Conclusions
The electronic properties of Au/Si interface are investigated with a homemade ballistic-electron-emission microscope. The spatial distribution of Schottky barrier height is detected. Irreversible changes of ballistic transmittance of local interface with typical size of a few hundred of angstroms in diameter are observed by raising the tip voltage temporarily. Ballistic-electron-emission spectroscopy indicates that the electron transmission probabilities are reduced significantly inside the modified region, which is attributed to the Au-Si intermixing and other chemical reactions occurring at the interfacial layer stimulated by the injected energetic hot electrons.
Similar content being viewed by others
References
Kaiser, W. J., Bell, L. D., Direct investigation of subsurface interface electronic structure by ballistic-electron-emission microscopy,Phys. Rev. Lett., 1988, 60: 1406.
Binnig, G., Rohrer, H., Gerder, Ch.et al., 7 × 7 reconstruction of Si(111) resolved in real space,Phys. Rev. Lett., 1983, 50: 120.
Milliken, A. M., Manion, S. J., Bell, L. D.et al., Probing hot-carrier transport and elastic scattering using ballistic-electron-emission microscopy,Phy. Rev. B, 1992, 46: 12–826.
Hecht, M. H., Bell, L. D., Kaiser, W. J.et al., Ballistic-electron-emission microscopy investigation of Schottky barrier interface fonnation,Appl. Phys. Lett., 1989, 55: 780.
Bell, L. D., Millien, A. M., Manion, S. J.et al., Ballistic-electron-emission microscopy of strained Si1-xCex layer,Phys. Rev. B, 1994, 50: 8–082.
Ludeke, R., Bauer, A., Cartier, E., Hot electron transport in SiO2 probed with a scanning tunneling rnicrmcope,Appl. Phys. Lett., 1995, 66: 730.
Femandez, A., Hallen, H. D., Huang, T.etal., Ballistic electron studies and modification of the Au/Si interface.Appl. Phys. Lett.. 1990. 57(26): 2–826.
Hallen, H. D., Fernandez, A., Huang, T.et al., Gold-silicon interface modification studies,J. Vac. Sci. Technol. B, 1991, 9(2): 585.
Hallen, H. D., Huang, T., Fernandez, A.et al., Hot electron interaction at the passivated gold-silicon interface.Phys. Rev. Lett., 1991, 69: 2–931.
Bai, C. L., Guo, Y., Ballistic-electron-emission microscopy in investigation of Au/Si(100) Schottky barrier interface.Wuli Xuebao, 1995, 44(1): 133.
Ramsier, R. D., Yates, J. T., Jr.,Surf. Sci. Rep., 1991, 12: 243.
Cuberes, M. T.. Bauer, A., Wen, H. J.etal., Ballistic-electron-emission microscopy on the Au/n-Si(l1l) 7 × 7 interface,J. Vac. Sci. Technol. B, 1994, 12: 2–422.
Author information
Authors and Affiliations
About this article
Cite this article
Qiu, X., Shang, G., Wang, C. et al. Influence of low energy ballistic electron on the transmittance properties of Au/Si interface studied by ballistic-electron-emission microscope. Chin.Sci.Bull. 42, 1282–1286 (1997). https://doi.org/10.1007/BF02882760
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02882760