Abstract
Millimeter wave device technology requires nm-scale structurization capabilities with optimized surface properties. Results on anodic soft etching and cathodic metallization are reported for nanometrix structures. As a device example, terahertz Schottky diodes were fabricated with good noise performance as mixers operating around 600 GHz.
Résumé
La technologie des dispositifs en ondes millimétriques requiert la possibilité üobtenir des structures à ľéchelle nanométrique avec des propriétés de surfaces optimisées. Ľarticle présente des résultats relatifs à ľattaque anodique douce et à la métallisation cathodique pour des structures nanométriques. Exemple de fabrication de diodes Schottky THz à bonne caractéristique de bruit et fonctionnant au voisinage de 600 GHz.
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Hartnagel, H.L. Technological developments towards nanometric structures. Ann. Télécommun. 47, 493–498 (1992). https://doi.org/10.1007/BF02998311
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DOI: https://doi.org/10.1007/BF02998311