. Bonner, J. Appl. Phys., 58 (1985) 4389.
G. Jacob, J. Crystal Growth, 58 (1982) 455.
H.M. Hobgood, R.N. Thomas, D.L. Barrett, G.W. Eldridge, M.M. Sopira and M.C. Driver, “Large Diameter Low Dislocation In-Doped GaAs: Growth, Characterization and Implications for FET Fabrication,” Semi Insulating III–V Materials, ed. D.C. Look and J.S. Blakemore (Cheshire, U.K.: Shiva Publishing Ltd., 1984) 149–156.
A.R. VonNeida, R. Caruso and A.S. Jordan, to be published.
A.G. Elliot, C.L. Wei, R. Farraro, G. Woolhouse, M. Scott and R. Hiskes, “Low Dislocation Density, Large Diameter, LEC GaAs,” J. Crystal Growth, 79 (1984) 169–178.
T. Fukuda, J. Journal Appl. Phys., 22 (1983) 413–418.
A.S. Jordan, R. Caruso and A.R. VonNeida, Bell Sys. Tech. J., 62 (1983) 477–498.
J.M. Parsey, Y. Nanishi, J. Lagowski and H.C. Gatos, J. Electrochem. Soc., 129 (1982) 388.
M. Peigen, Y. Jinhua, L. Shonchun, J. Daiwei and Z. Huifang, J. Crystal Growth, 65 (1983) 243.
M.S.S. Young et al., to be published.
A.S. Jordan and J.M. Parsey, J. Crystal Growth, to be published.
K. Matsumoto, H. Morishita, M. Sasaki, S. Nishine, M. Yokogawa, M. Sekinobu, K. Todaz and S. Akai, “LEC Growth of 3 Inch Diameter Undoped SI GaAs with Good Reproducibility Using an Improved Hot Zone,” op cit. Reference 40, 175–177.
S. Miyazawa, T. Honda, Y. Ishii and S.I. Shida, Appl. Phys. Lett., 44 (1984) 410.
D. Rumsby, I. Grant, M.R. Brozel, E.J. Foulkes and R.M. Ware, “Electrical Behavior of Annealed LEC GaAs,” op cit. Reference 41, 165–170.
A.K. Chin, A.R. VonNeida and R. Caruso, J. Electrochem. Soc., 129 (1982) 2386.
A.K. Chin, R. Caruso, M.S.S. Young and A.R. VonNeida, Appl. Phys. Lett., 45 (1984) 552.
A.K. Chin, I. Camlibel, R. Caruso, M.S.S. Young and A.R. VonNeida, J. Appl. Phys., 57 (1985) 2203.
K. Terashima, T. Katsumate, F. Qrito, T. Kikuta and T. Fukuda, J. Journal Appl. Phys., 22 (1983) L325.
H. Kohda, K. Yamada, H. Nakanishi, T. Kobayashi, J. Osaka and K. Hoshikawa, J. Crystal Growth, 71 (1985) 813.
S. Ozawa, private communication
Additional information
A.R. Von Neida received his Ph.D. in metallurgy from Yale University. He is currently a Distinguished Member of the Technical Staff of the Device Materials Research Department at AT&T Bell Laboratories in Murray Hill, New Jersey.
Andrew S. Jordan received his Ph.D. in metallurgy from the University of Pennsylvania. He is currently Supervisor of the Heterostructure Materials Group at AT&T Bell Laboratories in Murray Hill, New Jersey.
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VonNeida, A.R., Jordan, A.S. Reducing Dislocations in GaAs and InP. JOM 38, 35–40 (1986). https://doi.org/10.1007/BF03257816
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DOI: https://doi.org/10.1007/BF03257816