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An arc generator of a broad plasma stream

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Abstract

The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150×10 cm2 and a density of ∼1010 cm−3 at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges.

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References

  1. Danilin, B.S. and Kireev, V.Yu.,Primenenie nizkotemperaturnoi plazmy dlya travleniya i ochistki materialov (Application of Low-Temperature Plasma for Etching and Cleaning of Materials), Moscow: Energoatomizdat, 1987.

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Authors and Affiliations

  1. Siberian Division, Institute of High Current Electronics, Akademicheskii pr. 4, 634055, Tomsk, Russia

    L. G. Vintizenko, N. N. Koval’, P. M. Shchanin & V. S. Tolkachev

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  1. L. G. Vintizenko
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  2. N. N. Koval’
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  3. P. M. Shchanin
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  4. V. S. Tolkachev
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Vintizenko, L.G., Koval’, N.N., Shchanin, P.M. et al. An arc generator of a broad plasma stream. Instrum Exp Tech 43, 375–377 (2000). https://doi.org/10.1007/BF02759038

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  • DOI: https://doi.org/10.1007/BF02759038

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