Abstract
The microstructure and optical properties of Ag5In5Te47Sb33 phase change films with high reflection in the thermal annealing process were systematically reported. The as-deposited film is amorphous and its crystalline temperature is 160°C. The annealed films are crystalline. The crystalline phases are AgInTe2, AgSbTe2 and Sb when annealed at low temperature. When annealed at 220°C, the AgInTe2 phase disappears and the amount of AgSbTe2 is the largest. The research of electronic transmission microscopy shows that the morphology of AgSbTe2 is sphere and that of Sb is bludgeon. The reflection of the annealed films is higher and reaches its peak value at 220°C.
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Liu, H., Jiang, F., Men, L. et al. Microstructure and optical properties of Ag5In5Te47Sb33 phase change thin films with high reflection in thermal annealing process. Chin.Sci.Bull. 43, 2078–2082 (1998). https://doi.org/10.1007/BF03183510
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DOI: https://doi.org/10.1007/BF03183510