Abstract
We present here a new technique, called vapour phase spray pyrolysis, for deposition ofto andito films. Undopedto film showed semiconducting nature, a sheet resistance of 1088 Ω/□, a donor ionization energy level of 40 meV, average visible transmittance of 75·4% andn-type conductivity. The indium doped (ito) film 10 wt % showed metallic nature, a sheet resistance of 15 Ω/□, average visible transmittance of 80·4 % andp-type conductivity. Thus theto andito films showed fairly good electro-optical qualities, comparable to those obtained by sophisticated and costly techniques.
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Sharma, T.P., Pandey, C.P. Transparent conducting films. Bull. Mater. Sci. 7, 131–135 (1985). https://doi.org/10.1007/BF02744421
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DOI: https://doi.org/10.1007/BF02744421